Publications

2024

Towards standardisation of parameter reporting for melt electrowriting

S. Menke; B. Tandon; J. Brugger 

2024

Performance Comparison of Shape Memory Polymer Structures Printed by Fused Deposition Modeling and Melt Electrowriting

B. Tandon; N. Sabahi; R. Farsi; T. Kangur; G. Boero et al. 

Advanced Materials Technologies. 2024. DOI : 10.1002/admt.202400466.

X-Band Single Chip Integrated Pulsed Electron Spin Resonance Microsystem

R. Farsi; N. Sahin Solmaz; M. Maury; G. Boero 

Analytical Chemistry. 2024. DOI : 10.1021/acs.analchem.4c02769.

Additive manufacturing of novel tubular designs using a filament-driven opensource melt electrowriting machine

S. Menke; B. Tandon; A. Bertsch; J. Brugger 

2024. Swiss e-print, Dübendorf, Switzerland, 2024-09-25 – 2024-09-26.

Resist-free metal patterning inside 3D printed concave tubular structures using a flexible stencil

B. Tandon; S. Menke; A. Zedgitt; C. S. S. Lipp; S. Jiguet et al. 

2024. 50th International Micro and Nano Engineering Conference, Montpellier, 2024-09-16 – 2024-09-19.

Development of core-shell lipid microneedles for sublingual delivery

B. T. M. Vignon 

2024.

Designing of Bridges on Stencils: Calculation and Simulation

M. Oulare 

2024.

Melt Electro-Writing for Wound Repair and Drug Delivery with Lipid Medium

O. Gubelmann 

2024.

Electrowriting of SU-8 Microfibers

D. A. Sandoval Salaiza; N. D. Valsangiacomo; N. U. Dinç; M. Yildirim; P. D. Dalton et al. 

Polymers. 2024. Vol. 16, num. 12. DOI : 10.3390/polym16121630.

Semester Project Report (2024 Spring) Grayscale thermal scanning probe lithography in photonic applications

L. Chang 

2024.

[n]Cycloparaphenylenes as Compatible Fluorophores for Melt Electrowriting

P. C. Hall; H. W. Reid; I. Liashenko; B. Tandon; K. L. O’Neill et al. 

Small. 2024. DOI : 10.1002/smll.202400882.

A continuous-wave and pulsed X-band electron spin resonance spectrometer operating in ultra-high vacuum for the study of low dimensional spin ensembles

F. H. Cho; J. Park; S. Oh; J. Yu; Y. Jeong et al. 

Review Of Scientific Instruments. 2024. Vol. 95, num. 6, p. 063904. DOI : 10.1063/5.0189974.

Near-Room-Temperature Detection of Aromatic Compounds with Inkjet-Printed Plasticized Polymer Composites

M. M. Kiaee; T. Maeder; J. Brugger 

Acs Sensors. 2024. Vol. 9, num. 3, p. 1382 – 1390. DOI : 10.1021/acssensors.3c02406.

First Advanced Bilayer Scaffolds for Tailored Skin Tissue Engineering Produced via Electrospinning and Melt Electrowriting

F. Girard; C. Lajoye; M. Camman; N. Tissot; F. B. Pedurand et al. 

Advanced Functional Materials. 2024. DOI : 10.1002/adfm.202314757.

Tomographic microscopy of functionally graded polymer-derived SiCN ceramics with tunable gradients

L. Hageluken; M. G. Makowska; F. Marone; J. Brugger 

Materialia. 2024. Vol. 33, p. 102025. DOI : 10.1016/j.mtla.2024.102025.

2023

Towards optical MAS magnetic resonance using optical traps

L. Marti; N. S. Solmaz; M. Kern; A. Chu; R. Farsi et al. 

Journal Of Magnetic Resonance Open. 2023. Vol. 18, p. 100145. DOI : 10.1016/j.jmro.2023.100145.

Melt Electrowriting Report

A. Zedgitt 

2023.

Effects of Electrode Design on the Melt Electrowriting of Sinusoidal Structures

B. Tandon; A. B. Zuege; S. Luposchainsky; P. D. Dalton 

Advanced Engineering Materials. 2023. DOI : 10.1002/adem.202300335.

Liquid-in-a-MEMS: Encapsulation of Liquid in a Microcapsule by Inkjet Printing

J. Park; A. Bertsch; J. Brugger 

2023. 

LIQUID-IN-A-MEMS: ENCAPSULATION OF LIQUID IN A MICROCAPSULE BY INKJET PRINTING

J. Park; A. Bertsch; J. Brugger 

2023. 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Kyoto, Japan, 2023-06-25 – 2023-06-29.

Fabrication and Characterization of Lipid Sublingual Drug Delivery Device

N. Zaugg 

2023.

Nanoimprint stamp fabrication by combination of T-SPL and dry etching

G. Pellerin 

2023.

Nanoliter Liquid Packaging in a Bioresorbable Microsystem by Additive Manufacturing and its Application as a Controlled Drug Delivery Device

J. Park; A. Bertsch; C. Martin Olmos; J. Brugger 

Advanced Functional Materials. 2023. num. 2302385. DOI : 10.1002/adfm.202302385.

MEWron: An open-source melt electrowriting platform

A. Reizabal; T. Kangur; P. G. Saiz; S. Menke; C. Moser et al. 

Additive Manufacturing. 2023. Vol. 71, p. 103604. DOI : 10.1016/j.addma.2023.103604.

Biodegradable Implantable Microsystems

J. Park; J. Brugger 

2023. 2022 International Electron Devices Meeting (IEDM), San Francisco, CA, USA, December 3-7, 2022. p. 29.4.1 – 29.4.4. DOI : 10.1109/IEDM45625.2022.10019376.

Single Chip Dynamic Nuclear Polarization Microsystems

N. Sahin Solmaz / G. Boero (Dir.)  

Lausanne, EPFL, 2023. 

One-step fabrication of high refractive index inorganic nanostructures

E. Zanchetta; G. Della Giustina; A. Gandin; V. Auzelyte; G. Brusatin 

Journal Of Sol-Gel Science And Technology. 2023. Vol. 107, p. 122 – 132. DOI : 10.1007/s10971-021-05633-8.

Grayscale Nanopatterning by Thermal Scanning Probe Lithography

leonardo cele 

2023.

Laser-Induced Forward Transfer of Functional Microdevices

Z. Yang / J. Brugger (Dir.)  

Lausanne, EPFL, 2023. 

2022

Fabrication of Lipid Microstructure for Oral Drug Delivery Device

A. Duret 

2022.

Nanobridge Stencil Enabling High Resolution Arbitrarily Shaped Metallic Thin Films on Various Substrates

Y-C. Sun; G. Boero; J. Brugger 

Advanced Materials Technologies. 2022. DOI : 10.1002/admt.202201119.

Comparison of electrical and optical transduction modes of DNA-wrapped SWCNT nanosensors for the reversible detection of neurotransmitters.

P. Clement; J. Ackermann; N. Sahin-Solmaz; S. Herbertz; G. Boero et al. 

Biosensors & Bioelectronics. 2022. Vol. 216, p. 114642. DOI : 10.1016/j.bios.2022.114642.

Edge-Contact MoS2 Transistors Fabricated Using Thermal Scanning Probe Lithography

A. Conde-Rubio; X. Liu; G. Boero; J. Brugger 

Acs Applied Materials & Interfaces. 2022. Vol. 14, num. 37, p. 42328 – 42336. DOI : 10.1021/acsami.2c10150.

Nanopore Generation in Biodegradable Silk/Magnetic Nanoparticle Membranes by an External Magnetic Field for Implantable Drug Delivery

Y. Wang; G. Boero; X. Zhang; J. Brugger 

Acs Applied Materials & Interfaces. 2022. Vol. 14, num. 35, p. 40418 – 40426. DOI : 10.1021/acsami.2c10603.

Multiscale microshaping of functionally graded polymer-derived SiCN ceramics

L. Hagelüken; M. Makowska; J. Brugger 

Ceramics in Europe 2022, Krakow, Poland, 10th – 14th July, 2022.

Nanofabrication of hard mask for single dopant-based quantum hardware

Damien Bertrand 

2022.

Ion Implantation for Single Dopant Based Quantum Hardware

Mehmet Kuzey Aydin 

2022.

Melt Electrowriting of Lipids for drug delivery

H. Calamandrei 

2022.

Liquid encapsulated drug delivery device for acoustically-controlled release

L. Lacoume 

2022.

Study of the enhanced electricity output of a sliding droplet-based triboelectric nanogenerator for droplet sensor design

W. Xu; X. Li; J. Brugger; X. Liu 

Nano Energy. 2022. Vol. 98, p. 107166. DOI : 10.1016/j.nanoen.2022.107166.

SU-8 cantilever with integrated pyrolyzed glass-like carbon piezoresistor

J. Jang; G. Panusa; G. Boero; J. Brugger 

Microsystems & Nanoengineering. 2022. Vol. 8, num. 1, p. 22. DOI : 10.1038/s41378-022-00351-9.

Precise Capillary‐Assisted Nanoparticle Assembly in Reusable Templates

H. Yu; A. Conde Rubio; H-C. Wang; O. Martin; G. Boero et al. 

Particle & Particle Systems Characterization. 2022.  p. 1 – 8, 2100288. DOI : 10.1002/ppsc.202100288.

NMR spectroscopy of a single mammalian early stage embryo

G. Sivelli; G. M. Conley; C. Herrera; K. Marable; K. J. Rodriguez et al. 

Journal Of Magnetic Resonance. 2022. Vol. 335, p. 107142. DOI : 10.1016/j.jmr.2021.107142.

Multiscale 2D/3D microshaping of property-contrast polymer-derived SiCN

L. Hagelüken; M. Makowska; J. Brugger 

46th International Conference and Expo on Advanced Ceramics and Composites (ICACC2022), Virtual, January 24-28, 2022.

Tomographic Volumetric Additive Manufacturing of Silicon Oxycarbide Ceramics

M. Kollep; G. Konstantinou; J. Madrid-Wolff; A. Boniface; L. Hagelüken et al. 

Advanced Engineering Materials. 2022. Vol. 24, num. 7, p. 2101345. DOI : 10.1002/adem.202101345.

FABRICATION OF TRANSFERRED FLEXIBLE PMMA STENCIL LITHOGRAPHY

X. Liu; G. Boero 

2022

Experimental Analysis of Ductile Cutting Regime in Face Milling of Sintered Silicon Carbide

M. Groeb; L. Hagelüken; J. Groeb; W. Ensinger 

Materials. 2022. Vol. 15, num. 7, p. 2409. DOI : 10.3390/ma15072409.

Developing Melt Electrowriting on an Open-Source Fused Filament Fabrication Platform

T. Kangur 

2022.

SPONTANEOUS FORMATION AND PROGRAMMABLE ORIENTATION OF SURFACE WRINKLES ON THERMOSENSITIVE RESIST

X. Liu; J. Brugger 

2022

Scalable fabrication of functional nanostructures on stretchable substrates by capillary-assisted particle assembly and adhesion lithography

H. S-C. Yu / J. Brugger (Dir.)  

Lausanne, EPFL, 2022. 

Development of stencil lithography for stretchable interconnects

Y-C. Sun / J. Brugger (Dir.)  

Lausanne, EPFL, 2022. 

Multiscale microshaping of functionally graded polymer-derived SiCN ceramics

L. Hagelüken / J. Brugger (Dir.)  

Lausanne, EPFL, 2022. 

2021

Multiscale 2D/3D microshaping and property tuning of polymer-derived SiCN ceramics

L. Hagelüken; P. V. Warriam Sasikumar; H-Y. Lee; D. Di Stadio; Y. Chandorkar et al. 

Journal of the European Ceramic Society. 2021. Vol. 42, num. 5, p. 1963 – 1970. DOI : 10.1016/j.jeurceramsoc.2021.12.044.

Stretchable Conductors Fabricated by Stencil Lithography and Centrifugal Force-Assisted Patterning of Liquid Metal

Y-C. Sun; G. Boero; J. Brugger 

ACS Applied Electronic Materials. 2021. Vol. 3, num. 12, p. 5423 – 5432. DOI : 10.1021/acsaelm.1c00884.

Spontaneous formation of ordered micro-wrinkles on a thermosensitive resist

X. Liu; M. Rostami; A. Conde Rubio; G. Boero; J. Brugger 

47th Micro and Nano Engineering Conference (MNE 2021), Turin, Italy, September 20-23, 2021.

High resolution meandering metal patterns enabled by nano-bridge stencil

Y-C. Sun; G. Boero; J. Brugger 

47th international Conference on Micro and Nano Engineering (MNE2021), Turin, Italy, September 20-23, 2021.

Freeform Microstructuring of Cast Polymer-Derived Ceramics by Sacrificial Direct Laser Writing

L. Hagelüken; Ho-Yun Lee; David di Stadio; J. Brugger 

47th international Conference on Micro and Nano Engineering (MNE2021), Turin, Italy, September 20-23, 2021.

Laser-induced forward transfer of functional SU-8 microparts

Z. Yang; G. Boero 

47th international Conference on Micro and Nano Engineering (MNE2021), Turin, Italy, September 20-23, 2021.

Edge-contact MoS2 transistors made by thermal scanning probe lithography

A. Conde Rubio; X. Liu; G. Boero; J. Brugger 

Micro and Nano Engineering Conference, Turin, Italy, September 20th – 23rd, 2021.

Precise Capillary-Assisted Nanoparticle assembly in Reusable Templates

H. S. YU; A. Conde Rubio 

47th Micro and Nano Engineering Conference (MNE 2021), Turin, Italy, September 20-23, 2021.

A Low Power 35 GHz HEMT Oscillator for Electron Spin Resonance Spectroscopy

N. Sahin-Solmaz; A. V. Matheoud; G. Boero 

2021. 2021 IEEE Radio Frequency Integrated Circuits Symposium (RFIC), Atlanta, GA, USA, June 7-9, 2021. p. 19 – 22. DOI : 10.1109/RFIC51843.2021.9490487.

Thermal scanning probe lithography for 2D material-based gas sensing

B. Erbas 

2021.

Optimization of MEW instrument components and their assembly

J. Mao 

2021.

Fabrication of biocompatible metallic structures on biodegradable polymer films by stencil lithography

L. Cacheur 

2021.

Recent progress in silk fibroin-based flexible electronics

D-L. Wen; D-H. Sun; P. Huang; W. Huang; M. Su et al. 

Microsystems & Nanoengineering. 2021. Vol. 7, num. 1, p. 35. DOI : 10.1038/s41378-021-00261-2.

Next Generation Cell Culture Tools Featuring Micro- and Nanotopographies for Biological Screening

J. Carthew; H. H. Abdelmaksoud; K. J. Cowley; M. Hodgson-Garms; R. Elnathan et al. 

Advanced Functional Materials. 2021.  p. 2100881. DOI : 10.1002/adfm.202100881.

Printed Polymer Composite Sensors for Low-Power, Near Room-Temperature Detection and Classification of VOCS

M. Mahdi Kiaee; T. Maeder; J. Brugger 

2021. 34th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021), Gainesville, FL, USA (virtual event), January 25-29, 2021. p. 274 – 277. DOI : 10.1109/MEMS51782.2021.9375208.

Precision Surface Microtopography Regulates Cell Fate via Changes to Actomyosin Contractility and Nuclear Architecture

J. Carthew; H. H. Abdelmaksoud; M. Hodgson-Garms; S. Aslanoglou; S. Ghavamian et al. 

Advanced Science. 2021. Vol. 8, num. 6, p. 2003186. DOI : 10.1002/advs.202003186.

2D material-based gas sensing device

E. Gajo 

2021.

Capillary assisted particle assembly for high aspect ratio nanorods

B. Leis 

2021.

PDC microfabrication through KOH-etched Si mould casting

D. Di Stadio 

2021.

Experimental study of the strain patterned in 2D materials using thermal nanoimprint lithography

J. Lemonde 

2021.

Microfabricated nanomotion detectors for rapid cells viability tests

A. Malovichko / G. Boero; S. Kasas (Dir.)  

Lausanne, EPFL, 2021. 

Thermomechanical nanocutting and nanostraining of 2D materials

X. Liu; J. Brugger 

Heidelberg Instruments NanoFrazor Webinar series, 2021-02-09.

Inkjet-printed polymer composites for the detection of volatile organic compounds

M. Kiaee / J. Brugger; T. Maeder (Dir.)  

Lausanne, EPFL, 2021. 

A Glass-Like Carbon Mems Strain Sensor

J. Jang; G. Panusa; G. Boero; J. Brugger 

2021. 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), ELECTR NETWORK, Jun 20-25, 2021. p. 871 – 874. DOI : 10.1109/TRANSDUCERS50396.2021.9495726.

Hierarchical Micromold Structuring via 2PP Micro-Stereolithography

H-Y. Lee 

2021.

2020

Inkjet‐Printed Composites for Room‐Temperature VOC Sensing: From Ink Formulation to Sensor Characterization

M. Kiaee; T. Maeder; J. Brugger 

Advanced Materials Technologies. 2020.  p. 1 – 11, 2000929. DOI : 10.1002/admt.202000929.

Electrochemical performance of polymer-derived SiOC and SiTiOC ceramic electrodes for artificial cardiac pacemaker applications

J. Jang; P. V. Warriam Sasikumar; F. Navaee; L. Hagelüken; G. Blugan et al. 

Ceramics International. 2020. Vol. 47, num. 6, p. 7593 – 7601. DOI : 10.1016/j.ceramint.2020.11.098.

Designs and Characterization of Subunit Ebola GP Vaccine Candidates: Implications for Immunogenicity

V. Agnolon; D. Kiseljak; M. J. Wurm; F. M. Wurm; C. Foissard et al. 

Frontiers In Immunology. 2020. Vol. 11, p. 586595. DOI : 10.3389/fimmu.2020.586595.

NMR microsystem for label-free characterization of 3D nanoliter microtissues

M. Grisi; G. M. Conley; K. J. Rodriguez; E. Riva; L. Egli et al. 

Scientific Reports. 2020. Vol. 10, p. 1 – 9, 18306. DOI : 10.1038/s41598-020-75480-0.

Thermomechanical Nanostraining of Two-Dimensional Materials

X. Liu; A. K. Sachan; S. T. Howell; A. Conde-Rubio; A. W. Knoll et al. 

Nano Letters. 2020. Vol. 20, num. 11, p. 8250 – 8257. DOI : 10.1021/acs.nanolett.0c03358.

Reversible Drug Delivery: Thermal and pH Sensitive Composite Membrane for On‐Demand Drug Delivery by Applying an Alternating Magnetic Field (Adv. Mater. Interfaces 17/2020)

Y. Wang; G. Boero; X. Zhang; J. Brugger 

Advanced Materials Interfaces. 2020. Vol. 7, num. 17, p. 2070095. DOI : 10.1002/admi.202070095.

On the effect of linear feedback and parametric pumping on a resonator’s frequency stability

Z. Mohammadi; T. L. Heugel; J. M. L. Miller; D. D. Shin; H-K. Kwon et al. 

New Journal Of Physics. 2020. Vol. 22, num. 9, p. 093049. DOI : 10.1088/1367-2630/abb1dd.

Electrical Conductivity Tuning of Polysilazane-Derived Silicon Carbonitride Ceramics

L. Hagelüken; P. Vallachira Warriam Sasikumar; G. Blugan 

Electroceramics XVII, Online (Darmstadt, Germany), Août 24-27, 2020.

Analysis of volumetric mass transfer coefficient (k(L)a) in small- (250 mL) to large-scale (2500 L) orbitally shaken bioreactors

L. Zhu; B. Xu; X. Wu; J. Lei; D. L. Hacker et al. 

3 Biotech. 2020. Vol. 10, num. 9, p. 397. DOI : 10.1007/s13205-020-02352-9.

Cracks, porosity and microstructure of Ti modified polymer-derived SiOC revealed by absorption-, XRD- and XRF-contrast 2D and 3D imaging

M. Makowska; P. V. W. Sasikumar; L. Hagelüken; D. F. Sanchez; N. Casati et al. 

Acta Materialia. 2020. Vol. 198, p. 134 – 144. DOI : 10.1016/j.actamat.2020.07.067.

Part I. Effect of plasticizer on the sensing performance of inkjet-printed PVP/CB composite Part II. Nanostructuring of 2D materials for improved gas sensing performance

N. Cai 

2020.

