Metrology

Content

I.   Jeol JSM-7500TFE SEM
II.  Hitachi TM1000 Table-top SEM
III. Tencor Alpha-step 500 surface profiler
IV. EasyScan AFM
V.  Nikon OptiPhot 200
VI.Hirox Digital Microscope
 

Jeol JSM-7500TFE	MC B4 204
Thermal field emitter (Schottky) 0.1 to 30keV acceleration Detector: In-lens SE detector, lateral SE detector Magnification: 25 – 1’000’000x	Specimen stage: 5-axis goniometric Maximum sample size: 4 inch wafer Resolution: 1.5nm at 20kEV, 3nm at 1keV

Billing

EPFL users : 50CHF/hour
(All members of EPFL are welcome to use this SEM, please contact the responsible for the training)

External users: 80CHF/hour
(As owner of this SEM, the OPT lab is deciding himself to grant the acces to external users, please contact Gaël Osowiecki)

This billing is based on the reservation system (reservations.epfl.ch). It is billed by units of 15min.

Please correctly fill in the reservation with the information of your lab (“unité”). If you used the SEM more or less time than the expected time entered in the reservation, please correct your reservation accordingly.

Included:

All equipement for sample preparation is included in the service. Gloves, conductive tape, gold coating, carbon coating etc…

Training:

Grégoire Smolik 

TABLE-TOP SEM	ZONE 6
Hitachi TM-1000 SEM 15keV acceleration voltage Detector: Solid State Backscattered Electron (BSE) Magnification: 20 – 10’000x	Specimen stage: X = 15mm / Y = 18mm Maximum sample size: 70mm in diameter Maximum sample height: 20mm

Training

Karin Prater

Tencor Alpha-Step 500	Zone 5
Stylus surface profilometer Measurement range in Z: 10nm to 300µm	Spatial resolution: 10µm

Training

Irène Philipoussis

 

AFM	ZONE 8
NanoSurf EasyScan AFM Fast and easy AFM measurements

 

Training

Michail Symeonidis

 

NIKON OPTIPHOT 200	ZONE 5
Objectives: 5x, 10x, 20x, 50x, 100x µEye CCD camera UI-1240SE-C UV filter	Color CCD 5Mpx Brightfield and darkfield illumination

Training

Irène Philipoussis

Hirox KH-8700 digital microscope	MC B4 204
enhanced digital processing easy 2D measures Zernike polynomial coefficients	automated 3D tiling

The Hirox KH-8700 base station comes with a full high definition LCD monitor with a high intensity LED source and a high sensitivity compact CCD camera The stand has a motorized z-stage and also a motorized x-y stage is available

Lenses

At this moment we have 2 lenses available:

• dual illumination revolver zoom lens (35-2500 x)
• bright field /darkfield illumination
• polarisation filter

 

• mid range zoom lens (50-400x)
• with selection of optical adapters
• extreme long working distance (6-7 cm)
• rotary head adapte allow 360° 3D image observation

Training:

Ask Peter Van Der Wal