- Microsystems Laboratory
- Our laboratory is devoted to micro/nanosystems (MEMS/NEMS) and to the development of new fabrication techniques for highly miniaturized integrated devices and systems. We are mostly active in rapid prototyping of micro and nanostructures by novel patterning methods (e.g. stencilling, thermal scanning probe lithography, and inkjet printing) as well as self-assembly. One further focus of our research is on the micro and nanostructuring of novel, functional materials, such as polymer and bio-materials. Finally, we are also interested in the development of scalable micro/nanomanufacturing. A selection of our fields of research and examples are listed below:
Past projects
Contact
Prof. Jürgen BruggerEPFL STI IMT LMIS1(Batiment BM)
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Secretary office:Nicole BouendinBM 3108Phone: 41 21 693 38 45
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