Simulation of silicon KOH and dry etching methods for micromould fabrication

L. Tribolet 

2020.

Review on Crystallization and Phase Change of Low-Dimensional Materials Using Thermal Probes

F. Hartmann 

2020.

Microfabrication on bioresorbable materials

A. Poidevin 

2020.

Review of Liquid-Solid Triboelectric Generator

S-L. Wang 

2020.

Thermal and pH Sensitive Composite Membrane for On-Demand Drug Delivery by Applying an Alternating Magnetic Field

Y. Wang; G. Boero; X. Zhang; J. Brugger 

Advanced Materials Interfaces. 2020. Vol. 7, num. 17, p. 2000733. DOI : 10.1002/admi.202000733.

The Delivery of alpha 1-Antitrypsin Therapy Through Transepidermal Route: Worthwhile to Explore

S. Tumpara; B. Martinez-Delgado; G. Gomez-Mariano; B. Liu; D. S. DeLuca et al. 

Frontiers In Pharmacology. 2020. Vol. 11, p. 983. DOI : 10.3389/fphar.2020.00983.

Immobilization of single-walled carbon nanotubes by dielectrophoresis using a microfluidic channel

P. Mosser 

2020.

Single chip dynamic nuclear polarization microsystem

N. Sahin Solmaz; M. Grisi; A. V. Matheoud; G. Gualco; G. Boero 

Analytical Chemistry. 2020. Vol. 92, num. 14, p. 9782 – 9789. DOI : 10.1021/acs.analchem.0c01221.

Thermomechanical Nanocutting of 2D Materials

X. Liu; S. T. Howell; A. Conde-Rubio; G. Boero; J. Brugger 

Advanced Materials. 2020.  p. 2001232. DOI : 10.1002/adma.202001232.

Additive micro-manufacturing of crack-free PDCs by two-photon polymerization of a single, low-shrinkage preceramic resin

G. Konstantinou; E. Kakkava; L. Hagelüken; P. V. Warriam Sasikumar; J. Wang et al. 

Additive Manufacturing. 2020.  p. 101343. DOI : 10.1016/j.addma.2020.101343.

In Vitro Cytocompatibility Assessment of Ti-Modified, Silicon-oxycarbide-Based, Polymer-Derived, Ceramic-Implantable Electrodes under Pacing Conditions

P. V. W. Sasikumar; E. Mueller; P. Clement; J. Jang; E. Kakkava et al. 

Acs Applied Materials & Interfaces. 2020. Vol. 12, num. 15, p. 17244 – 17253. DOI : 10.1021/acsami.0c01465.

Thermal scanning probe lithography-a review

S. T. Howell; A. Grushina; F. Holzner; J. Brugger 

Microsystems & Nanoengineering. 2020. Vol. 6, num. 1, p. 21. DOI : 10.1038/s41378-019-0124-8.

Simply Structured Wearable Triboelectric Nanogenerator Based on a Hybrid Composition of Carbon Nanotubes and Polymer Layer

M. Su; J. Brugger; B. Kim 

International Journal Of Precision Engineering And Manufacturing-Green Technology. 2020. Vol. 7, p. 683 – 698. DOI : 10.1007/s40684-020-00212-8.

Na3V2(PO4)(3)-Supported Electrospun Carbon Nanofiber Nonwoven Fabric as Self-Standing Na-Ion Cell Cathode

G. Meligrana; S. Ferrari; L. Lucherini; J. Cele; F. Colo et al. 

Chemelectrochem. 2020. Vol. 7, num. 7, p. 1652 – 1659. DOI : 10.1002/celc.202000345.

Thermal Scanning Probe Lithography for low dimensional materials

L. Rüegg 

2020.

3D-Architecture Triboelectric Generator Using Deformable Liquid Metal

J. Shichao 

2020.

Level-line moirés by superposition of cylindrical microlens gratings

T. Walger; T. Besson; V. Flauraud; R. D. Hersch; J. Brugger 

Journal of the Optical Society of America. 2020. Vol. A37, num. 2, p. 209 – 218. DOI : 10.1364/JOSAA.37.000209.

Cost-Effective Shape Memory Stamp for Laser Induced-Forward Transfer (LIFT)

W. Cui 

2020.

Design Concerns for In-body Antennas Based on Frequency Analysis of Fundamental Radiation Limitations

Z. Sipus; M. Bosiljevac; D. Nikolayev; A. Skrivervik 

2020. 14th European Conference on Antennas and Propagation (EuCAP), Copenhagen, DENMARK, Mar 15-20, 2020. DOI : 10.23919/EuCAP48036.2020.9135679.

Electron Spin Resonance Magnetometers for Particle Accelerators

A. J. Beaumont / G. Boero; M. Buzio (Dir.)  

Lausanne, EPFL, 2020. 

Thermal Responsive Silk Composite Membrane for Magnetic Field Triggered Controllable Drug Delivery

Y. Wang / J. Brugger; X. Zhang (Dir.)  

Lausanne, EPFL, 2020. 

Studying the interactions between electro-magnetic elds and biological tissue

L. Kolly 

2020.

3D Printed Micro-Scaffolds Loaded by Inkjet Printing With in-Precise Amount of Drug

F. Zheng; J. Jang; C. Tse; J. Brugger 

2020. IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS), ELECTR NETWORK, Sep 27-30, 2020. p. 426 – 429. DOI : 10.1109/NEMS50311.2020.9265525.

Transient Electronics for Smart Biodegradable Medical Implants

M. J. M. Rüegg / J. Brugger; G. Boero (Dir.)  

Lausanne, EPFL, 2020. 

Miniaturized mr device comprising a cell culture micro-chamber and method for manufacturing such a device

M. Grisi; G. Boero; J. Brugger; G. M. Conley 

ES2961924; JP7423084; EP3857247; EP3857247; US2022026379; JP2022502636; EP3857247; CN113167848; IL281764; WO2020065478.

2020.

Thermomechanical nanocutting of 2D materials using thermal scanning probe lithography

X. Liu; S. T. Howell; A. Conde Rubio; G. Boero; J. Brugger 

CMD2020GEFES, 2020 joint conference of the condensed matter divisions of EPS_CMD and RSEF-GEFES, Online, 31st August – 4th September, 2020.

3D-ARCHITECTURE TRIBOELECTRIC GENERATOR USING DEFORMABLE LIQUID METAL

S. Jia; X. Liu; J. Brugger 

2020

Moiré effects produced by superpositions of micro-lens arrays

T. Walger / J. Brugger; R. Hersch (Dir.)  

Lausanne, EPFL, 2020. 

2019

1D moiré shapes by superposed layers of micro-lenses

T. Walger; T. Besson; V. Flauraud; R. D. Hersch; J. Brugger 

Optics Express. 2019. Vol. 27, num. 26, p. 37419 – 37434. DOI : 10.1364/OE.27.037419.

Printed silk-fibroin-based triboelectric nanogenerators for multi-functional wearable sensing

D-L. Wen; X. Liu; H-T. Deng; D-H. Sun; H-Y. Qian et al. 

Nano Energy. 2019. Vol. 66, p. 104123. DOI : 10.1016/j.nanoen.2019.104123.

Biodegradable Wireless Microheaters for Transient Biomedical Implants

M. Rüegg; R. Blum; G. Boero; J. Brugger 

NanoBioTech-Montreux, Montreux, Switzerland, November 20, 2019.

Modeling of Total Ionizing Dose Degradation on 180-nm n-MOSFETs Using BSIM3

S. Ilik; A. Kabaoglu; N. S. Solmaz; M. B. Yelten 

Ieee Transactions On Electron Devices. 2019. Vol. 66, num. 11, p. 4617 – 4622. DOI : 10.1109/TED.2019.2926931.

Phase masks for electron microscopy fabricated by thermal scanning probe lithography

S. Hettler; L. Radtke; L. Grünewald; Y. Lisunova; O. Peric et al. 

Micron. 2019. Vol. 127, p. 102753. DOI : 10.1016/j.micron.2019.102753.

A 3D Microscaffold Cochlear Electrode Array for Steroid Elution

J. Jang; J. Kim; Y. C. Kim; S. Kim; N. Chou et al. 

Advanced Healthcare Materials. 2019.  p. 1900379. DOI : 10.1002/adhm.201900379.

Harnessing Poisson Effect to Realize Tunable Tunneling Nanogap Electrodes on PDMS Substrates for Strain Sensing

H. S. Yu; G. Boero; J. Brugger 

2019. 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), Berlin, Germany, June 23-27, 2019. p. 2368 – 2371. DOI : 10.1109/TRANSDUCERS.2019.8808819.

Microwave inductive proximity sensors with sub-pm/Hz1/2 resolution

A. V. Matheoud; N. Sahin Solmaz; L. Frehner; G. Boero 

Sensors and Actuators A: Physical. 2019. Vol. 295, p. 259 – 265. DOI : 10.1016/j.sna.2019.05.041.

Liquid Assembly of Floating Nanomaterial Sheets for Transparent Electronics

Z. Su; H. S. C. Yu; X. Zhang; J. Brugger; H. Zhang 

Advanced Materials Technologies. 2019.  p. 1900398. DOI : 10.1002/admt.201900398.

Biodegradable Frequency‐Selective Magnesium Radio‐Frequency Microresonators for Transient Biomedical Implants

M. Rüegg; R. Blum; G. Boero; J. Brugger 

Advanced Functional Materials. 2019. Vol. 29, num. 39, p. 1903051. DOI : 10.1002/adfm.201903051.

CMOS and 3D Printing for NMR Spectroscopy at the Single Embryo Scale

M. Grisi; E. Montinaro; F. Vincent; L. Petho; M. C. Letizia et al. 

Chimia. 2019. Vol. 73, num. 7-8, p. 635 – 635. DOI : 10.2533/chimia.2019.635.

Planar plasmonic antenna arrays resolve transient nanoscopic heterogeneities in biological membranes

P. M. Winkler; R. Regmi; V. Flauraud; H. Rigneault; J. Brugger et al. 

2019. Joint 12th EBSA European Biophysics Congress / 10th IUPAP International Conference on Biological Physics (ICBP), Madrid, SPAIN, Jul 20-24, 2019. p. S107 – S107.

Film Morphology Effect on VOC Sensor Performance Fabricated by Drop-On-Demand Inkjet-Printing

M. M. Kiaee; T. Maeder; J. Brugger 

2019. 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII (TRANSDUCERS and EUROSENSORS), Berlin, Germany, Jun 23-27, 2019. p. 1361 – 1364. DOI : 10.1109/TRANSDUCERS.2019.8808652.

Optimization of the Bosch process for micro-mold fabrication

S. Stettler 

2019.

Molding of Biodegradable Polymers for Drug Delivery Applications

T. TURNER 

2019.

A Low-Power Microwave HEMT $LC$ Oscillator Operating Down to 1.4 K

A. V. Matheoud; N. Sahin Solmaz; G. Boero 

IEEE Transactions on Microwave Theory and Techniques. 2019. Vol. 67, num. 7, p. 2782 – 2792. DOI : 10.1109/TMTT.2019.2916552.

Ferrimagnetic resonance field sensors for particle accelerators

A. Beaumont; M. Buzio; G. Boero 

Review Of Scientific Instruments. 2019. Vol. 90, num. 6, p. 065005. DOI : 10.1063/1.5097508.

Analog Control of Retainable Resistance Multistates in HfO2 Resistive-Switching Random Access Memories (ReRAMs)

C. Giovinazzo; J. Sandrini; E. Shahrabi; O. T. Celik; Y. Leblebici et al. 

Acs Applied Electronic Materials. 2019. Vol. 1, num. 6, p. 900 – 909. DOI : 10.1021/acsaelm.9b00094.

Self-Charging Energy Harvesting System for Wearables

X. Liu; J. Brugger; X. Wang 

Integration of SU8 lenses with 1310nm-wavelength wafer-fused vertical cavity surface emitting lasers (VCSELs)

M. Judelewicz; S. Jiguet; A. Caliman; D. Ellafi; A. Mereuta et al. 

LOPEC 2019.

Integration of functionalization layers on lab-on-skin platform by inkjet printing

J. Englert 

2019.

Identifying suitable drugs for inkjet printing

E. Richard 

2019.

FEM Modelisation of membrane deformation

A. Jordan 

2019.

Inkjet printing of polymer composites for gas sensing applications

C-T. Coen 

2019.

Data logger for vacuum desiccator

É. Clément 

2019.

Biodegradable polymer for drug delivery applications

P. Donzier 

2019.

Fabrication of 2D micro-lens arrays for moiré applications

M. Kaeppeli 

2019.

Electron Spin Resonance detectors from 400 MHz to 360 GHz

A. V. Matheoud / G. Boero (Dir.)  

Lausanne, EPFL, 2019. 

A single-chip integrated transceiver for high field NMR magnetometry

M. Grisi; G. M. Conley; P. Sommer; J. Tinembart; G. Boero 

Review Of Scientific Instruments. 2019. Vol. 90, num. 1, p. 015001. DOI : 10.1063/1.5066436.

Multi-ReRAM synapses for artificial neural network training

I. Boybat; C. Giovinazzo; E. Shahrabi; I. Krawczuk; J. Giannopoulos et al. 

2019. IEEE International Symposium on Circuits and Systems (IEEE ISCAS), Sapporo, JAPAN, May 26-29, 2019. DOI : 10.1109/ISCAS.2019.8702714.

Wearable Triboelectric Generator based on a Hybrid Mix of Carbon Nanotube and Polymer Layers

M. Su; J. Brugger; B. J. Kim 

2019. 18th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Daytona Beach, FL, Dec 04-07, 2018. DOI : 10.1088/1742-6596/1407/1/012047.

Novel Wearable Triboelectric Generator based on a Hybrid Mix of Carbon Nanotube and Natural Polymer

M. Su; J. Brugger; K. Beomjoon 

MEMS, Seoul, Korea,

Process optimization for thick SU-8 micro mold fabrication

J. Oswald 

2019.

Transient Electronics: Biodegradable Frequency‐Selective Magnesium Radio‐Frequency Microresonators for Transient Biomedical Implants (Adv. Funct. Mater. 39/2019)

M. Rüegg; R. Blum; G. Boero; J. Brugger 

Advanced Functional Materials. 2019. Vol. 29, num. 39, p. 1970270. DOI : 10.1002/adfm.201970270.

2018

Edge-contacted graphene with slope engineering by stencil lithography

R. Farzad 

2018.

Fast turnaround fabrication of silicon point-contact quantum-dot transistors using combined thermal scanning probe lithography and laser writing

C. Rawlings; Y. K. Ryu; M. Rüegg; N. Lassaline; C. Schwemmer et al. 

Nanotechnology. 2018. Vol. 29, num. 50, p. 505302. DOI : 10.1088/1361-6528/aae3df.

Fabrication of Biodegradable Membrane

R. Zhang 

2018.

Inkjet-printing polymer nanocomposite for detecting VOCs

M. Kiaee; T. Maeder; J. Brugger 

2018. Eurosensors, Graz, September 9-12,2018.

Unusually Long-Lived Photocharges in Helical Organic Semiconductor Nanostructures

R. J. Hafner; L. Tian; J. C. Brauer; T. Schmaltz; A. Sienkiewicz et al. 

Acs Nano. 2018. Vol. 12, num. 9, p. 9116 – 9125. DOI : 10.1021/acsnano.8b03165.

A single chip electron spin resonance detector based on a single high electron mobility transistor

A. V. Matheoud; N. Sahin; G. Boero 

Journal of Magnetic Resonance. 2018. Vol. 294, p. 59 – 70. DOI : 10.1016/j.jmr.2018.07.002.

Electronics for integrated oscillators phase noise characterization

L. Frehner 

2018.

Electromechanical behavior of stencil-lithography-fabricated biocompatible gold contacts on PDMS substrates

K-T. Ho 

2018.

Combination of thermal scanning probe lithography and ion etching to fabricate 3D silicon nanopatterns with extremely smooth surface

Y. Lisunova; J. Brugger 

Microelectronic Engineering. 2018. Vol. 193, p. 23 – 27. DOI : 10.1016/j.mee.2018.02.012.

3D printed microchannels for sub-nL NMR spectroscopy

E. Montinaro; M. Grisi; M. C. Letizia; L. Pethö; M. A. M. Gijs et al. 

PLOS ONE. 2018. Vol. 13, num. 5, p. e0192780. DOI : 10.1371/journal.pone.0192780.

Bioresorbable Frequency-Selective Magnesium Microresonators Fabricated by Ion Beam Etching

M. Rüegg; R. Blum 

Microtechnologies in Medicine and Biology, Monterey, USA, 26-28 March 2018.

Growth of Large-Area 2D MoS2 Arrays at Pre-Defined Locations Using Stencil Mask Lithography

I. Sharma; Y. Batra; V. Flauraud; J. Brugger; B. R. Mehta 

Journal of Nanoscience and Nanotechnology. 2018. Vol. 18, num. 3, p. 1824 – 1832. DOI : 10.1166/jnn.2018.14265.

Characterization of a Piezoelectric AlN Beam Array in Air and Fluid for an Artificial Basilar Membrane

H. Jeon; J. Jang; S. Kim; H. Choi 

Electronic Materials Letters. 2018. Vol. 14, num. 2, p. 101 – 111. DOI : 10.1007/s13391-018-0012-7.

Nanostructured surface topographies have an effect on bactericidal activity

S. Wu; F. Zuber; K. Maniura-Weber; J. Brugger; Q. Ren 

Journal of Nanobiotechnology. 2018. Vol. 16, num. 1, p. 20. DOI : 10.1186/s12951-018-0347-0.

All-fiber hybrid piezoelectric-enhanced triboelectric nanogenerator for wearable gesture monitoring

Y. Guo; X. Zhang; Y. Wang; W. Gong; Q. Zhang et al. 

Nano Energy. 2018. Vol. 48, p. 152 – 160. DOI : 10.1016/j.nanoen.2018.03.033.

Characterization of Biodegradable Magnesium Resonators

R. Blum 

2018.

Tin Acetylacetonate as a Precursor for Producing Gas-Sensing SnO2 Thin Films

E. Simonenko; N. Simonenko; A. Mokrushin; A. Vasiliev; I. Vlasov et al. 

RUSSIAN JOURNAL OF INORGANIC CHEMISTRY. 2018. Vol. 63, num. 7, p. 851 – 860. DOI : 10.1134/S0036023618070197.

The key impact of incorporated Al2O3 barrier layer on W-based ReRAM switching performance

E. Shahrabi; C. Giovinazzo; J. Sandrini; Y. Leblebici 

2018. 15th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD) / 14th Conference on PhD Research in Microelectronics and Electronics (PRIME), Prague, CZECH REPUBLIC, Jul 02-05, 2018. p. 69 – 72. DOI : 10.1109/PRIME.2018.8430371.

All-in-one self-powered flexible microsystems based on triboelectric nanogenerators

X-S. Zhang; M. Han; B. Kim; J-F. Bao; J. Brugger et al. 

Nano Energy. 2018. Vol. 47, p. 410 – 426. DOI : 10.1016/j.nanoen.2018.02.046.

Study of Gd-induced shift of luminescence spectra of YGAG:Ce micropowders as a function of grain size

S. Lisovskii; V. Ivanov; E. Korostylev; A. Meganov; M. Urazov et al. 

Journal of Luminescence. 2018. Vol. 196, p. 94 – 99. DOI : 10.1016/j.jlumin.2017.11.033.

Synthesis and Investigation of Electrical Properties of Carbon Nanotube – Porous Matrix Composites near the Percolation Threshold

A. Varfolomeev; V. Solovey; I. Volkov; T. Maeder 

ORIENTAL JOURNAL OF CHEMISTRY. 2018. Vol. 34, num. 1, p. 24 – 29. DOI : 10.13005/ojc/340102.

Frame structure for thin-film piezoelectric-on-silicon resonator to greatly enhance quality factor and suppress spurious modes

F. Bao; L. Bao; X. Zhang; C. Zhang; X. Li et al. 

SENSORS AND ACTUATORS A-PHYSICAL. 2018. Vol. 274, p. 101 – 108. DOI : 10.1016/j.sna.2018.03.012.

Unipolar Charging of Aerosol Particles in the Size Range of 75-500 nm by Needle-plate Corona Charger

A. Efimov; P. Arsenov; T. Maeder; V. Ivanov 

ORIENTAL JOURNAL OF CHEMISTRY. 2018. Vol. 34, num. 1, p. 214 – 221. DOI : 10.13005/ojc/340124.

