In this project, a small 3-phases axial flux BLDC motor in form of a MEMS (micro-electromechanical system) is designed with the corresponding electronic circuit. The stator is realized following the rules used for MEMS manufacture and the coils have two copper layers. The rotor is made of a standard ring-shaped permanent magnet assembled over the stator chip. The prototype has an efficiency of 31% for an input power of 400 nW.
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Développement et caractérisation de microbobines pour un système électromécanique en technologie MEMS