Applications of antibodies in microfluidics-based analytical systems: challenges and strategies for success

R. O’Kennedy; J. Fitzgerald; A. Cassedy; A. Crawley; X. Zhang et al. 

Journal of Micromechanics and Microengineering. 2018. Vol. 28, num. 6, p. 063001. DOI : 10.1088/1361-6439/aab225.

PZE-transduced Suspended Microchannel Resonators for sensing applications

A. De Pastina / L. G. Villanueva Torrijo (Dir.)  

Lausanne, EPFL, 2018. 

Optical Antenna-Based Fluorescence Correlation Spectroscopy to Probe the Nanoscale Dynamics of Biological Membranes

P. Winkler; R. Regmi; V. Flauraud; J. Brugger; H. Rigneault et al. 

The Journal of Physical Chemistry Letters. 2018. num. 9, p. 110 – 119. DOI : 10.1021/acs.jpclett.7b02818.

Nanoscale Lithography and Thermometry with Thermal Scanning Probes

S. T. Zimmermann / J. Brugger (Dir.)  

Lausanne, EPFL, 2018. 

Integration of SU8 lenses with 1310nm-wavelength wafer-fused vertical cavity surface emitting lasers (VCSELs)

M. Judelewicz; S. Jiguet; A. Caliman; D. Ellafi; A. Mereuta et al. 

NANO.IL.2018.

Fabrication and Characterization of Biodegradable, Thermal-Responsive Silk Composite Membrane

Y. Wang; X. Zhang; J. Brugger 

2018. The International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Singapore, 22-26, April 2018. p. 479 – 482. DOI : 10.1109/NEMS.2018.8556951.

2017

Micro-molding of biodegradable polymer for drug delivery applications

G. Feuvray 

2017.

Nanoparticle Manipulation with an AFM Probe

P. Oberholzer 

2017.

Self-assembly of micro/nanosystems across scales and interfaces

M. Mastrangeli 

2017. 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2017), Kaohsiung, Taiwan, June 18-22, 2017. p. 676 – 681. DOI : 10.1109/TRANSDUCERS.2017.7994139.

Mode Coupling in Plasmonic Heterodimers Probed with Electron Energy Loss Spectroscopy

V. Flauraud; G. D. Bernasconi; J. Butet; D. T. L. Alexander; O. J. F. Martin et al. 

ACS Nano. 2017. Vol. 11, num. 4, p. 3485 – 3495. DOI : 10.1021/acsnano.6b08589.

Mode Evolution in Strongly Coupled Plasmonic Dolmens Fabricated by Templated Assembly

V. Flauraud; G. D. Bernasconi; J. Butet; M. Mastrangeli; D. T. L. Alexander et al. 

ACS Photonics. 2017. Vol. 4, num. 7, p. 1661 – 1668. DOI : 10.1021/acsphotonics.6b01026.

Broadband single-chip transceivers for compact NMR probes

M. Grisi / G. Boero (Dir.)  

Lausanne, EPFL, 2017. 

In-Plane Plasmonic Antenna Arrays with Surface Nanogaps for Giant Fluorescence Enhancement

V. Flauraud; R. Regmi; P. M. Winkler; D. T. L. Alexander; H. Rigneault et al. 

Nano Letters. 2017. Vol. 17, num. 3, p. 1703 – 1710. DOI : 10.1021/acs.nanolett.6b04978.

Nanopatterning of a Stimuli-Responsive Fluorescent Supramolecular Polymer by Thermal Scanning Probe Lithography

S. T. Zimmermann; D. W. H. Balkenende; A. Lavrenova; C. Weder; J. Brugger 

ACS Applied Materials and Interfaces. 2017. Vol. 9, num. 47, p. 41454 – 41461. DOI : 10.1021/acsami.7b13672.

The role of inkjet printing in tissue engineering

C. C. W. Tse 

InPrint 2017, Munich, November 14-16, 2017.

Micro-moirés combining metallic patterns and micro-lenses

T. Walger; R. Hersch; J. Brugger 

Micro and Nano Engineering (MNE), Braga, Portugal, September 18-22, 2017.

Broadband IQ CMOS transceivers for compact and ultra-compact NMR probes

M. Grisi; G. Boero 

2017. 58th Experimental Nuclear Magnetic Resonance Conference, Asilomar Conference Grounds, Pacific Grove, California, March 26 – 31, 2017.

NMR spectroscopy of single sub-nL ova with inductive ultra-compact single-chip probes

M. Grisi; F. Vincent; B. Volpe; R. Guidetti; N. Harris et al. 

Scientific Reports. 2017. Vol. 7, p. 44670. DOI : 10.1038/srep44670.

Transient Nanoscopic Phase Separation in Biological Lipid Membranes Resolved by Planar Plasmonic Antennas

P. M. Winkler; R. Regmi; V. Flauraud; J. Brugger; H. Rigneault et al. 

ACS Nano. 2017. Vol. 11, num. 7, p. 7241 – 7250. DOI : 10.1021/acsnano.7b03177.

Thermal-responsive biodegradable composite membrane for drug delivery application

Y. Wang 

11th NAMIS international Autumn school “Micro & nano systems engineering: from fundamentals to industrial applications”, Freiburg, Germany, October 2-6, 2017.

Control of the interaction strength of photonic molecules by nanometer precise 3D fabrication

C. D. Rawlings; M. Zientek; M. Spieser; D. Urbonas; T. Stöferle et al. 

Scientific Reports. 2017. Vol. 7, num. 1, p. 16502. DOI : 10.1038/s41598-017-16496-x.

Silk Fibroin as a Resist for Thermal Scanning Probe Lithography

S. Zimmermann; Y. Wang; X. Zhang; J. Brugger 

43rd Micro and Nano Engineering Conference, Braga, Portugal, September 18-22, 2017.

Silicon nanostructures for bright field full color prints

V. Flauraud; M. Reyes; R. Paniagua-Dominguez; A. Kuznetsov; J. Brugger 

ACS Photonics. 2017. Vol. 4, num. 8, p. 1913 – 1919. DOI : 10.1021/acsphotonics.6b01021.

Growth Of Organic Semiconductor Thin Films with Multi-Micron Domain Size and Fabrication of Organic Transistors Using a Stencil Nanosieve

P. Fesenko; V. Flauraud; S. Xie; E. Kang; T. Uemura et al. 

ACS Applied Materials & Interfaces. 2017. Vol. 9, num. 28, p. 23314 – 23318. DOI : 10.1021/acsami.7b06584.

Drop-on-Demand Inkjet Printing of Functional Composites

M. Kiaee; T. Maeder; J. Brugger 

Swiss ePrint 2017 The Swiss Conference on Printed Electronics and Functional Materials, Basel, Switzerland, September 26-27, 2017.

Methods and microfabrication techniques for subnanoliter magnetic resonance spectroscopy

E. Montinaro / G. Boero; J. Brugger (Dir.)  

Lausanne, EPFL, 2017. 

Thermal Probe Nanopatterning Enables Nanoparticle Assembly on PDMS Substrates

H. Yu; S. T. Zimmermann 

43rd International Conference on Micro and NanoEngineering, Braga, Portugal, September 18-22, 2017.

Flexible fabric-based wearable solid-state supercapacitor

J-H. Huang; Y. Song; X-X. Chen; X. Zhang; L-M. Miao et al. 

2017. IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Los Angeles, CA, USA, April 9-12, 2017. p. 169 – 172. DOI : 10.1109/NEMS.2017.8016998.

Novel manufacturing methods for optical antennas : controlling light down to the single nanometer scale

V. Flauraud / J. Brugger (Dir.)  

Lausanne, EPFL, 2017. 

A transparent silk-fibroin-based triboelectric microgenerator for airflow energy harvesting

X. Zhang; Y. Guo; Y. Wang; H. Zhang; J. Brugger 

2017. IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Los Angeles, CA, USA, April 9-12, 2017. p. 65 – 68. DOI : 10.1109/NEMS.2017.8016975.

Printing wax to create scaffolds for tissue engineering applications

C. C. W. Tse 

Swiss ePrint 2107, Basel, September 26-27, 2017.

Synthesis of superposition shape images by light interacting with layers of lenslets

R. D. Hersch; T. Walger; V. Flauraud; J. Brugger; T. Besson 

CH713112; AU2016344585; EP3368332; US10899161; SE543208; RU2018119314; RU2018119314; PL426607; US10286716; CL2018001115; US2018311990; BR112018008671; GB2561731; CN108541238; EP3368332; MX2018005369; KR20180095802; AT519643; DE112016004552; GB201806957; SE1850632; AU2016344585; CA3002906; WO2017072566; US2017113481.

2017.

DOD Inkjet printing of functional polymers

M. Kiaee; T. Maeder; J. Brugger 

CMI Day, EPFL, Lausanne, Switzerland,

Planar Optical Nanoantennas Resolve Cholesterol-Dependent Nanoscale Heterogeneities in the Plasma Membrane of Living Cells

R. Regmi; P. M. Winkler; V. Flauraud; K. J. E. Borgman; C. Manzo et al. 

Nano Letters. 2017. Vol. 17, num. 10, p. 6295 – 6302. DOI : 10.1021/acs.nanolett.7b02973.

Single-chip electron spin resonance detectors operating at 50 GHz, 92 GHz, and 146 GHz

A. V. Matheoud; G. Gualco; M. Jeong; I. Zivkovic; J. Brugger et al. 

Journal of Magnetic Resonance. 2017. Vol. 278, p. 113 – 121. DOI : 10.1016/j.jmr.2017.03.013.

Penciling a triboelectric nanogenerator on paper for autonomous power MEMS applications

X. Zhang; M. Su; J. Brugger; B. Kim 

Nano Energy. 2017. Vol. 33, p. 393 – 401. DOI : 10.1016/j.nanoen.2017.01.053.

Inkjet Printing of Functional Polymer Composites for Chemiresistive Gas Sensors

M. Kiaee; T. Maeder; J. Brugger 

EDMI Day, EPFL, Lausanne, Switzerland,

High sensitivity field asymmetric ion mobility spectrometer

M. A. Chavarria; A. V. Matheoud; P. Marmillod; Y. Liu; D. Kong et al. 

Review of Scientific Instruments. 2017. Vol. 88, num. 3, p. 035115 – 1. DOI : 10.1063/1.4978960.

Nanoscale topography determines the capillary assembly of nanoparticles

V. Flauraud; M. Mastrangeli; G. D. Bernasconi; J. Butet; D. Alexander et al. 

13th Zsigmondy Colloquium of the German Colloidal Society, Saarbrücken, DE, April 5-7, 2017.

Nanoscale topographical control of capillary assembly of nanoparticles

V. Flauraud; M. Mastrangeli; G. D. Bernasconi; J. Butet; D. T. L. Alexander et al. 

Nature Nanotechnology. 2017. Vol. 12, num. 1, p. 73 – 80. DOI : 10.1038/nnano.2016.179.

Shape Memory Micro- and Nanowire Libraries for the High-Throughput Investigation of Scaling Effects

T. Oellers; D. Koenig; A. Kostka; S. Xie; J. Brugger et al. 

Acs Combinatorial Science. 2017. Vol. 19, num. 9, p. 574 – 584. DOI : 10.1021/acscombsci.7b00065.

Preceramic Polymers as Precursor for implantable MEMS Applications

L. Hagelüken 

11th NAMIS International Autumn School “Micro & nano systems engineering: from fundamentals to industrial applications”, Freiburg, Germany, October 2-6, 2017.

High-aspect ratio nanopatterning via combined thermal scanning probe lithography and dry etching

Y. Lisunova; M. Spieser; R. Juttin; F. Holzner; J. Brugger 

Microelectronic Engineering. 2017. Vol. 180, p. 20 – 24. DOI : 10.1016/j.mee.2017.04.006.

2016

Capillary assembly of nanoparticles Diamonds in antennas & durable Ag samples

B. Ghadiani 

2016.

Evaluation of thermal scanning probe lithography patterns

V. PARATTE 

2016.

Fabrication d’antennes plasmoniques pour mesurer au TEM

L. Conti 

2016.

A low-power high-sensitivity single-chip receiver for NMR microscopy

J. Anders; J. Handwerker; M. Ortmanns; G. Boero 

Journal Of Magnetic Resonance. 2016. Vol. 266, p. 41 – 50. DOI : 10.1016/j.jmr.2016.03.004.

Electrical Investigation of Porous Silicon/p-Si Heterojunction Prepared by Electrochemical Etching

M. A. Chavarria; F. Fonthal 

Ecs Journal Of Solid State Science And Technology. 2016. Vol. 5, num. 4, p. P3172 – P3175. DOI : 10.1149/2.0241604jss.

NMR spectroscopy of subnanoliter ova with ultra-compact inductive probes

M. Grisi; B. Volpe; G. Roberto; N. Harris; G. Boero 

2016. EUROMAR 2016, Aarhus, Denmark, July 3-7, 2016.

Impedance spectroscopy study of carbon nanotube–glass microfiber composites

I. Volkov; A. Varfolomeev; S. Krasnoselsky; V. Ivanov; T. Maeder 

Oriental Journal of Chemistry. 2016. Vol. 32, num. 6, p. 2857 – 2861. DOI : 10.13005/ojc/320603.

Spark discharge synthesis of semiconductor nanoparticles for thick-film metal oxide gas sensors

A. A. Efimov; I. A. Volkov; V. Ivanov; A. A. Vasiliev; A. Varfolomeev et al. 

2016. 30th Eurosensors Conference, Eurosensors 2016, Budapest (HU), 4-7.9.2016. p. 1036 – 1039. DOI : 10.1016/j.proeng.2016.11.334.

Electro-mechanical sensing in freestanding monolayered gold nanoparticle membranes

M. Gauvin; J. Grisolia; T. Alnasser; B. Viallet; S. Xie et al. 

Nanoscale. 2016. Vol. 8, num. 22, p. 11363 – 11370. DOI : 10.1039/C6NR02004F.

A silk-fibroin-based transparent triboelectric generator suitable for autonomous sensor network

X. Zhang; J. Brugger; B. Kim 

Nano Energy. 2016. Vol. 20, p. 37 – 47. DOI : 10.1016/j.nanoen.2015.11.036.

Exploring Nanoscale Electrical Properties of CuO-Graphene Based Hybrid Interfaced Memory Device by Conductive Atomic Force Microscopy

B. Singh; B. Mehta; D. Varandani; A. V. Savu; J. Brugger 

Journal of Nanoscience and Nanotechnology. 2016. Vol. 16, num. 4, p. 4044 – 4051. DOI : 10.1166/jnn.2016.10713.

Arrays of Pentacene Single Crystals by Stencil Evaporation

P. Fesenko; V. Flauraud; S. Xie; J. Brugger; J. Genoe et al. 

Crystal Growth & Design. 2016. Vol. 16, p. 4694−4700. DOI : 10.1021/acs.cgd.6b00765.

Highly efficient and gentle trapping of single cells in large microfluidic arrays for time-lapse experiments

F. Yesilkoy; R. Ueno; B. Desbiolles; M. Grisi; Y. Sakai et al. 

Biomicrofluidics – Fundamentals, Perspectives & Applications. 2016. Vol. 10, num. 1, p. 014120. DOI : 10.1063/1.4942457.

Antibacterial Au nanostructured surfaces

S. Wu; F. Zuber; J. Brugger; K. Maniura-Weber; Q. Ren 

Nanoscale. 2016. Vol. 8, num. 5, p. 2620 – 2625. DOI : 10.1039/C5NR06157A.

Penciling A Triboelectric Power Source On Paper

X. Zhang; J. Brugger; B. Kim 

2016. 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Shanghai, PEOPLES R CHINA, JAN 24-28, 2016. p. 1169 – 1172. DOI : 10.1109/MEMSYS.2016.7421844.

Bi-directional AC electrothermal micropump for on-chip biological applications

R. H. Vafaie; H. B. Ghavifekr; H. Van Lintel; J. Brugger; P. Renaud 

ELECTROPHORESIS. 2016. Vol. 37, num. 5-6, p. 719 – 726. DOI : 10.1002/elps.201500404.

Plasmonic photoconductance in free-standing monolayered gold nanoparticle membranes

E. Terver; M. Gauvin; T. Alnasser; I. Abid; A. Mlayah et al. 

2016. 11th IEEE Nanotechnology Materials and Devices Conference (NMDC), Toulouse, FRANCE, OCT 09-12, 2016. DOI : 10.1109/NMDC.2016.7777131.

High sensitivity field asymmetric ion mobility spectrometer

M. A. Chavarría Varón / J. Brugger; G. Boero (Dir.)  

Lausanne, EPFL, 2016. 

Thermal scanning probe lithography on a glassy supramolecular film creates a combination of topogrpahy and fluroescent nanostructures

S. T. Zimmermann; D. Balkenende; A. Lavrenova; C. Weder; J. Brugger 

42nd Micro and Nano Engineering Conference, Vienna, Austria, September 20-23, 2016.

3D nanostructures fabricated by advanced stencil lithography

F. Yesilkoy; V. Flauraud; M. Rüegg; B. Kim; J. Brugger 

Nanoscale. 2016. Vol. 9, p. 4945 – 4950. DOI : 10.1039/C5NR08444J.

Plasmonic photo-current in freestanding monolayered gold nanoparticle membranes

M. Gauvin; T. Alnasser; E. Terver; I. Abid; A. Mlayah et al. 

Nanoscale. 2016. Vol. 8, num. 36, p. 16162 – 16167. DOI : 10.1039/c6nr05091c.

Scanning thermal probe microscope method for the determination of thermal diffusivity of nanocomposite thin films

D. Varandani; K. Agarwal; J. Brugger; B. R. Mehta 

Review Of Scientific Instruments. 2016. Vol. 87, num. 8, p. 084903. DOI : 10.1063/1.4960332.

Rapid carbon nanotubes suspension in organic solvents using organosilicon polymers

F. Dalcanale; J. Grossenbacher; G. Blugan; M. Gullo; J. Brugger et al. 

Journal of Colloid and Interface Science. 2016. Vol. 470, num. 15, p. 123 – 131. DOI : 10.1016/j.jcis.2016.02.050.

Harnessing the damping properties of materials for high-speed atomic force microscopy

J. Adams; B. Erickson; J. Grossenbacher; J. Brugger; A. P. Nievergelt et al. 

Nature Nanotechnology. 2016. Vol. 11, p. 147 – 151. DOI : 10.1038/NNANO.2015.254.

2015

AFM Tips for Measurements and Manipulation of Fluid Interfaces

M. J. I. Airaghi Leccardi 

2015.

DESIGN, FABRICATION, AND CHARACTERIZATION OF AFM TIPS FOR TENSIONS MEASUREMENT AND MANIPULATION OF FLUID INTERFACES

M. J. I. Airaghi Leccardi 

2015.

Fabrication and Replication of Microlens Arrays for Confocal Microscopy

M. Neuenschwander 

2015.

Foil-to-Foil System Integration Through Capillary Self-Alignment Directed by Laser Patterning

G. Arutinov; M. Mastrangeli; E. C. P. Smits; G. van Heck; J. M. J. den Toonder et al. 

Journal of Microelectromechanical Systems. 2015. Vol. 24, num. 1, p. 126 – 133. DOI : 10.1109/JMEMS.2014.2321013.

A broadband single-chip transceiver for multi-nuclear NMR probes

M. Grisi; G. Gualco; G. Boero 

Review Of Scientific Instruments. 2015. Vol. 86, num. 4, p. 044703. DOI : 10.1063/1.4916206.

Cryogenic single chip electron spin resonance detectors

G. Gualco / G. Boero (Dir.)  

Lausanne, EPFL, 2015. 

Investigation of liquid pinning on surface nanoscale topography

Y. Mottas 

2015.

Effects of the Discharge Parameters on the Efficiency and Stability of Ambient Metastable-Induced Desorption Ionization

X. Zhang; C. Chen; Y. Liu; H. Wang; L. Zhang et al. 

Plasma Science & Technology. 2015. Vol. 17, num. 12, p. 1048 – 1052. DOI : 10.1088/1009-0630/17/12/12.

Fabrication of complex oxide microstructures by combinatorial chemical beam vapour deposition through stencil masks

E. Wagner; C. S. Sandu; S. Harada; G. Benvenuti; V. Savu et al. 

Thin Solid Films. 2015. Vol. 586, p. 64 – 69. DOI : 10.1016/j.tsf.2015.04.021.

Electrical Property of Platinum Micro Heater for Thermal Analysis of Microfluidic Device

R. Ueno; F. Yesilköy; J. Brugger; B. Kim 

IEEJ Transactions on Sensors and Micromachines. 2015. Vol. 135, num. 8, p. 338 – 342. DOI : 10.1541/ieejsmas.135.338.

Development of Implantable Electrodes Based on Polymer Derived Ceramics

J. Grossenbacher / J. Brugger; R. M. Gullo (Dir.)  

Lausanne, EPFL, 2015. 

Cytotoxicity evaluation of polymer-derived ceramics for pacemaker electrode applications

J. Grossenbacher; M. Gullo; F. Dalcanale; G. Blugan; J. Kuebler et al. 

Journal of Biomedical Materials Research Part A. 2015. Vol. 103, num. 11, p. 3625 – 3632. DOI : 10.1002/jbm.a.35477.

FUTURE POWER POWERING FUTURE: HIGH-PERFORMANCE TRIBOELECTRIC NANOGENERATOR FOR WEARABLE ELECTRONICS

X. Zhang; B. Kim; J. Brugger 

2015. 2015 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2015), Kobe, Japan, June 14-17, 2015.

CNT and PDCs: A fruitful association? Study of a polycarbosilane–MWCNT composite

F. Dalcanale; J. Grossenbacher; G. Blugan; M. R. Gullo; J. Brugger et al. 

Journal of the European Ceramic Society. 2015. Vol. 35, num. 8, p. 2215 – 2224. DOI : 10.1016/j.jeurceramsoc.2015.02.016.

On the micrometre precise mould filling of liquid polymer derived ceramic precursor for 300-µm-thick high aspect ratio ceramic MEMS

J. Grossenbacher; R. M. Gullo; V. Bakumov; G. Blugan; J. Kuebler et al. 

Ceramics International. 2015. Vol. 41, num. 1, p. 623 – 629. DOI : 10.1016/j.ceramint.2014.08.112.

Impedance sensing of DNA immobilization and hybridization by microfabricated alumina nanopore membranes

S. Wu; W. Ye; M. Yang; M. Taghipoor; R. Meissner et al. 

Sensors and Actuators B: Chemical. 2015. Vol. 216, p. 105 – 112. DOI : 10.1016/j.snb.2015.03.094.

Organic-inorganic-hybrid-polymer microlens arrays with tailored optical characteristics and multi-focal properties

L. Jacot-Descombes; V. J. Cadarso; A. Schleunitz; S. Gruetzner; J. J. Klein et al. 

Optics Express. 2015. Vol. 23, num. 19, p. 25365 – 25376. DOI : 10.1364/OE.23.025365.

Transflective holographic film for head worn display

C. Moser; J. Brugger; V. Cadarso; J. Grossenbacher; M. Guillaumée et al. 

US2015362734; WO2014115095; WO2014115095.

2015.

Composite hydrogel-loaded alumina membranes for nanofluidic molecular filtration

S. Wu; T. M. Braschler; R. Anker; F. Wildhaber; A. Bertsch et al. 

Journal of Membrane Science. 2015. Vol. 477, num. 1, p. 151 – 156. DOI : 10.1016/j.memsci.2014.12.023.

Large-Scale Arrays of Bowtie Nanoaperture Antennas for Nanoscale Dynamics in Living Cell Membranes

V. Flauraud; T. S. van Zanten; M. Mivelle; C. Manzo; M. F. Garcia Parajo et al. 

Nano Letters. 2015. Vol. 15, num. 6, p. 4176 – 4182. DOI : 10.1021/acs.nanolett.5b01335.

Resistless nanofabrication by stencil lithography: A review

O. Vazquez-Mena; L. Gross; S. Xie; L. G. Villanueva; J. Brugger 

Microelectronic Engineering. 2015. Vol. 132, p. 236 – 254. DOI : 10.1016/j.mee.2014.08.003.

2014

Nanoparticle assembly : scalable process development from nanoscale molding to hardware/software implementation

K. Müller 

2014.

Microfluidic cell trapping structures for single-cell experiments

B. Desbiolles 

2014.

Capillary particle assembly (CAPA) for plasmonic devices

E. Shahrabi 

2014.

Shift Dynamics of Capillary Self-Alignment

G. Arutinov; M. Mastrangeli; E. C. P. Smits; G. van Heck; H. F. M. Schoo et al. 

2014. International Precision Assembly Seminar (IPAS 2014), Chamonix, FR, February 16-18, 2014. p. 61 – 68. DOI : 10.1007/978-3-662-45586-9_9.

Grazing angle X-ray fluorescence from periodic structures on silicon and silica surfaces

S. H. Nowak; D. Banas; W. Blchucki; W. Cao; J. -C. Dousse et al. 

2014. 15th International Conference on Total Reflection X-ray Fluorescence Analysis and Related Methods / 49th Annual Conference on X-ray Chemical Analysis (TXRF), Osaka, JAPAN, SEP 23-27, 2013. p. 65 – 75. DOI : 10.1016/j.sab.2014.03.015.

Frequency jumps in single chip microwave LC oscillators

G. Gualco; M. Grisi; G. Boero 

Applied Physics Letters. 2014. Vol. 105, num. 24, p. 242102. DOI : 10.1063/1.4904417.

Three-dimensional polymeric microtiles for optically-tracked fluidic self-assembly

M. Mastrangeli; A. Martinoli; J. Brugger 

Microelectronic Engineering. 2014. Vol. 124, p. 1 – 7. DOI : 10.1016/j.mee.2014.04.017.

Liquid-Filled Sealed Mems Capsules Fabricated By Fluidic Self-Assembly

M. Mastrangeli; L. Jacot-Descombes; M. R. Gullo; J. Brugger 

2014. IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014), San Francisco (USA), January 26-30, 2014. p. 56 – 59. DOI : 10.1109/MEMSYS.2014.6765572.

Curved Holographic Combiner for Color Head Worn Display

M. Guillaumee; S. P. Vahdati; E. Tremblay; A. Mader; G. Bernasconi et al. 

Journal Of Display Technology. 2014. Vol. 10, num. 6, p. 444 – 449. DOI : 10.1109/Jdt.2013.2277933.

Thermal analysis, design and fabrication of microfluidic device with local temperature controls

R. Ueno; F. Yesilköy; J. Brugger; K. Beomjoon 

2014. The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies, Daegu, Korea, June 29- July 2, 2014. DOI : 10.11188/seisankenkyu.66.281.

Cell force measurements in 3D microfabricated environments based on compliant cantilevers

M. Marelli; N. Gadhari; G. Boero; M. Chiquet; J. Brugger 

Lab on a Chip. 2014. Vol. 14, num. 2, p. 286 – 293. DOI : 10.1039/c3lc51021b.

LOCALIZED EXPRESSION OF HEAT SHOCK PROTEIN IN CELL POPULATION BY MICRO HEATER DEVICE

U. Ryohei; F. Yesilköy; J. Brugger; A. Taniguchi; Y. Sakai et al. 

MICROTAS 2014, TX 78205, USA, October 26-30, 2014.

Influence of carbon enrichment on electrical conductivity and processing of polycarbosilane derived ceramic for MEMS applications

F. Dalcanale; J. Grossenbacher; G. Blugan; R. M. Gullo; A. Lauria et al. 

Journal of the European Ceramic Society. 2014. Vol. 34, num. 15, p. 3559 – 3570. DOI : 10.1016/j.jeurceramsoc.2014.06.002.

Automated Real-Time Control of Fluidic Self-Assembly of Microparticles

M. Mastrangeli; F. S. Schill; J. Goldowsky; H. Knapp; J. Brugger et al. 

2014. 2014 IEEE International Conference on Robotics and Automation (ICRA 2014), Hong Kong (China), May 31 – June 7, 2014. p. 5860 – 5865. DOI : 10.1109/ICRA.2014.6907721.

PDMS-based, magnetically actuated variable optical attenuators obtained by soft lithography and inkjet printing technologies

S. De Pedro; V. J. Cadarso; X. Munoz-Berbel; J. A. Plaza; J. Sort et al. 

Sensors And Actuators A-Physical. 2014. Vol. 215, p. 30 – 35. DOI : 10.1016/j.sna.2014.01.021.

Inkjet Printing of High Aspect Ratio Superparamagnetic SU-8 Microstructures with Preferential Magnetic Directions

L. Jacot-Descombes; M. R. Gullo; V. J. Cadarso; M. Mastrangeli; O. Ergeneman et al. 

Micromachines. 2014. Vol. 5, p. 583 – 593. DOI : 10.3390/mi5030583.

Single-Cell 3D Bio-Mems Environment With Engineered Geometry And Physiologically Relevant Stiffnesses

M. Marelli; N. Gadhari; G. Boero; M. Chiquet; J. Brugger 

2014. 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), San Francisco, CA, JAN 26-30, 2014. p. 177 – 180. DOI : 10.1109/MEMSYS.2014.6765603.

UV-Imprint Resists Generated from Polymerizable Ionic Liquids and Titania Nanoparticles

A. Gopakumar; Z. Fei; E. Paunescu; V. Auzelyte; J. Brugger et al. 

The Journal of Physical Chemistry. 2014. Vol. 118, p. 16743−16748. DOI : 10.1021/jp412722y.

Polymeric variable optical attenuators based on magnetic sensitive stimuli materials

S. De Pedro; V. J. Cadarso; T. N. Ackermann; X. Munoz-Berbel; J. A. Plaza et al. 

Journal Of Micromechanics And Microengineering. 2014. Vol. 24, num. 12, p. 125008. DOI : 10.1088/0960-1317/24/12/125008.

Three Dimensional Microstructures for Cell Culture with Engineered Stiffness and Geometry

M. Marelli / J. Brugger (Dir.)  

Lausanne, EPFL, 2014. 

Fabrication of HepG2 Cell Laden Collagen Microspheres using Inkjet Printing

J. Ho Choi; Y. Ho Kim; L. Jacot-Descombes; J. Brugger; G. Man Kim 

Journal of the Korean Society for Precision Engineering. 2014. Vol. 31, num. 8, p. 743 – 747. DOI : 10.7736/KSPE.2014.31.8.743.

UV-patternable polymers with selective spectral response (vol 98, pg 234, 2013)

S. De Pedro; A. Voigt; V. J. Cadarso; J. Vila-Planas; J. Brugger et al. 

Microelectronic Engineering. 2014. Vol. 115, p. 1 – 1. DOI : 10.1016/j.mee.2013.10.019.

Direct imprinting of organic-inorganic hybrid materials into high aspect ratio sub-100 nm structures

V. J. Cadarso; T. Kiefer; V. Auzelyte; H. Atasoy; G. Gruetzner et al. 

Microsystem Technologies-Micro-And Nanosystems-Information Storage And Processing Systems. 2014. Vol. 20, num. 10-11, p. 1961 – 1966. DOI : 10.1007/s00542-013-2016-4.

High-yield and high-precision nanoparticle assembly: towards complex plasmonic antennas

V. Flauraud; M. Mastrangeli; E. Shahrabi; J. Brugger 

40th International Conference on Micro and Nano Engineering (MNE 2014), Lausanne, CH, September 22-26, 2014.

UV-Imprinting and Inkjet Printing – A Technology Synergy for Microlens Manufacturing

L. Jacot-Descombes; V. J. Cadarso; A. Schleunitz; S. Gruetzner; J. Brugger et al. 

2014. 13th International Conference on Nanoimprint and Nanoprint Technology (NNT 2014), Kyoto, Japan, October 22-24.

Microdrop generation and deposition of ionic liquids

V. J. Cadarso; J. Perera-Nunez; A. Mendez-Vilas; L. Labajos-Broncano; M-L. Gonzalez-Martin et al. 

Journal Of Materials Research. 2014. Vol. 29, num. 17, p. 2100 – 2107. DOI : 10.1557/jmr.2014.162.

Actuated MEMS and NEMS for cell force spectroscopy and gas sensing applications

J. G. Henriksson / J. Brugger; G. Boero (Dir.)  

Lausanne, EPFL, 2014. 

Inkjet printed superparamagnetic polymer composite hemispheres with programmed magnetic anisotropy

O. Ergeneman; C. Peters; M. R. Gullo; L. Jacot-Descombes; S. Gervasoni et al. 

Nanoscale. 2014. Vol. 6, p. 10495 – 10499. DOI : 10.1039/C3NR06442E.

Cryogenic single-chip electron spin resonance detector

G. Gualco; J. Anders; A. Sienkiewicz; S. Alberti; L. Forro et al. 

Journal of Magnetic Resonance. 2014. Vol. 247, p. 96 – 103. DOI : 10.1016/j.jmr.2014.08.013.

2013

Fabrication of transparent moiré based optically variable devices

T. Besson 

2013.

Study, design and testing of cryogenic electronics for EPR spectroscopy

P. O. Paccaud 

2013.

Lateral capillary forces

M. Mastrangeli; P. Lambert 

Surface tension in microsystems; Springer, 2013. p. 45 – 69.

Surface tension-driven self-assembly

M. Mastrangeli 

Surface tension in microsystems; Berlin Heidelberg: Springer, 2013. p. 227 – 253.

Single Superparamagnetic Bead Detection and Direct Tracing of Bead Position Using Novel Nanocomposite Nano-Hall Sensors

M. S. Gabureac; L. Bernau; G. Boero; I. Utke 

Ieee Transactions On Nanotechnology. 2013. Vol. 12, num. 5, p. 668 – 673. DOI : 10.1109/Tnano.2013.2266733.

Light spectral filtering based on spatial adiabatic passage

R. Menchon-Enrich; A. Llobera; J. Vila-Planas; V. J. Cadarso; J. Mompart et al. 

Light-Science & Applications. 2013. Vol. 2, p. e90. DOI : 10.1038/lsa.2013.46.

Reconfigurable MEMS modules for 2D (self-)assembly

C. Gabry 

2013.

Design iterations on Lego R – like MEMS bricks

T. Cieslewski 

2013.

Hot Stencils : A New Path for Resistless Nanopatterning

S. Xie / J. Brugger; A. V. Savu (Dir.)  

Lausanne, EPFL, 2013. 

Structural and optical properties of the Cu2ZnSnSe4 thin films grown by nano-ink coating and selenization

Y. Liu; D-Y. Kong; H. You; C-L. Chen; X-H. Lin et al. 

Journal Of Materials Science-Materials In Electronics. 2013. Vol. 24, num. 2, p. 529 – 535. DOI : 10.1007/s10854-012-0970-8.

High-resolution 1D moirés as counterfeit security features

V. J. Cadarso; S. Chosson; K. Sidler; R. D. Hersch; J. Brugger 

Light: Science & Applications. 2013. Vol. 2, num. 7, p. e86. DOI : 10.1038/lsa.2013.42.

Acousto-fluidic system assisting in-liquid self-assembly of microcomponents

J. Goldowsky; M. Mastrangeli; L. Jacot-Descombes; R. M. Gullo; G. Mermoud et al. 

Journal of Micromechanics and Microengineering. 2013. Vol. 23, num. 12, p. 125026. DOI : 10.1088/0960-1317/23/12/125026.

Cell shape-dependent early responses of fibroblasts to cyclic strain

N. Gadhari; M. Chamley; M. Marelli; J. Brugger; M. Chiquet 

Biochimica et Biophysica Acta (BBA) – Molecular Cell Research. 2013. Vol. 1833, num. 12, p. 3415 – 3425. DOI : 10.1016/j.bbamcr.2013.10.012.

Individually actuated cantilever arrays for cell force spectroscopy

J. Henriksson; R. M. Gullo; J. Brugger 

Nano-Tera annual plenary meeting, Bern, Switzerland, May 30-31, 2013.

Al2O3/W hetero-structured nanopore membranes: From native to tunable nanofluidic diodes

S. Wu; F. Wildhaber; A. Bertsch; J. Brugger; P. Renaud 

2013. 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Suzhou, China, April 7-10, 2013. p. 998 – 1001. DOI : 10.1109/NEMS.2013.6559890.

Three-dimensional SU-8 microtiles for fluidic self-assembly

M. Mastrangeli; A. Martinoli; J. Brugger 

2013. 39th International Conference on Micro and Nano Engineering (MNE 2013), London, 16-19 September 2013.

Polymeric hemispherical pico-liter micro cups fabricated by inkjet printing

L. Jacot-Descombes; M. R. Gullo; V. J. Cadarso; M. Mastrangeli; J. Brugger 

2013. 2013 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Suzhou, China, 7-10 04 2013. p. 1119 – 1122. DOI : 10.1109/NEMS.2013.6559918.

Application of stencil masks for ion beam lithographic patterning

S. Brun; V. Savu; S. Schintke; E. Guibert; H. Keppner et al. 

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 2013. Vol. 306, p. 292 – 295. DOI : 10.1016/j.nimb.2012.12.064.

Field effect modulated nanofluidic diode membrane based on Al2O3/W heterogeneous nanopore arrays

S. Wu; F. Wildhaber; A. Bertsch; J. Brugger; P. Renaud 

Applied Physics Letters. 2013. Vol. 102, num. 21, p. 213108.1 – 4. DOI : 10.1063/1.4807781.

Simple and easily controllable parabolic-shaped microlenses printed on polymeric mesas

J. Y. Kim; C. Martin-Olmos; N. S. Baek; J. Brugger 

Journal Of Materials Chemistry C. 2013. Vol. 1, num. 11, p. 2152 – 2157. DOI : 10.1039/c3tc00632h.

Large-Area Gold/Parylene Plasmonic Nanostructures Fabricated by Direct Nanocutting

V. Auzelyte; B. Gallinet; V. Flauraud; C. Santschi; S. Dutta-Gupta et al. 

Advanced Optical Materials. 2013. Vol. 1, num. 1, p. 50 – 54. DOI : 10.1002/adom.201200017.

Fluid-mediated parallel self-assembly of polymeric micro-capsules for liquid encapsulation and release

L. Jacot-Descombes; C. Martin-Olmos; M. R. Gullo; V. J. Cadarso; G. Mermoud et al. 

Soft Matter. 2013. Vol. 9, p. 9931 – 9938. DOI : 10.1039/c3sm51923f.

In-liquid MEMS assembly by optical trapping

M. R. Gullo; L. Jacot-Descombes; J. Brugger 

2013. 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), Taipei, Taiwan, 20-24 01 2013. p. 78 – 81. DOI : 10.1109/MEMSYS.2013.6474181.

Integrated long-range thermal bimorph actuators for parallelizable bio-AFM applications

J. Henriksson; R. M. Gullo; J. Brugger 

IEEE Sensors Journal. 2013. Vol. 13, num. 8, p. 2849 – 2856. DOI : 10.1109/JSEN.2013.2261293.

Preface: Special Issue: Euromat 2011-European Congress and Exhibition on Advanced Materials and Processes: Symposium A53 MEMS/NEMS for Sensorial and Actorial Materials

D. Lehmhus; J. Brugger; P. Muralt; S. Pane; O. Ergeneman et al. 

Journal Of Intelligent Material Systems And Structures. 2013. Vol. 24, num. 18, p. 2171 – 2171. DOI : 10.1177/1045389X13507157.

Room temperature strong coupling between a microwave oscillator and an ensemble of electron spins

G. Boero; G. Gualco; R. Lisowski; J. Anders; D. Suter et al. 

Journal Of Magnetic Resonance. 2013. Vol. 231, p. 133 – 140. DOI : 10.1016/j.jmr.2013.04.004.

Special Issue on Selected Papers From the 11th IEEE Sensors Conference 2012

W. Fang; M. Esashi; R. Ghodssi; J. Brugger 

Ieee Sensors Journal. 2013. Vol. 13, num. 8, p. 2809 – 2809. DOI : 10.1109/Jsen.2013.2268687.

High aspect ratio etching of nanopores in PECVD SiC through AAO mask

S. Wu; M-O. Bammatter; W. Tang; V. Auzelyte; H. X. Zhang et al. 

2013. 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Suzhou, China, April 7-10, 2013. p. 986 – 989. DOI : 10.1109/NEMS.2013.6559887.

Simulation of Electrical Discharge Initiated by a Nanometer-Sized Probe in Atmospheric Conditions

R. Chen; C. Chen; Y. Liu; H. Wang; Y. Ma et al. 

Plasma Science & Technology. 2013. Vol. 15, num. 9, p. 845. DOI : 10.1088/1009-0630/15/9/02.

Inkjet-printed SU-8 Hemispherical Microcapsules and Silicon chip Embedding

L. Jacot-Descombes; R. M. Gullo; M. Mastrangeli; V. J. Cadarso; J. Brugger 

IET Micro & Nano Letters. 2013. Vol. 8, num. 10, p. 633 – 636. DOI : 10.1049/mnl.2013.0241.

Resistless Fabrication of Nanoimprint Lithography (NIL) Stamps Using Nano-Stencil Lithography

L. G. Villanueva; O. Vazquez-Mena; C. Martin-Olmos; A. V. Savu; K. Sidler et al. 

Micromachines. 2013. Vol. 4, p. 370 – 377. DOI : 10.3390/mi4040370.

Fluid-mediated self-assembly of MEMS micro-capsules for liquid encapsulation and release

L. Jacot-Descombes / J. Brugger; R. M. Gullo (Dir.)  

Lausanne, EPFL, 2013. 

Heated mask

S. Xie; A. Savu; J. Brugger 

WO2012164546; WO2012164546.

2013.

Dynamics of capillary self-alignment for mesoscopic foil devices

G. Arutinov; M. Mastrangeli; E. C. P. Smiths; H. F. M. Schoo; J. Brugger et al. 

Applied Physics Letters. 2013. Vol. 102, p. 144101. DOI : 10.1063/1.4801088.

Stencil-Nanopatterned Back Reflectors for Thin-Film Amorphous Silicon n-i-p Solar Cells

C. Pahud; V. Savu; M. Klein; O. Vazquez-Mena; F-J. Haug et al. 

Ieee Journal Of Photovoltaics. 2013. Vol. 3, num. 1, p. 22 – 26. DOI : 10.1109/Jphotov.2012.2213583.

2012

High Aspect Ratio Microstructures

J. Béguin 

2012.

Miniaturized Ag/AgCl electrodes made by inkjet printing

L. Hartman Paolillo Cendon 

2012.

Heated membranes for stencil lithography application

S. Boujnah 

2012.

Nano-channel fabrication by electrostatic inkjet printing for the study of proton conductivity

V. Flauraud 

2012.

Fabrication & Characterization of Thermally Actuated MEMS

M. Raad 

2012.

Atomic Force Measurements of Hydrophobic Interactions

J. Perroset 

2012.

Simulation of Optical Nanostructures

N. Besse 

2012.

Capillary Self-Alignment of Mesoscopic Foil Components for Sensor-Systems-in-Foil

G. Arutinov; E. C. P. Smits; M. Mastrangeli; G. van Heck; J. van den Brand et al. 

Journal of Micromechanics and Microengineering. 2012. Vol. 22, p. 115022. DOI : 10.1088/0960-1317/22/11/115022.

Integrated active tracking detector for MRI-guided interventions

J. Anders; P. SanGiorgio; X. Deligianni; F. Santini; K. Scheffler et al. 

Magnetic Resonance In Medicine. 2012. Vol. 67, p. 290 – 296. DOI : 10.1002/mrm.23112.

Active Integrated Tracking Detectors for MRI-Guided Interventions

J. Anders; M. Ortmanns; K. Scheffler; G. Boero 

Biomedical Engineering-Biomedizinische Technik. 2012. Vol. 57, p. 907. DOI : 10.1515/bmt-2012-4407.

K-band single-chip electron spin resonance detector

J. Anders; A. Angerhofer; G. Boer 

Journal Of Magnetic Resonance. 2012. Vol. 217, p. 19 – 26. DOI : 10.1016/j.jmr.2012.02.003.

Modélisation du comportement non-linéaire des spins électroniques couplés à un oscillateur électrique

R. Lisowski 

2012.

Failure Modes in Capillary Self-Assembly

M. Mastrangeli; J. Brugger 

Micromanipulation for micro-nano systems, Femto-ST, Besancon, FR, April 11, 2012.

Sub micrometer ceramic structures fabricated by molding a polymer-derived ceramic

J. Grossenbacher; R. M. Gullo; R. Grandjean; T. Kiefer; J. Brugger 

2012. Micro- and Nano-Engineering (MNE) 2011, Berlin, Germany, September 19-23, 2011. p. 272 – 275. DOI : 10.1016/j.mee.2012.04.024.

Phenyl-bridged polysilsesquioxane positive and negative resist for electron beam lithography

L. Brigo; V. Auzelyte; K. Lister; J. Brugger; G. Brusatin 

Nanotechnology. 2012. Vol. 23, p. 325302. DOI : 10.1088/0957-4484/23/32/325302.

Microdrop Printing of Hydrogel Bioinks into 3D Tissue-Like Geometries

K. Pataky; T. Braschler; A. Negro; P. Renaud; M. P. Lutolf et al. 

Advanced Materials. 2012. Vol. 24, num. 3, p. 391 – 396. DOI : 10.1002/adma.201102800.

High-Resolution Resistless Nanopatterning on Polymer and Flexible Substrates for Plasmonic Biosensing Using Stencil Masks

O. Vazquez Mena; T. Sannomiya; M. Tosun; G. Villanueva; A. V. Savu et al. 

ACS Nano. 2012. Vol. 6, num. 6, p. 5474 – 5481. DOI : 10.1021/nn301358n.

Capteur pour la detection d’hydrogene et procede de fabrication d’un tel capteur

J. F. Ranjard; F. Favier; J. Brugger 

FR2921159; FR2921159.

2012.

Highly ordered palladium nanodot patterns for full concentration range hydrogen sensing

L. G. Villanueva; F. Fargier; T. Kiefer; M. Ramonda; J. Brugger et al. 

Nanoscale. 2012. Vol. 4, p. 1964 – 1967. DOI : 10.1039/C2NR11983H.

Inkjet printing for MEMS

K. Pataky; V. Auzelyte; J. Brugger 

Inkjet-based Micromanufacturing; Germany: Wiley-VCH, 2012. p. 331 – 346.

Conductivity of SU-8 Thin Films through Atomic Force Microscopy Nano-Patterning

C. Martin-Olmos; G. Villanueva; P. van der Wal; A. Llobera; N. de Rooij et al. 

Advanced Functional Materials. 2012. Vol. 22, num. 7, p. 1482 – 1488. DOI : 10.1002/adfm.201102789.

OPTIMIZATION OF THE PHOTOPOLYMERIZATION OF A POLYMER DERIVED CERAMIC

J. Grossenbacher; A. Voigt; R. M. Gullo; J. Brugger 

2012. 38th International Micro & Nano Engineering Conference, Toulouse, France, September 16-20, 2012.

Hydrodynamic Trap for Directed Self-Assembly of MEMS

R. M. Gullo; L. Jacot-Descombes; J. Brugger 

2012. The 7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Kyoto, JAPAN, March 5 – 8, 2012.

Thermal control extends heated stencil’s life-time

S. Xie; V. Savu; J. Brugger 

2012. The 56th International Conference on Electron, Ion, Photon Beam Technology and Nanofabrication, Waikoloa, Hawaii, USA, May 29 – June 1, 2012.

Ultra-low power hydrogen sensing based on a palladium-coated nanomechanical beam resonator

J. Henriksson; L. G. Villanueva; J. Brugger 

Nanoscale. 2012. Vol. 4, num. 16, p. 5059 – 5064. DOI : 10.1039/C2NR30639E.

CAFM investigations of filamentary conduction in Cu2O ReRAM devices fabricated using stencil lithography technique

B. Singh; B. R. Mehta; D. Varandani; A. V. Savu; J. Brugger 

Nanotechnology. 2012. Vol. 23, num. 49, p. 495707. DOI : 10.1088/0957-4484/23/49/495707.

Effects of tensile stress on electrical parameters of thin film conductive wires fabricated on a flexible substrate using stencil lithography

M. Frantlović; I. Jokić; V. Savu; S. Xie; J. Brugger 

Microelectronic Engineering. 2012. Vol. 98, p. 230 – 233. DOI : 10.1016/j.mee.2012.07.016.

Facile fabrication of nanofluidic diode membranes using anodic aluminium oxide

S. Wu; F. Wildhaber; O. Vazquez-Mena; A. Bertsch; J. Brugger et al. 

Nanoscale. 2012. Vol. 4, num. 18, p. 5718 – 5723. DOI : 10.1039/c2nr31243c.

All-stencil transistor fabrication on 3D silicon substrates

G. Villanueva; O. Vazquez-Mena; C. Martin-Olmos; V. Savu; K. Sidler et al. 

Journal of Micromechanics and Microengineering. 2012. Vol. 22, num. 9, p. 095022. DOI : 10.1088/0960-1317/22/9/095022.

3D hybrid microcomponents self-assembled in liquid

L. Jacot-Descombes; T. Dang; R. M. Gullo; C. Busto; V. Javier et al. 

2012. 38th International Conference on Micro and Nano Engineering, Toulouse, France, September 16-20, 2012.

Stencil-nanopatterned back reflectors for thin-film amorphous silicon n-i-p solar cells

C. Pahud; V. Savu; M. Klein; O. Vazquez-Mena; K. Soederstroem et al. 

2012. 38th IEEE Photovoltaic Specialists Conference (PVSC). p. 694 – 696. DOI : 10.1109/PVSC.2012.6317704.

UV-patternable polymers with selective spectral response

S. De Pedro; A. Voigt; V. J. Cadarso; J. Vila-Planas; J. Brugger et al. 

Microelectronic Engineering. 2012. Vol. 98, p. 234 – 237. DOI : 10.1016/j.mee.2012.07.013.

Vertically-stacked gate-all-around polysilicon nanowire FETs with sub-μm gates patterned by nanostencil lithography

D. Sacchetto; S. Xie; V. Savu; M. Zervas; G. De Micheli et al. 

Microelectronic Engineering. 2012. Vol. 98, p. 355 – 358. DOI : 10.1016/j.mee.2012.07.048.

Fabrication of epoxy spherical microstructures by controlled drop-on-demand inkjet printing

L. Jacot-Descombes; R. M. Gullo; C. Busto; V. Javier; J. Brugger 

Journal of Micromechanics and Microengineering. 2012. Vol. 22, num. 7, p. 074012. DOI : 10.1088/0960-1317/22/7/074012.

In-situ actuated gap reduction and clogging-free apertures for quasi-dynamic stencil lithography

S. Xie; A. V. Savu; J. Brugger 

2012. The 7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Kyoto, JAPAN, March 5 – 8, 2012.

The Solution of Nonlinear Function of Ion Mobility Based on FAIMS Spectrum Peak Position

D-L. Wang; C-L. Chen; C. Zhao; J. Gao; D-Y. Kong et al. 

Spectroscopy And Spectral Analysis. 2012. Vol. 32, num. 8, p. 2050 – 2055. DOI : 10.3964/j.issn.1000-0593(2012)08-2050-06.

Heterogeneous material micro-transfer by ink-jet print assisted mould filling

J. V. Cadarso; G. Smolik; V. Auzelyte; L. Jacot-Descombes; J. Brugger 

Microelectronic Engineering. 2012. Vol. 98, p. 619 – 622. DOI : 10.1016/j.mee.2012.04.025.

Directly fabricated multi-scale microlens arrays on a hydrophobic flat surface by a simple ink-jet printing technique

J. Y. Kim; K. Pfeiffer; A. Voigt; G. Gruetzner; J. Brugger 

Journal of Materials Chemistry. 2012. Vol. 22, num. 7, p. 3053 – 3058. DOI : 10.1039/c2jm15576a.

Nanocomposites based on highly luminescent nanocrystals and semiconducting conjugated polymer for inkjet printing

E. Binetti; C. Ingrosso; M. Striccoli; P. Cosma; A. Agostiano et al. 

Nanotechnology. 2012. Vol. 23, num. 7, p. 075701. DOI : 10.1088/0957-4484/23/7/075701.

Organic half-wave rectifier fabricated by stencil lithography on flexible substrate

N. V. Cvetkovic; K. Sidler; V. Savu; J. Brugger; D. Tsamados et al. 

Microelectronic Engineering. 2012. Vol. 100, p. 47 – 50. DOI : 10.1016/j.mee.2012.07.110.

Mechanical and tribological properties of polymer-derived Si/C/N sub-millimetre thick miniaturized components fabricated by direct casting

V. Bakumov; G. Blugan; S. Roos; T. Graule; V. Fakhfouri et al. 

Journal of the European Ceramic Society. 2012. Vol. 32, num. 8, p. 1759 – 1767. DOI : 10.1016/j.jeurceramsoc.2012.01.007.

Streched organic transistors maintain mobility on flexible substrates

K. Sidler; N. V. Cvetkovic; D. Tsamados; A. M. Ionescu; J. Brugger et al. 

Microelectronic Engineering. 2012. Vol. 98, p. 508 – 511. DOI : 10.1016/j.mee.2012.07.080.

Compliant membranes improve resolution in full-wafer micro/nanostencil lithography

K. Sidler; G. Villanueva; O. Vazquez-Mena; V. Savu; J. Brugger 

Nanoscale. 2012. Vol. 4, p. 773 – 778. DOI : 10.1039/c2nr11609j.

Highly inorganic titania based sol–gel as directly patternable resist for micro- and nano- structured surfaces

E. Zanchetta; V. Auzelyte; J. Brugger; A. V. Savegnago; G. Della Giustina et al. 

Microelectronic Engineering. 2012. Vol. 98, p. 176 – 179. DOI : 10.1016/j.mee.2012.07.043.

Biomimetic soft lithography on curved nanostructured surfaces

V. Auzelyte; V. Flauraud; C. Busto; V. Javier; T. Kiefer et al. 

2012. September 19-23, Berlin, Germany, p. 269 – 271. DOI : 10.1016/j.mee.2012.03.013.

Integrated long-range thermal bimorph actuators for parallelizable bio-AFM applications

J. Henriksson; R. M. Gullo; J. Brugger 

2012. 11th IEEE Sensors Conference, Taipei, Taiwan, October 28-31, 2012. p. 789 – 792. DOI : 10.1109/ICSENS.2012.6411507.

Design, Modeling and Optimization of Stochastic Reactive Distributed Robotic Systems

G. Mermoud / A. Martinoli; J. Brugger (Dir.)  

Lausanne, EPFL, 2012. 

2011

Inkjet printing of SU-8 based superparamagnetic composite

M. A. FREIDY 

2011.

Coating high aspect-ratio channels of multi-aperture vision sensor using Micromoulding in Capillaries (MIMIC)

G. Safar 

2011.

3D cell-cages for cell micro-environment engineering

P. Biro 

2011.

A fully integrated IQ-receiver for NMR microscopy

J. Anders; P. SanGiorgio; G. Boero 

Journal Of Magnetic Resonance. 2011. Vol. 209, p. 1 – 7. DOI : 10.1016/j.jmr.2010.12.005.

Fabrication and characterization of Silicon Carbide nanostencils

C. OUGIER SIMONIN 

2011.

Magnetic Nano-particles for Self-assembly in Liquid

J. Chen 

2011.

Photon energy dependence of the light pressure exerted onto a thin silicon slab

F. K. Reinhart; G. Boero 

Physical Review B – Condensed Matter and Materials Physics. 2011. Vol. 83, num. 16, p. 165321. DOI : 10.1103/PhysRevB.83.165321.

Use of Vertically-Aligned Carbon Nanotube Array to Enhance the Performance of Electrochemical Capacitors

M. Guittet; A. I. Aria; M. Gharib 

2011. IEEE Nano, Portland, Oregon, USA, August 15-18 2011. p. 80 – 85. DOI : 10.1109/NANO.2011.6144354.

Solid-state nanopore array membranes patterned by electron beam lithography, nanosphere lithography and aluminum anodization

S. Wu; M. J. K. Klein; O. Vazquez-Mena; V. Auzelyte; A. V. Savu et al. 

4M 2011 Conference, Stuttgart, Germany, November 8-10, 2011.

Drawing with Nanostencils on Flexible Substrates

A. V. Savu; O. Peric; J. Brugger 

The 55th International conference on electron, ion, and photon beam technology and nanofabrication” (EIPBN), Las Vegas, NE, USA, May 31 -June 3, 2011.

Ultra-low power palladium-coated MEMS resonators for hydrogen detection under ambient conditions

J. Henriksson; L. G. Villanueva; J. Brugger 

2011. 16th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Beijing, China, 5-9 June, 2011. p. 787 – 790. DOI : 10.1109/TRANSDUCERS.2011.5969266.

Inkjet printing of SU-8 for high-aspect ratio spherical polymeric microstructures

L. Jacot-Descombes; R. M. Gullo; V. J. Cadarso Busto; J. Brugger 

Swiss-eprint, Basel, Switzerland, December, 1-2, 2011.

Solid-state Nanopore Array Membranes Patterned by Electron Beam Lithography, Nanosphere Lithography and Aluminum Anodization

S. Wu; M. J. K. Klein; O. Vazquez-Mena; V. Auzelyte; V. Savu et al. 

2011. 8th International Conference on Multi-Material Micro Manufacture (4M 2011)’, u’8th International Conference on Multi-Material Micro Manufacture (4M 2011)’]. p. 225 – 229. DOI : 10.3850/978-981-07-0319-6_200.

Oxide nanocrystal based nanocomposites for fabricating photoplastic AFM probes

C. Ingrosso; C. Martin-Olmos; A. Llobera; C. Innocenti; C. Sangregorio et al. 

Nanoscale. 2011. Vol. 3, p. 4632 – 4639. DOI : 10.1039/c1nr10487j.

Fluorophore-doped xerogel antiresonant reflecting optical waveguides

A. Llobera; V. J. Cadarso Busto; E. Carregal-Romero; J. Brugger; C. Domínguez et al. 

Optics Express. 2011. Vol. 19, num. 6, p. 5026 – 5039. DOI : 10.1364/OE.19.005026.

Hybrid polymer microlens arrays with high numerical apertures fabricated using simple ink-jet printing technique

J. Y. Kim; N. B. Brauer; V. Fakhfouri; D. Boiko; E. Charbon et al. 

Optical Materials Express. 2011. Vol. 1, num. 2, p. 259 – 269. DOI : 10.1364/OME.1.000259.

Robust PECVD SiC membrane made for stencil lithography

S. Xie; V. Savu; W. Tang; O. Vazquez-Mena; K. Sidler et al. 

Microelectronic Engineering. 2011. Vol. 88, p. 2790 – 2793. DOI : 10.1016/j.mee.2010.11.056.

New inks for the direct drop-on-demand fabrication of polymer lenses

A. Voigt; U. Ostrzinski; K. Pfeiffer; J. Y. Kim; V. Fakhfouri et al. 

2011. 36th International Conference on Micro & Nano Engineering (MNE), Genoa, Italy, September 19-22, 2010. p. 2174 – 2179. DOI : 10.1016/j.mee.2010.12.004.

Integrated MEMS actuation for force spectroscopy in liquid

J. Henriksson; R. M. Gullo; J. Brugger 

Nano-Tera Annual Plenary Meeting, Bern, CH, May 12-13, 2011.

Microlenses with defined contour shapes

V. J. Cadarso Busto; J. Perera-Núñez; L. Jacot-Descombes; K. Pfeiffer; U. Ostrzinski et al. 

Optics Express. 2011. Vol. 19, num. 19, p. 18665. DOI : 10.1364/OE.19.018665.

SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography

M. J. K. Klein; F. Montagne; N. Blondiaux; O. Vazquez-Mena; H. Heinzelmann et al. 

Journal of Vacuum Science & Technology B. 2011. Vol. 29, num. 2, p. 021012/1 – 5. DOI : 10.1116/1.3554404.

Ink-jet printing assisted micro-transfer moulding

V. J. Cadarso Busto; G. Smolik; V. Auzelyte; L. Jacot-Descombes; J. Brugger 

MNE 2011, Berlin, September 19-23.

100 mm dynamic stencils pattern sub-micrometre structures

A. V. Savu; S. Xie; J. Brugger 

Nanoscale. 2011. Vol. 3, num. 7, p. 2739. DOI : 10.1039/c1nr10083a.

Stencil Lithography and Inkjet Printing as New Tools for Life Sciences Research

K. Pataky / J. Brugger (Dir.)  

Lausanne, EPFL, 2011. 

Metallic Nanodot Arrays by Stencil Lithography for Plasmonic Biosensing Applications

O. Vazquez-Mena; T. Sannomiya; L. G. Villanueva; J. Voros; J. Brugger 

ACS Nano. 2011. Vol. 5, num. 2, p. 844 – 853. DOI : 10.1021/nn1019253.

Three-level stencil alignment fabrication of a high-k gate stack organic thin film transistor

N. V. Cvetkovic; K. Sidler; V. Savu; J. Brugger; D. Tsamados et al. 

2011. 36th International Conference on Micro & Nano Engineering (MNE), Genoa, Italy, September 19-22, 2010. p. 2496 – 2499. DOI : 10.1016/j.mee.2010.12.086.

GOLD MEMBRANES WITH LARGE ARRAYS OF SUB-µm HOLES FABRICATED BY WAFER-SCALE NANOSPHERE LITHOGRAPHY

M. J. K. Klein; R. Eckert; M. Guillaumée; L. A. Dunbar; H. Heinzelmann et al. 

2011. The 16th International Conference on Solid-State Sensors, Actuators and Microsystems, Beijing, China, June 5-9, 2011.

Heated membranes prevent clogging of apertures in nanostencil lithography

S. Xie; A. V. Savu; J. Brugger 

2011. The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’11 ), Beijing, China, June 5-9, 2011. p. 998 – 1001. DOI : 10.1109/TRANSDUCERS.2011.5969501.

Characterization of Hydrophobic Forces for in Liquid Self-Assembly of Micron-Sized Functional Building Blocks

R. M. Gullo; L. Jacot-Descombes; L. Aeschimann; J. Brugger 

2011. 2010 MRS Fall Meeting, Boston, Massachusetts, USA, November 30-December 2, 2010. DOI : 10.1557/opl.2011.466.

Vertically-Stacked Si Nanowire FETs with sub-micrometer Gate-All-Around polysilicon gates patterned by nanostencil lithography

D. Sacchetto; S. Xie; A. V. Savu; M. Zervas; G. De Micheli et al. 

2011. 37th International Conference on Micro and Nano Engineering (MNE), Berlin, Germany, September 19-23, 2011.

Containers assembled in fluid and corresponding production

J. Brugger; C. Martin-olmos; A. Martinoli; G. Mermoud 

US2012145572; WO2010122499; WO2010122499.

2011.

Advances in Nanostenciling: resistless nanopatterning enables new applications

A. V. Savu; J. Brugger 

Swiss NanoConvention, Baden, Switzerland, May 18-19, 2011.

Vertically-Aligned Carbon Nanotubes for Supercapacitor and the Effect of Surface Functionalization to its Performance

M. Guittet; A. I. Aria; M. Gharib; J. Brugger 

High Throughput Nanofabrication of Silicon Nanowire and Carbon Nanotube Tips on AFM Probes by Stencil-Deposited Catalysts

D. S. Engstrom; V. Savu; X. Zhu; I. Y. Y. Bu; W. I. Milne et al. 

Nano Letters. 2011. Vol. 11, num. 4, p. 1568 – 1574. DOI : 10.1021/nl104384b.

Micro-beams with tunable stiffness and curvature for mechano-sensitive cell culture substrates

M. Marelli; N. Gadhari; P. Biro; M. Chiquet; J. Brugger 

37th International Conference on Micro and Nano Engineering, Berlin, Germany, September 19-23, 2011.

Hydrophobic Forces in Liquid Selfassembly

R. M. Gullo; L. Jacot-Descombes; J. Brugger 

Nano-Tera Annual Plenary Meeting, Bern, CH, May 12-13, 2011.

Link between Alginate Reaction Front Propagation and General Reaction Diffusion Theory

T. Braschler; A. Valero; L. Colella; K. Pataky; J. Brugger et al. 

Analytical Chemistry. 2011. Vol. 83, num. 6, p. 2234 – 2242. DOI : 10.1021/ac103118r.

Vertically aligned carbon nanotubes for supercapacitor and the effect of surface functionalization to its performance

M. Guittet 

2011.

Reliable and Improved Nanoscale Stencil Lithography by Membrane Stabilization, Blurring and Clogging Corrections

O. Vazquez-Mena; K. Sidler; V. Savu; C. W. Park; L. G. Villanueva et al. 

IEEE Transactions on Nanotechnology. 2011. Vol. 10, num. 2, p. 352 – 357. DOI : 10.1109/TNANO.2010.2042724.

Nanoelectromechanical systems (NEMS)

V. Auzelyte; G. Villanueva; N. Barniol; F. Perez-Murano; W. J. Venstra et al. 

E-nano newsletter. 2011. Vol. 24, p. 37 – 59.

The effects of channel length and film microstructure on the performance of pentacene transistors

F. D. Fleischli; K. Sidler; M. Schaer; V. Savu; J. Brugger et al. 

Organic Electronics. 2011. Vol. 12, num. 2, p. 336 – 340. DOI : 10.1016/j.orgel.2010.12.004.

GOLD MEMBRANES WITH LARGE ARRAYS OF SUB-µm HOLES FABRICATED BY WAFER-SCALE NANOSPHERE LITHOGRAPHY

M. J. K. Klein; R. Eckert; M. Guillaumée; L. A. Dunbar; H. Heinzelmann et al. 

The 16th International Conference on Solid-State Sensors, Actuators and Microsystems, Beijing, China, June 5-9, 2011.

Nanostructured high refractive index titanium oxide films

V. Auzelyte; A. V. Savegnago; G. Della Giustina; G. Brusatin; J. Brugger 

E-MRS ICAM IUMRS 2011 Spring Meeting, France, Nice, May 9-13, 2011.

Localized Ion Implantation Through Micro/Nanostencil Masks

G. Villanueva; C. Martin Olmos; O. Vazquez Mena; J. Montserrat; P. Langlet et al. 

IEEE Transactions on Nanotechnology. 2011. Vol. 10, num. 5, p. 940 – 946. DOI : 10.1109/TNANO.2010.2090171.

Ambipolar silicon nanowire FETs with stenciled-deposited metal gate

D. Sacchetto; V. Savu; G. De Micheli; J. Brugger; Y. Leblebici 

Microelectronic Engineering. 2011. Vol. 88, num. 8, p. 2732 – 2735. DOI : 10.1016/j.mee.2010.12.117.

3D Patterning of Hydrogels and Cells by Multi-Component Inkjet Printing

A. Negro; K. Pataky; J. Brugger; M. Lutolf 

Swiss-eprint, Basel, Switzerland, December, 1-2, 2011.

Robust PECVD SiC membrane made for stencil lithography

S. Xie; V. Savu; W. Tang; O. Vazquez Mena; K. Sidler et al. 

2011. 36th International Conference on Micro & Nano Engineering (MNE), Genoa, Italy, September 19-22, 2010. p. 2790 – 2793. DOI : 10.1016/j.mee.2010.11.056.

Compound fabrication for in-liquid selective Self-Assembly

L. Jacot-Descombes; R. M. Gullo; J. Brugger 

Nano-Tera Annual Plenary Meeting, Bern, CH, May 12-13, 2011.

Fabrication of polymeric micro structures by controlled drop on demand inkjet printing

L. Jacot-Descombes; R. M. Gullo; V. J. Cadarso Busto; J. Brugger 

2011. 22nd Micromechanics and Micro systems Europe Workshop, Toensberg, Norway, June 19-22, 2011. p. 97 – 100.

Dynamic stencil lithography on flexible substrates on full wafer scale

O. Peric 

2011.

2010

Stress Engineered Thin Films For Life Science Applications

P. M. Sabat 

2010.

Granular Co-C nano-Hall sensors by focused-beam-induced deposition

M. Gabureac; L. Bernau; I. Utke; G. Boero 

Nanotechnology. 2010. Vol. 21, num. 11, p. 115503. DOI : 10.1088/0957-4484/21/11/115503.

Design and characterization of low aspectratio nanopore arrays

L. Coulot 

2010.

Use of Force Spectroscopy to Investigate the Adhesion of Living Adherent Cells

G. Weber; N. Blondiaux; M. Giazzon; N. Matthey; M. J. K. Klein et al. 

Langmuir. 2010. Vol. 26, num. 11, p. 8180 – 8186. DOI : 10.1021/la904526u.

High-resolution microscopy and photolithography devices using focusing micromirrors

B. Rachet; F. Merenda; R. Salathe 

EP2389606; US2016091799; US9075227; US2011300490; EP2389606; WO2010084478; WO2010084478.

2010.

Fluidic microstructuring of alginate hydrogels for the single cell niche

T. Braschler; A. Valero; L. Colella; K. Pataky; J. Brugger et al. 

Lab on a Chip. 2010. Vol. 10, num. 20, p. 2771 – 2777. DOI : 10.1039/c004988c.

Organic Pentacene Thin Film Transistors on Flexible Substrates Fabricated by Stencil Lithography

K. Sidler Arnet / J. Brugger (Dir.)  

Lausanne, EPFL, 2010. 

Modeling Self-Assembly at All Scales

G. Mermoud; L. Jacot-Descombes; R. M. Gullo; J. Brugger; A. Martinoli 

Nano-Tera.ch Annual Plenary Meeting, Bern, Switzerland, April 29, 2010.

System for aligning patterns on a substrate using stencil lithography

F. Perez Murano; J. Arcamone; M. Sansa; J. Bruegger; M. Van D N Boogart et al. 

ES2332082; WO2010010224; ES2332082.

2010.

Optical transmission properties of corrugated nanoscale hole arrays in thin gold films

M. J. K. Klein; M. Guillaumée; A. Dunbar; R. Eckert; H. Heinzelmann et al. 

2010. Micro and Nano Engineering (MNE) 2010, Genova, Italy, September 19-22, 2010.

Direct writing laser of high aspect ratio epoxy microstructures

V. J. Cadarso; K. Pfeiffer; U. Ostrzinski; J. B. Bureau; G. A. Racine et al. 

Journal of Micromechanics and Microengineering. 2010. Vol. 21, num. 1, p. 017003. DOI : 10.1088/0960-1317/21/1/017003.

Fabrication of Metallic Nanodots by Stencil Lithography for Localized Surface Plasmon Resonance Biosensing

O. Vazquez-Mena; T. Sannomiya; L. G. Villanueva; J. Voros; J. Brugger 

Functionalized Plasmonic Nanostructures for Biosensing, Ascona, Switzerland, April 18-23, 2010.

Mechanically tuneable microoptical structure based on PDMS

V. J. Cadarso; A. Llobera; G. Villanueva; J. A. Plaza; J. Brugger et al. 

Sensors and Actuators a-Physical. 2010. Vol. 162, num. 2, p. 260 – 266. DOI : 10.1016/j.sna.2010.02.025.

Direct polymer patterning by high energy reactive ion beam through stencil masks

S. Brun; E. Guibert; A. V. Savu; O. Vazquez Mena; J. Brugger et al. 

2010. Micro and Nano Engineering (MNE) 2010, Genova, Italy, September 19-22, 2010.

Metallic Nanodot Arrays Fabricated by Stencil Lithography on SiO2 and Polymer Substrates

O. Vazquez-Mena; T. Sannomiya; L. G. Villanueva; V. Savu; K. Sidler et al. 

The 54th International Conference on Electron, Ion, and Photon Beam Technology, & Nanofabrication, Anchorage, Alaska, U.S.A., June 1-4, 2010.

Inexpensive and fast wafer-scale fabrication of nanohole arrays in thin gold films for plasmonics

M. J. K. Klein; M. Guillaumée; B. Wenger; A. Dunbar; J. Brugger et al. 

Nanotechnology. 2010. Vol. 21, num. 20, p. 205301. DOI : 10.1088/0957-4484/21/20/205301.

Magnetic nanocrystal modified epoxy photoresist for microfabrication of AFM probes

C. Ingrosso; C. Martin Olmos; A. Llobera; C. Innocenti; C. Sangregorio et al. 

2010. MEMSWAVES 2010 and MEMS, Italy, 2010. p. 580 – 584.

Direct write laser at visible wavelength for patterning of high aspect ratio epoxy materials

V. J. Cadarso; K. Pfeiffer; U. Ostrizinski; A. Voigt; G. Gruetzner et al. 

2010. EIPBN- The 54th International Confrence on Electron, Ion, Photon Beam Technology and Nanofabrication, Anchorage, Alaska, USA, June 1-4, 2010.

Double-gate pentacene thin-film transistor with improved control in sub-threshold region

D. Tsamados; N. V. Cvetkovic; K. Sidler; J. Bhandari; V. Savu et al. 

Solid-State Electronics. 2010. Vol. 54, num. 9, p. 1003 – 1009. DOI : 10.1016/j.sse.2010.04.019.

Silicon nanowire AFM tips grown on released scanning probe cantilevers from stencil-deposited catalysts

A. V. Savu; D. Engstrom; X. Zhu; W. Milne; P. Boggild et al. 

2010. M36th International Conference on Micro & Nano Engineering (MNE’2010), Genova, Italy, September 19-22, 2010.

Flexible Membranes Improve Resolution in Stencil Lithography

K. Sidler; O. Vazquez-Mena; L. G. Villanueva; V. Savu; J. Brugger 

The 54th International Conference on Electron, Ion, and Photon Beam Technology, & Nanofabrication, Anchorage, Alaska, U.S.A., June 1- 4, 2010.

MAGNETIC NANOCRYSTAL MODIFIED EPOXY PHOTORESIST FOR MICROFABRICATION OF AFM PROBES

C. Ingrosso; C. Martin-Olmos; A. Llobera; C. Innocenti; C. Sangregorio et al. 

MEMSWAVES 2010 and MEMS, Italy, 2010.

Sputtering of (001)AlN thin films: Control of polarity by a seed layer

E. Milyutin; S. Harada; D. Martin; J. F. Carlin; N. Grandjean et al. 

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 2010. Vol. 28, num. 6, p. L61. DOI : 10.1116/1.3501117.

Fast and robust hydrogen sensors based on discontinuous palladium films on polyimide, fabricated on a wafer scale

T. Kiefer; G. Villanueva; F. Fargier; F. G. Favier; J. Brugger 

Nanotechnology. 2010. Vol. 21, num. 50, p. 505501. DOI : 10.1088/0957-4484/21/50/505501.

Nanoporous SiN membranes patterned by wafer-scale nanosphere lithography

V. Savu; M. J. K. Klein; F. Montagne; O. Vazquez-Mena; J. Brugger et al. 

2010. EIPBN’2010. The 54th International Confrence on Electron, Ion, Photon Beam Technology and Nanofabrication., Anchorage, Alaska, U.S.A., June 1-4, 2010.

Three-level Stencil Alignment Fabrication of a High-k Gate Stack Organic Thin Film Transistor

N. Cvetkovic; K. Sidler Arnet; A. V. Savu; J. Brugger; D. Tsamados et al. 

36th International Conference on Micro & Nano Engineering (MNE), Genoa, Italy, September 19-22, 2010.

Very Large Scale Arrays of Chemo-Mechanical Nano-Switches for Ultralow Power Hydrogen Sensing

T. Kiefer; A. Salette; L. G. Villanueva; J. Brugger 

2010. 23rd International IEEE Conference on Micro Electro Mechanical Systems MEMS’2010, Hong Kong, 24-28 January, 2010. DOI : 10.1109/MEMSYS.2010.5442547.

Pd-functionalized MEMS resonator for hydrogen gas sensing at ambient pressure

J. Henriksson; L. G. Villanueva; T. Kiefer; J. Brugger 

7th International Workshop on Nanomechanical Cantilever Sensors, Banff, Canada., May 26-28, 2010.

Pd-functionalized MEMS resonator for hydrogen gas sensing

J. Henriksson; L. G. Villanueva; T. Kiefer; J. Brugger 

Nano-Tera Annual Plenary Meeting, Bern, Switzerland, April 29, 2010.

Surface-Tension-Driven Self-Assembly of Filled Cylinders with Different Geometry

L. Jacot-Descombes; G. Mermoud; R. M. Gullo; A. Martinoli; J. Brugger 

Nano-Tera.ch Annual Plenary Meeting, Bern, Switzerland, April 29, 2010.

High-density, high-aspect ratio epoxy microstructures by Direct Write Laser Patterning

V. J. Cadarso; K. Pfeiffer; U. Ostrzinski; J-B. Bureau; G-A. Racine et al. 

2010. 36th International Conference on Micro & Nano Engineering (MNE), Genoa, Italy, September 19-22, 2010.

Wafer-Scale Fabrication of Thin SiN Membranes and Au Films and Membranes with Arrays of Sub-um Holes Using Nanosphere Lithography

M. J. K. Klein / J. Brugger; R. Pugin (Dir.)  

Lausanne, EPFL, 2010. 

Stenciled conducting bismuth nanowires

V. Savu; S. Neuser; G. Villanueva; O. Vazquez-Mena; K. Sidler et al. 

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 2010. Vol. 28, num. 1, p. 169 – 172. DOI : 10.1116/1.3292630.

Development of stencil lithography for nanopatterning and for electronic and biosensing applications

O. Vazquez Mena / J. Brugger (Dir.)  

Lausanne, EPFL, 2010. 

Large arrays of chemo-mechanical nanoswitches for ultralow-power hydrogen sensing

T. Kiefer; A. Salette; G. Villanueva; J. Brugger 

Journal of Micromechanics and Microengineering. 2010. Vol. 20, p. 105019. DOI : 10.1088/0960-1317/20/10/105019.

SPM Measurements of Hydrophobic Interactions

R. M. Gullo; G. Mermoud; J. Y. Kim; L. Jacot-Descombes; A. Martinoli et al. 

Nano-Tera.ch Annual Plenary Meeting, Bern, Switzerland, April 29, 2010.

The transition in hydrogen sensing behavior in non-continuous palladium films

T. Kiefer; G. Villanueva; F. Fargier; F. Favier; J. Brugger 

Applied Physics Letters. 2010. Vol. 97, num. 12, p. 121911. DOI : 10.1063/1.3491263.

Organic Thin Film Transistors on Flexible Polyimide Substrates Fabricated by Full Wafer Stencil Lithography

K. Sidler; N. Cvetkovic; A. V. Savu; D. Tsamados; M. A. Ionescu et al. 

Sensors and Actuators A. 2010. Vol. 162, num. 2, p. 155 – 159. DOI : 10.1016/j.sna.2010.04.016.

Ambipolar silicon nanowire FETs with stenciled sub-µm metal gate

D. Sacchetto; V. Savu; G. De Micheli; J. Brugger; Y. Leblebici 

2010. 36th International Conference on Micro and Nano Engineering (MNE 2010), Genova, Italy, September 19-22, 2010.

Millimeter waves for NMR enhancement

A. Macor; E. de Rijk; G. Boero; J-P. Ansermet; S. Alberti 

2010. 35th Int. Conference on Infrared, Millemeter and Terahertz Waves (IRMMW-THz 2010), 2010. DOI : 10.1109/ICIMW.2010.5612362.

2009

Mechanical Hydrogen Sensing

J. G. Henriksson 

2009.

Double-resonant x-ray and microwave absorption: Atomic spectroscopy of precessional orbital and spin dynamics

G. Boero; S. Rusponi; P. Bencok; R. Meckenstock; J-U. Thiele et al. 

Physical Review B. 2009. Vol. 79, num. 22, p. 224425. DOI : 10.1103/PhysRevB.79.224425.

A single-chip array of NMR receivers

J. Anders; G. Chiaramonte; P. SanGiorgio; G. Boero 

Journal Of Magnetic Resonance. 2009. Vol. 201, p. 239 – 249. DOI : 10.1016/j.jmr.2009.09.019.

Longitudinal detection of ferromagnetic resonance using x-ray transmission measurements

G. Boero; S. Rusponi; J. Kavich; A. L. Rizzini; C. Piamonteze et al. 

Review of Scientific Instruments. 2009. Vol. 80, num. 12, p. 123902. DOI : 10.1063/1.3267192.

A Low-Noise CMOS Receiver Frontend for NMR-based Surgical Guidance

J. Anders; S. Reymond; G. Boero; K. Scheffler 

2009. 13th International Conference on Biomedical Engineering (ICBME), Singapore, SINGAPORE, Dec 03-06, 2008. p. 89 – 93. DOI : 10.1007/978-3-540-92841-6_22.

Analysis and Applications of Nanostructures Created by Stencil Lithography

O. Vázquez-Mena; T. Sannomiya; M. Tosun; J. Voros; G. Villanueva et al. 

The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2009), Denver, Colorado, USA, June 21-25, 2009.

99% random telegraph signal-like noise in gold nanoparticle mu-stripes

J. Grisolia; B. Viallet; C. Amiens; S. Baster; A. Cordan et al. 

Nanotechnology. 2009. Vol. 20, num. 35, p. 355303. DOI : 10.1088/0957-4484/20/35/355303.

Quick and Clean: Stencil Lithography for Wafer-Scale Fabrication of Superconducting Tunnel Junctions

V. Savu; J. Kivioja; J. Ahopelto; J. Brugger 

IEEE Transactions on Applied Superconductivity. 2009. Vol. 19, num. 3, p. 242 – 244. DOI : 10.1109/TASC.2009.2019075.

Focused Ion Beam: A Versatile Technique for the Fabrication of Nano-Devices

C. Santschi; J. Przybylska; M. Guillaumee; O. Vazquez-Mena; J. Brugger et al. 

Praktische Metallographie-Practical Metallography. 2009. Vol. 46, num. 3, p. 154 – 156.

Stencilled Conducting Bismuth Nanowires

V. Savu; S. Neuser; L. G. Villanueva; O. Vazquez-Mena; K. Sidler et al. 

2009. 53rd International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Marco Island, FL, USA, May 26-29, 2009. DOI : 10.1116/1.3292630.

Nanomechanical mass sensor for monitoring deposition rates through confined apertures

J. Arcamone; M. Sansa; J. Verd; A. Uranga; G. Abadal et al. 

The 4th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Shenzhen, China, January 5-8, 2009.

Fluidic-mediated self-assembly for hybrid functional micro/nanosystems (SELFSYS)

L. Jacot-Descombes; C. Martin Olmos; G. Mermoud; E. Le-Caignec; A. Martinoli et al. 

Atelier LEA à Arc-et-Senans, Arc-et-Senans, France, September 8-9, 2009.

Microcollimator for Micrometer-Wide Stripe Irradiation of Cells Using 20–30 keV X Rays

K. Pataky; L. G. Villanueva; A. Liani; O. Zgheib; N. Jenkins et al. 

Radiation Research. 2009. Vol. 172, num. 2, p. 252 – 259. DOI : 10.1667/RR1483.1.

Drop-on-demand inkjet printing of highly luminescent CdS and CdSe@ZnS nanocrystal based nanocomposites

C. Ingrosso; J. Y. Kim; E. Binetti; V. Fakhfouri; M. Striccoli et al. 

Microelectronic Engineering. 2009. Vol. 86, p. 1124 – 1126. DOI : 10.1016/j.mee.2008.11.028.

All through stencil MOSFET fabrication

L. G. Villanueva; O. Vazquez-Mena; J. Montserrat; V. Savu; K. Sidler et al. 

Fall meeting of the American Vacuum Society (AVS), San Jose, CA, USA, 2009.

Direct Fabrication of Polymer Micro lens Arrays having Tunable Optical Properties using Drop-On-Demand Ink-Jet Printing Technology

J. Y. Kim; V. Fakhfouri; K. Pfeiffer; A. Voigt; M. Fink et al. 

2009. 25th International Conference on Digital Printing Technologies, Louisville, KY, Sep 20-24, 2009. p. 803 – 805.

Nanostencil and InkJet Printing for Bionanotechnology Applications

K. Pataky; O. Vazquez-Mena; J. Brugger 

2009. Nano-Net 2009, 4th International ICST Conference on Nano-Networks, Luzern, Switzerland, October 18-20, 2009..

Nanotechnology impact on sensors

J. Brugger 

NANOTECHNOLOGY. 2009. Vol. 20, num. 43, p. 430206. DOI : 10.1088/0957-4484/20/43/430206.

Inkjet-Printed Multicolor Arrays of Highly Luminescent Nanocrystal-Based Nanocomposites

J. Y. Kim; C. Ingrosso; V. Fakhfouri; M. Striccoli; A. Agostiano et al. 

Small. 2009. Vol. 5, p. 1051 – 1057. DOI : 10.1002/smll.200801315.

Nanomechanical Mass Sensor for Spatially Resolved Ultrasensitive Monitoring of Deposition Rates in Stencil Lithography

J. Arcamone; M. Sansa; J. Verd; A. Uranga; G. Abadal et al. 

Small. 2009. Vol. 5, p. 176 – 180. DOI : 10.1002/smll.200990007.

Stress and aging minimization in photoplastic AFM probes

C. Martin; A. Llobera; G. Villanueva; A. Voigt; G. Gruetzner et al. 

Microelectronic Engineering. 2009. Vol. 86, num. 4-6, p. 1226 – 1229. DOI : 10.1016/j.mee.2008.12.033.

Large area hole arrays fabricated by a templating method for refractive index sensing

M. J. K. Klein; B. Wenger; M. Guillaumée; J. Brugger; H. Heinzelmann et al. 

Fourth International Conference on Surface Plasmon Photonics (SPP4), Amsterdam, The Netherlands, June 21-26, 2009.

Minimized Blurring in Stencil Lithography using a Compliant Membrane

K. Sidler; G. Villanueva; O. Vazquez-Mena; J. Brugger 

2009. 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Denver, USA, 2009.. DOI : 10.1109/SENSOR.2009.5285768.

Mechanically tuneable microoptical structure based on PDMS

V. J. Cadarso; A. Llobera; G. Villanueva; J. A. Plaza; J. Brugger et al. 

2009. XXIII Eurosensors Conference, Lausanne, Switzerland, September 6-9, 2009.. p. 560 – 563. DOI : 10.1016/j.proche.2009.07.140.

An Oligomerized 53BP1 Tudor Domain Suffices for Recognition of DNA Double-Strand Breaks

O. Zgheib; K. Pataky; J. Brugger; T. D. Halazonetis 

Molecular and Cellular Biology. 2009. Vol. 29, p. 1050 – 1058. DOI : 10.1128/MCB.01011-08.

Analysis and Applications of Nanostructures Created by Stencil Lithography

O. Vazquez-Mena; T. Sannomiya; M. Tosun; J. Voros; G. Villanueva et al. 

2009. 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Denver, USA, 2009. DOI : 10.1109/SENSOR.2009.5285463.

Direct Etching of High Aspect structures through a Stencil

G. Villanueva; O. Vazquez-Mena; C. Hibert; J. Brugger 

2009. MEMS 2009, Sorrento, Italy, January 25-29, 2009. DOI : 10.1109/MEMSYS.2009.4805339.

Analysis of the blurring in stencil lithography

O. Vazquez-Mena; L. G. Villanueva; V. Savu; K. Sidler; P. Langlet et al. 

Nanotechnology. 2009. Vol. 20, num. 41, p. 415303. DOI : 10.1088/0957-4484/20/41/415303.

Double-Gate Pentacene TFTs with Improved Control in Subthreshold Region

N. V. Cvetkovic; D. Tsamados; K. Sidler; J. Bhandari; V. Savu et al. 

2009. 39th European Solid-State Device Research Conference (ESSDERC), Athens, Greece, September 14-18, 2009. p. 205 – 208. DOI : 10.1109/ESSDERC.2009.5331352.

Hydrogen sensors based on palladium micro- and nanostructures for fuel cell applications

T. Kiefer / J. Brugger (Dir.)  

Lausanne, EPFL, 2009. 

Conduction in rectangular quasi-one-dimensional and two-dimensional random resistor networks away from the percolation threshold

T. Kiefer; G. Villanueva; J. Brugger 

Physical Review E. 2009. Vol. 80, num. 2, p. 021104. DOI : 10.1103/Physreve.80.021104.

NEMS/CMOS sensor for monitoring deposition rates in stencil lithography

M. Sansa; J. Arcamone; J. Verd; A. Uranga; G. Abadal et al. 

2009. Eurosensor XXIII conference, Lausanne, Switzerland, September 6-9, 2009. p. 425 – 428. DOI : 10.1016/j.proche.2009.07.106.

Organic Thin Film Transistors on Flexible Polyimide Substrates Fabricated by Full Wafer Stencil Lithography

K. Sidler; N. V. Cvetkovic; V. Savu; D. Tsamados; A. M. Ionescu et al. 

2009. XXIII Eurosensors Conference, Lausanne, Switzerland, September 6-9, 2009.. DOI : 10.1016/j.proche.2009.07.190.

Structured ZnO-based contacts deposited by non-reactive rf magnetron sputtering on ultra-thin SiO2/Si through a stencil mask

A. Bernabé; M. Lalanne; L. Presmanes; J. Soon; P. Tailhades et al. 

2009. 2nd International Symposium on Transparent Conductive Oxides, Hersonissos, Crete, Greece, October 22 – 26 2008. p. 1044 – 1047. DOI : 10.1016/j.tsf.2009.03.232.

Drop-On-Demand Inkjet Printing of SU-8 Polymer

V. Fakhfouri; G. Mermoud; J. Y. Kim; A. Martinoli; J. Brugger 

Micro and Nanosystems. 2009. Vol. 1, num. 1, p. 63 – 67. DOI : 10.2174/1876402910901010063.

High-Fidelity Printing Strategies for Printing 3D Vascular Hydrogel Structures

K. Pataky; M. Ackermann; T. Braschler; M. Lutolf; P. Renaud et al. 

2009. 25th International Conference on Digital Printing Technologies, Louisville, KY, Sep 20-24, 2009. p. 411 – 414.

Minimized Blurring in Stencil Lithography using a Compliant Membrane

K. Sidler; G. Villanueva; O. Vazquez-Mena; J. Brugger 

The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2009), Denver, Colorado, USA, June 21-25 2009.

2008

Electron counting at room temperature in an avalanche bipolar transistor

M. Lany; G. Boero; R. Popovic 

Applied Physics Letters. 2008. Vol. 92, num. 2, p. 022111. DOI : 10.1063/1.2830015.

UV-curable nanoimprint resin with enhanced anti-sticking property

J. Y. Kim; D-G. Choi; J-H. Jeong; E-S. Lee 

Applied Surface Science. 2008. Vol. 254, p. 4793 – 4796. DOI : 10.1016/j.apsusc.2008.01.095.

A nanoimprint lithography for fabricating SU-8 gratings for near-infrared to deep-UV application

S-Q. Xie; J. Wan; B-R. Lu; Y. Sun; Y. Chen et al. 

Microelectronic Engineering. 2008. Vol. 85, p. 914 – 917. DOI : 10.1016/j.mee.2008.01.072.

Nanophotonic crystals with chiral elements by a hot embossing process in SU-8

B-R. Lu; J. Wan; S-Q. Xie; Z. Shu; Y. Sun et al. 

Microelectronic Engineering. 2008. Vol. 85, p. 866 – 869. DOI : 10.1016/j.mee.2007.12.085.

Fabrication of 150 nm half-pitch grating templates for nanoimprint lithography

S-Q. Xie; B-R. Lu; Y. Sun; Y. Chen; X-P. Qu et al. 

Journal of Nanoscience and Nanotechnology. 2008. Vol. 9, num. 2, p. 1437 – 1440. DOI : 10.1166/jnn.2009.C173.

Development of novel SU-8 based nanoimprint lithography

S-Q. Xie; B-R. Lu; J. Wan; R. Yang; Y. Chen et al. 

2008. The 9th International Conference on Solid-State and Integrated-Circuit Technology (ICSICT), Beijing, China, October 20-23, 2008.

Element-resolved x-ray ferrimagnetic and ferromagnetic resonance spectroscopy

G. Boero; S. Mouaziz; S. Rusponi; P. Bencok; F. Nolting et al. 

New journal of physics. 2008. Vol. 10, p. 013011. DOI : 10.1088/1367-2630/10/1/013011.

Single-chip detector for electron spin resonance spectroscopy

T. Yalcin; G. Boero 

Review Of Scientific Instruments. 2008. Vol. 79, p. 094105. DOI : 10.1063/1.2969657.

Detection of bacteria based on the thermomechanical noise of a nanomechanical resonator: origin of the response and detection limits

D. Ramos; J. Tamayo; J. Mertens; M. Calleja; G. Villanueva et al. 

Nanotechnology. 2008. Vol. 19, num. 3, p. 035503. DOI : 10.1088/0957-4484/19/03/035503.

Crystalline silicon cantilevers for piezoresistive detection of biomolecular forces

G. Villanueva; J. A. Plaza; J. Montserrat; F. Perez-Murano; J. Bausells 

Microelectronic Engineering. 2008. Vol. 85, num. 5-6, p. 1120 – 1123. DOI : 10.1016/j.mee.2008.01.082.

Quick and Clean: Stencil Lithography for Wafer-Scale Fabrication of Superconducting Tunnel Junctions

V. Savu; J. Brugger; J. Kivioja; J. Ahopelto 

Applied Superconductivity Conference 2008 (ASC 2008), Chicago, Illinois USA, August 17-22 2008.

Magnetic Nanocrystals Modified Epoxy Photoresist for fabrication of NEMS and MEMS

C. Martin; C. Ingrosso; A. Llobera; F. Perez-Murano; C. Sangregorio et al. 

2008. 34th International Conference on Micro and Nano Engineering (MNE’2008), Athens, Greece, September 15-18, 2008.

Discontinuous Palladium Nanostructures for H2 Sensing

C. Fournier; T. Kiefer; L. G. Villanueva; F. Fargier; J. Brugger et al. 

2008. ECS Transactions, Hawaii, 2008. p. 457 – 463. DOI : 10.1149/1.2981151.

Drop-on-demand Ink-jet printing of functional materials: Case studies of SU-8 and NCs-embedded Polymer nanocomposites

J. Y. KIM; V. Fakhfouri; C. Ingrosso; M. Striccoli; M. L. Curri et al. 

2008. International Conference on Digital Fabrication Technologies, Pittsburgh, Pennsylvania, USA, September 7-12, 2008..

Reusability of nanostencils for the patterning of Aluminum nanostructures by selective wet etching

O. Vazquez-Mena; G. Villanueva; M. A. F. van den Boogaart; V. Savu; J. Brugger 

Microelectronic Engineering. 2008. Vol. 85, num. 5-6, p. 1237 – 1240. DOI : 10.1016/j.mee.2007.12.083.

Direct fabrication of NEMS by etching through Stencil

G. Villanueva; J. Brugger 

Micro Nano cantilever Sensors 2008 (MNCS 08), Mainz, Germany, May 19-21, 2008.

Resistless ion implantation of sub-micron scale features through nano-stencil

G. Villanueva; C. Martin; O. Vazquez-Mena; J. Montserrat; P. Langlet et al. 

34th International Conference on Micro- and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008.

Tunable, high aspect ratio pillars on diverse substrates using copolymer micelle lithography: an interesting platform for applications

S. Krishnamoorthy; Y. Gerbig; C. Hibert; R. Pugin; C. Hinderling et al. 

Nanotechnology. 2008. Vol. 19, num. 28, p. 285301. DOI : 10.1088/0957-4484/19/28/285301.

Etching of sub-micrometer structures through Stencil

G. Villanueva; O. Vazquez-Mena; M. A. F. van den Boogaart; K. Sidler; K. Pataky et al. 

Microelectronic Engineering. 2008. Vol. 85, p. 1010 – 1014. DOI : 10.1016/j.mee.2007.12.068.

Direct fabrication of NIL stamps using Stencil Lithography

L. G. Villanueva; O. Vazquez Mena; T. Kiefer; J. Brugger 

Eurosensors XXII, Dresden, Germany, September 7-10, 2008.

Optical transmission properties of corrugated nanoscale hole arrays in thin gold films

M. Klein; M. Guillaumée; L. A. Dunbar; R. Eckert; H. Heinzelmann et al. 

34th International Conference on Micro- and Nano Engineering 2008 (MNE 2008), Athens, Greece, Sept 15-18, 2008.

Mechanical stabilisation and design optimisation of masks for stencil lithography: Numerical approach and experimental validation

M. Lishchynska; M. van den Boogaart; V. Savu; J. Greer; J. Brugger 

Microelectronic Engineering. 2008. Vol. 85, p. 2243 – 2249. DOI : 10.1016/j.mee.2008.07.009.

Bismuth nanowires with stencil lithography

V. Savu; S. Neuser; J. Brugger 

34th International Conference on Micro and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008.

The gas flow rate increase obtained by an oscillating piezoelectric actuator on a micronozzle

R. Wiederkehr; M. Salvadori; J. Brugger; F. Degasperi; M. Cattani 

Sensors and Actuators A. 2008. Vol. 144, p. 154 – 160. DOI : 10.1016/j.sna.2007.12.024.

Novel methods to pattern polymers for microfluidics

C. Martin; A. Llobera; T. Leïchlé; G. Villanueva; A. Voigt et al. 

2008. 33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007. p. 972 – 975. DOI : 10.1016/j.mee.2008.01.052.

Research activities at LMIS1-EPFL

T. Kiefer; O. Vazquez Mena; K. Sidler Arnet; V. Fakhfouri; K. Pataky et al. 

5th NAMIS International workshop, Freiburg, Germany, April 4th-5th, 2008.

Bismuth nanowires with stencil lithography

V. Savu; S. Neuser; J. Brugger 

2008. 34th International Conference on Micro and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008..

Discontinuous Palladium Nanostructures for H2 Sensing

C. Fournier; T. Kiefer; L. G. Villanueva; F. Fargier; R. Penner et al. 

Pacific Rim Meeting on Electrochemical and Solid-State Science (PRIME2008), Honolulu, Hawaii, October 12-17 2008.

Stencil assisted reactive ion etching for micro and nano patterning

B. Viallet; J. Grisolia; L. Ressier; M. Van Den Boogaart; J. Brugger et al. 

Microelectronics Engineering. 2008. Vol. 85, num. 8, p. 1705 – 1708. DOI : 10.1016/j.mee.2008.04.027.

Drop-on-demand Ink-jet printing of functional materials: Case studies of SU-8 and NCs-embedded Polymer nanocomposites

J. Y. KIM; V. Fakhfouri; C. Ingrosso; M. Striccoli; M. L. Curri et al. 

International Conference on Digital Fabrication Technologies, Pittsburgh, Pennsylvania, USA, September 7-12, 2008.

KFM detection of quantified charges injected into a thin SiO2 layer containing Si nps embedded by ultra low energy ion implantation using stencil lithography

C. Dumas; L. Ressier; J. Grisolia; A. Arbouet; V. Paillard et al. 

European Materials Research Society (EMRS 2008): Symposium H: Materials and emerging technologies for non-volatile-memory devices, Strasbourg, France, June 26-30 2008.

Nanostructured ZnO-based layers deposited by non reactive rf magnetron sputtering on ultra-thin SiO2/Si through a stencil mask

A. Barnabé; M. Lalanne; L. Presmanes; P. Tailhades; C. Dumas et al. 

2nd International Symposium on Transparent Conductive Oxides, Hersonissos, Crete, Greece, October 22 – 26 2008.

Hydrogen Sensors based on Nanoscaled Discontinuities in Palladium

T. Kiefer; F. Favier; L. G. Villanueva; O. Vazquez Mena; A. Salette et al. 

NAMIS International autumn school, Tokyo, Japan, September 2008.

Direct fabrication of NIL stamps using Stencil Lithography

G. Villanueva; O. Vazquez-Mena; T. Kiefer; J. Brugger 

Eurosensors XXII, Dresden, Germany, September 7-10, 2008.

Stencil Lithography: Quick and Clean

G. Villanueva; J. Brugger 

Smart Systems Integration (SSI), Barcelona, Spain, 2008.

Charging dynamics of localized 2D layers of Si nanocrystals embedded into SiO2 by stencil masked ultra low energy ion implantation process

C. Dumas; J. Grisolia; J. Carrey; A. Arbouet; V. Paillard et al. 

European Materials Research Society (EMRS 2008): Symposium H: Materials and emerging technologies for non-volatile-memory devices, Strasbourg, France, June 26-30 2008.

Inkjet printing of SU-8 for polymer-based MEMS: A case study for microlenses

V. Fakhfouri; N. Cantale; G. Mermoud; J. Y. Kim; D. Boiko et al. 

21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), Tucson, USA, 13-17 January, 2008.

Design and optimization of nanogap array sensors

T. Kiefer; G. Villanueva; J. Brugger 

Eurosensors XXII, Dresden, Germany, October 7-10, 2008.

Full-wafer fabrication by nanostencil lithography of micro/nanomechanical mass sensors monolithically integrated with CMOS

J. Arcamone; M. van den Boogaart; F. Serra-Graells; J. Fraxedas; J. Brugger et al. 

Nanotechnology. 2008. Vol. 19, num. 30, p. 305302. DOI : 10.1088/0957-4484/19/30/305302.

Dynamic Stencil Lithography on Full Wafer Scale

M. van den Boogaart; V. Savu; J. Brugger 

2008. 52nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2008), Portland, Oregon, May 27–30, 2008.

Etching of sub-micrometer structures through Stencil

G. Villanueva; O. Vazquez-Mena; M. A. F. van den Boogaart; K. Sidler; V. Savu et al. 

2008. 33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), 23-26 Sept, 2007, Copenhagen, Denmark, Copenhagen, Denmark, 23-26 Sept, 2007. p. 1010 – 1014. DOI : 10.1016/j.mee.2007.12.068.

Dynamic stencil lithography on full wafer scale

V. Savu; M. van den Boogaart; J. Brugger; J. Arcamone; M. Sansa et al. 

Journal of Vacuum Science and Technology B. 2008. Vol. 26, p. 2054 – 2058. DOI : 10.1116/1.2987953.

Ion Beam Etching: Replication of Micro Nano-structured 3D Stencil Masks

P. Weber; E. Guibert; S. Mikhailov; J. Brugger; G. Villanueva 

2008. 20th International Conference on the Application of Accelerators in Research and Industry (CAARI), Fort Worth, USA, 2008. p. 539 – 541. DOI : 10.1063/1.3120093.

Controlled synthesis of silicon nanocrystals into a thin SiO2 layer synthesized by stencil-masked ultra-low energy ion implantation

C. Dumas; J. Grisolia; G. BenAssayag; C. Bonafos; S. Schamm et al. 

2008. French Symposium on Emerging Technologies for Micro-nanofabrication, Toulouse, France, November 19-21, 2008.

Design and optimization of nanogap array sensors

T. Kiefer; L. G. Villanueva; J. Brugger 

Eurosensors XXII, Dresden, Germany, September 7-10, 2008.

Nanopatterned Self-Assembled Monolayers by Using Diblock Copolymer Micelles as Nanometer-Scale Adsorption and Etch Masks

S. Krishnamoorthy; R. Pugin; J. Brugger; H. Heinzelmann; C. Hinderling 

Advanced Materials. 2008. Vol. 20, num. 10, p. 1962 – 1965. DOI : 10.1002/adma.200702005.

Stress and aging minimization in photoplastic AFM probes

C. Martin; A. Llobera; G. Villanueva; A. Voigt; G. Gruetzner et al. 

2008. 34th International Conference on Micro and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008. DOI : 10.1016/j.mee.2008.12.033.

Resistivity Measurements of Gold Wires Fabricated by Stencil Lithography on Flexible Polymer Substrates

K. Sidler; O. Vazquez Mena; V. Savu; G. Villanueva; M. A. F. van den Boogaart et al. 

2008. 33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007. p. 1108 – 1111. DOI : 10.1016/j.mee.2007.12.069.

Stress and aging minimization in photoplastic AFM probes

C. Martin; A. Llobera; G. Villanueva; A. Voigt; G. Gruetzner et al. 

34th International Conference on Micro and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008.

Quick and Clean: Stencil Lithography for Wafer-Scale Fabrication of Superconducting Tunnel Junctions

V. Savu; J. Brugger; J. Kivioja; J. Ahopelto 

2008. Applied Superconductivity Conference 2008 (ASC 2008), Chicago, Illinois USA, August 17-22 2008. DOI : 10.1109/TASC.2009.2019075.

Pentacene – SiO2 interface: Role of the environment prior to pentacene deposition and its impact on TFT DC characteristics

N. V. Cvetkovic; D. Tsamados; K. Sidler; J. Brugger; A. M. Ionescu 

2008. 26th International Conference on Microelectronics (MIEL 2008), Nis, Serbia, May 11-14, 2008. DOI : 10.1109/ICMEL.2008.4559282.

Dynamic Stencil Lithography on Full Wafer Scale

M. van den Boogaart; V. Savu; J. Brugger 

The 52nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2008), Portland, Oregon, May 27–30, 2008.

A single nanotrench in a palladium microwire for hydrogen detection

T. Kiefer; F. Favier; O. Vazquez; G. Villanueva; J. Brugger 

Nanotechnology. 2008. Vol. 19, num. 12, p. 125502. DOI : 10.1088/0957-4484/19/12/125502.

Two-dimensional magnetic resonance force microscopy using full-volume Fourier and Hadamard encoding

K. W. Eberhardt; A. Hunkeler; U. Meier; J. Tharian; S. Mouaziz et al. 

Physical Review B. 2008. Vol. 78, p. 214401 (5 pages). DOI : 10.1103/PhysRevB.78.214401.

Ink-jet printing of highly luminescent nanocrystal/polymer nanocomposites for microstructure fabrication: effect of the ink parameters

C. Ingrosso; J. Y. Kim; V. Fakhfouri; M. Striccoli; E. Binetti et al. 

34th International Conference on Micro- and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008.

Silicon nanoparticles synthesized in SiO2 pockets by stencil-masked low energy ion implantation and thermal annealing

J. Grisolia; C. Dumas; G. Ben Assayag; C. Bonafos; S. Schamm et al. 

2008. Meeting of the European-Materials-Research-Society, Strasbourg, FRANCE, May 28-Jun 01, 2007. p. 395 – 401. DOI : 10.1016/j.spmi.2007.12.013.

Compact CMOS current conveyor for integrated NEMS resonators

J. Arcamone; B. Misischi; F. Serra-Graells; M. A. F. van den Boogaart; J. Brugger et al. 

Iet Circuits Devices & Systems. 2008. Vol. 2, p. 317 – 323. DOI : 10.1049/iet-cds:20070320.

Metallic Nanowires by Full Wafer Stencil Lithography

O. Vazquez Mena; G. Villanueva; V. Savu; K. Sidler; M. A. F. van den Boogaart et al. 

Nano Letters. 2008. Vol. 8, num. 11, p. 3675 – 3682. DOI : 10.1021/nl801778t.

Combining micelle self-assembly with nanostencil lithography to create periodic/aperiodic micro- /nanopatterns on surfaces

S. Krishnamoorthy; M. A. F. Van den Boogaart; J. Brugger; C. Hibert; R. Pugin et al. 

Advanced Materials. 2008. Vol. 20, num. 18, p. 3533 – 3538. DOI : 10.1002/adma.200702478.

Sub-100 nm-scale Aluminum Nanowires by Stencil Lithography: Fabrication and Characterization

O. Vazquez-Mena; V. Savu; K. Sidler; G. Villanueva; M. A. F. van den Boogaart et al. 

2008. 3rd IEEE International Conference of Nano/Micro Engineered and Molecular Systems, Sanya, Hainan Island, China, January 6-9, 2008.. p. 807 – 811. DOI : 10.1109/NEMS.2008.4484447.

Inkjet printing of SU-8 for polymer-based MEMS a case study for microlenses

V. Fakhfouri; N. Cantale; G. Mermoud; J. Y. Kim; D. Boiko et al. 

2008. 21st IEEE International Conference on Micro Electro Mechanical Systems 2008, Tucson, Arizona, USA, Jan 13-17, 2008. p. 407 – 410. DOI : 10.1109/MEMSYS.2008.4443679.

Fabrication of Highly Ordered Vertical Nanogap Arrays and Networks on a Large Scale

T. Kiefer; G. Villanueva; .. Brugger 

34th International Conference on Micro- and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008.

The systematic tunability of nanoparticle dimensions through the controlled loading of surface-deposited diblock copolymer micelles

S. Krishnamoorthy; R. Pugin; C. Hinderling; J. Brugger; H. Heinzelmann 

Nanotechnology. 2008. Vol. 19, p. 175301. DOI : 10.1088/0957-4484/19/17/175301.

KFM detection of quantified charges injected into a thin SiO2 layer containing Si nps embedded by ultra low energy ion implantation using stencil lithography

C. Dumas; L. Ressier; J. Grisolia; A. Arbouet; V. Paillard et al. 

2008. European Materials Research Society (EMRS 2008): Symposium H: Materials and emerging technologies for non-volatile-memory devices, Strasbourg, France, June 26-30 2008..

Controlled synthesis of silicon nanocrystals into a thin SiO2 layer synthesized by stencil-masked ultra-low energy ion implantation

C. Dumas; J. Grisolia; G. BenAssayag; C. Bonafos; S. Schamm et al. 

French Symposium on Emerging Technologies for Micro-nanofabrication, Toulouse, France, November 19 – 21 2008.

Charging dynamics of localized 2D layers of Si nanocrystals embedded into SiO2 by stencil masked ultra low energy ion implantation process

C. Dumas; J. Grisolia; J. Carrey; A. Arbouet; V. Paillard et al. 

2008. European Materials Research Society (EMRS 2008): Symposium H: Materials and emerging technologies for non-volatile-memory devices, Strasbourg, France, June 26-30 2008..

Pentacene – SiO2 interface: role of the environment prior to pentacene deposition and its impact on TFT DC characteristics

N. V. Cvetković; D. Tsamados; K. Sidler; J. Brugger; A. M. Ionescu 

26th International Conference on Microelectronics, Nis, Serbia, May 11-14 2008.

Optical Transmission Properties of Corrugated Nanoscale Hole Arrays in Thin Gold Films

M. Klein; M. Guillaumée; L. A. Dunbar; R. Eckert; H. Heinzelmann et al. 

2008. 34th International Conference on Micro- and Nano Engineering 2008, Athens, Greece, Sept 15-18, 2008.

Inkjet printing and high aspect ratio structuring for polymer-based micro and nano systems

V. Fakhfouri / J. Brugger (Dir.)  

Lausanne, EPFL, 2008. 

Novel methods to pattern polymers for microfluidics

C. Martin; A. Llobera; T. Leïchlé; G. Villanueva; A. Voigt et al. 

Microelectronic Engineering. 2008. Vol. 85, p. 972 – 975. DOI : 10.1016/j.mee.2008.01.052.

2007

Enhancing the energy resolution of a singles photon STJ spectrometer using diffusion engineering

V. Savu; L. Frunzio; D. E. Prober 

IEEE Transactions on Applied Superconductivity. 2007. Vol. 17, num. 2, p. 324 – 327. DOI : 10.1109/TASC.2007.898612.

Fabrication of planar chiral photonic meta-materials on SU- 8 using nanoimprint lithography technique

B-R. Lu; S-Q. Xie; Y. Sun; Y. Chen; X-P. Qu et al. 

2007. International Conference on Nanoscience & Technology (Chinanano), Beijing, China, June 4-6, 2007.

The Light at the End of the Tunnel Junction – Improving the Energy Resolution of UV Single-Photon Spectrometers using Diffusion Engineering

A. V. Savu 

Yale University, 2007. 

Focused electron beam induced deposition of nickel

A. Perentes; G. Sinicco; G. Boero; B. Dwir; P. Hoffmann 

2007. 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, Denver, CO, May 29-Jun 01, 2007. p. 2228 – 2232. DOI : 10.1116/1.2794071.

An Epoxy Photoresist Modified by Luminescent Nanocrystals for the Fabrication of 3D High-Aspect-Ratio Microstructures

C. Ingrosso; V. Fakhfouri; M. Striccoli; A. Agostiano; A. Voigt et al. 

Advanced Functional Materials. 2007. Vol. 17, p. 2009 – 2017. DOI : 10.1002/adfm.200700098.

Improved and new properties of resist materials by doping with nanoparticles and nanocrystals

A. Voigt; M. Heinrich; G. Gruetzner; C. Ingrosso; M. Striccoli et al. 

Solutions for the Microsystems Technology Market (Microsys 2007 Congress), Berlin, Germany, 7- 8 March, 2007.

Uniformly Dispersed Deposition of Colloidal Nanoparticles and Nanowires by Boiling

K. Lee; M. Duchamp; G. Kulik; A. Magrez; J. W. Seo et al. 

Applied Physics Letters. 2007. Vol. 91, num. 17, p. 173112. DOI : 10.1063/1.2803320.

Stencil Lithography – Quick & Clean Surface Patterning at Mesoscopic Scales

J. Brugger 

AVS 54th International Symposium & Exhibision, Seattle, WA, USA, 14-19 October, 2007.

Direct observation of nuclear spin diffusion in real space

K. W. Eberhardt; S. Mouaziz; G. Boero; J. Brugger; B. H. Meier 

Physics Review Letters. 2007. Vol. 99, p. 227603. DOI : 10.1103/PhysRevLett.99.227603.

Nanostenciling for combinatorial fabrications and interconnections of nanopatterns and microelectrodes

H. Guo; D. Martrou; T. Zambelli; J. Polesel-Maris; A. Piednoir et al. 

Virtual Journal of Nanoscale Science & Technology. 2007. Vol. 15, num. 10.

Micropositioning and microscopic observation of individual picoliter-sized containers within SU-8 microchannels

M. Jenke; C. Schreiter; G. Kim; H. Vogel; J. Brugger 

Microfluidics and Nanofluidics. 2007. Vol. 3, num. 2, p. 189 – 194. DOI : 10.1007/s10404-006-0119-2.

A Compact and Low-Power CMOS Circuit for Fully-Integrated NEMS Resonators

J. Arcamone; B. Misischi; F. Serra-Graells; M. A. F. van den Boogaart; J. Brugger et al. 

IEEE Transactions on Circuits and Systems II. 2007. Vol. 54, num. 5, p. 377 – 381. DOI : 10.1109/TCSII.2007.892228.

Patterning of parallel nanobridge structures by reverse nanostencil lithography using an edge-patterned stencil

C. W. Park; O. Vazquez Mena; J. Brugger 

Nanotechnology. 2007. Vol. 18, num. 4, p. 044002. DOI : 10.1088/0957-4484/18/4/044002.

Dry etching for the correction of gap-induced blurring and improved pattern resolution in nanostencil lithography

J. Arcamone; A. Sanchez-Amores; J. Montserrat; M. van den Boogaart; J. Brugger et al. 

Journal of Microlithography, Microfabrication, and Microsystems. 2007. Vol. 6, p. 013005 – 1. DOI : 10.1117/1.2435273.

Micrometric Droplets Motion

G. Mermoud; V. Fakhfouri; A. Martinoli; J. Brugger 

“4th Annual Conference on Foundations of Nanoscience: Self-Assembled Architectures and Devices (FNANO07), Utah, USA, 18-21 April, 2007.

Integrated Nickel Micro-Hall Sensors on SU-8 Cantilevers for Scanning Hall Probe Microscopy

S. Mouaziz; C. Imboden; G. Boero; R. Popovic; J. Brugger 

14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’07), Lyon, France, 10-14 June, 2007.

Predicting mask distortion, clogging and pattern transfer for stencil lithography

M. Lishchynska; V. Bourenkov; M. A. F. van den Boogaart; L. Doeswijk; J. Brugger et al. 

Microelectronic Engineering. 2007. Vol. 81, num. 1, p. 42 – 53. DOI : 10.1016/j.mee.2006.08.003.

Towards Reliable 100-Nanometer Scale Stencil Lithography on Full Wafer: Progress AND Challenges

O. Vazquez Mena; M. van den Boogaart; J. Brugger 

2007. 14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’07), Lyon, France, 10-14 June, 2007. p. 195 – 198. DOI : 10.1109/SENSOR.2007.4300104.

Stencil mask for accurate pattern replication

J. Brugger; L. Doeswijk; D. Van 

WO2007099518.

2007.

NMR spectroscopy and perfusion of mammalian cells using surface microprobes

K. Ehrmann; K. Pataky; M. Stettler; F. M. Wurm; J. Brugger et al. 

Lab on a Chip. 2007. Vol. 7, num. 3, p. 381 – 383. DOI : 10.1039/B613240E.

Micrometric Droplets Motion

G. Mermoud; V. Fakhfouri; A. Martinoli; J. Brugger 

2007. 4th Annual Conference on Foundations of Nanoscience: Self-Assembled Architectures and Devices (FNANO07), Utah, USA, 18-21 April, 2007.

Computational Design and Optimisation of Mechanically Reinforced Masks for Stencil Lithography

M. Lishchynska; M. van den Boogaart; J. Brugger; J. Greer 

EuroSimE 2007, Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems,, London, UK, 15-18 April, 2007.

Integrated Nickel Micro-Nano-Hall Sensors on SU-8 Cantilevers for Scanning Hall Probe Microscopy

S. Mouaziz; C. Imboden; C. Santschi; O. Vazquez Mena; R. Popovic et al. 

2007. 14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’07), Lyon, France, June 10-14, 2007. p. 2589 – 2592. DOI : 10.1109/SENSOR.2007.4300701.

Nanostenciling for fabrication and interconnection of nanopatterns and microelectrodes

H. Guo; D. Martrou; T. Zambelli; J. Polesel-Maris; A. Piednoir et al. 

Applied Physics Letters. 2007. Vol. 90, num. 9, p. 093113. DOI : 10.1063/1.2710473.

Etching of sub-micrometer structures through Stencil

G. Villanueva; O. Vazquez-Mena; M. van den Boogaart; K. Sidler; V. Savu et al. 

33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007.

Micro and nano tools for magnetic field imaging

S. Mouaziz / J. Brugger; G. Boero (Dir.)  

Lausanne, EPFL, 2007. 

Cell Patterning Using Nanostencil Lithography: An Alternative to Micro-Contact Printing

K. Pataky; M. Cordey; J. Brugger; M. P. Lutolf 

BIOSURF VII -Functional Interfaces for Directing Biological Response, Zurich, Switzerland, 29 – 31 August, 2007.

Reusability of nanostencils for the patterning of Aluminum nanostructures by selective wet etching

O. Vázquez-Mena; G. Villanueva; M. A. F. van den Boogaart; V. Savu; J. Brugger 

33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007.

Quick & Clean: Advances in High Resolution Stencil Lithography

J. Brugger; V. Savu; K. Sidler; M. van den Boogaart; O. Vazquez-Mena et al. 

E nano newsletter. 2007. Vol. 8, p. 22 – 28.

Selective deposition of gold nanoparticles using Van der Waals interactions

B. Viallet; L. Ressier; J. Grisolia; J. Peyrade; R. Podgajny et al. 

physica status solidi (c). 2007. Vol. 4, num. 2, p. 276 – 278. DOI : 10.1002/pssc.200673344.

Stencil Lithography on Flexible Polymer Substrates

K. Sidler; O. Vazquez Mena; V. Savu; M. van den Boogaart; G. Villanueva et al. 

33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007.

Synthesis of localized 2D-layers of silicon nanoparticles embedded in a SiO2 layer by a stencil-masked ultra-low energy ion implantation process

C. Dumas; J. Grisolia; L. Ressier; A. Arbouet; V. Paillard et al. 

Physica Status Solidi (a). 2007. Vol. 204, num. 2, p. 487 – 491. DOI : 10.1002/pssa.200673232.

Microfabricated electrically conducting and wear-resistant nanoprobes for scanning probe applications

J. Steen / J. Brugger (Dir.)  

Lausanne, EPFL, 2007. 

Fabrication and testing of a poly(vinylidene fluoride) (PVDF) microvalve for gas flow control

R. S. Wiederkehr; M. C. Salvadori; J. Brugger; F. T. Degasperi; M. Cattani 

Smart Materials and Structures. 2007. Vol. 16, p. 2302 – 2307. DOI : 10.1088/0964-1726/16/6/033.

Highly Sensitive Cantilevers, with and without Magnetic Tip, for Magnetic Resonance Force Microscopy

S. Mouaziz; A. Dysli; J. Brugger; G. Boero 

2007. 14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’07), Lyon, France, June 10-14 , 2007. p. 1537 – 1540. DOI : 10.1109/SENSOR.2007.4300438.

Towards Reliable 100-Nanometer Scale Stencil Lithography on Full Wafer: Progress AND Challenges

O. Vazquez Mena; M. van den Boogaart; J. Brugger 

14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’07), Lyon, France, 10-14 June, 2007.

Highly Sensitive Si Cantilevers, with and without Magnetic Tip, for Magnetic Resonance Force Microscopy

S. Mouaziz; A. Dysli; G. Boero; J. Brugger 

14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’07), Lyon, France, 10-14 June, 2007.

Focused Ion Beam Engineered Nanogap in a Palladium Microwire as a Mechanical Switch for Hydrogen Detection

T. Kiefer; F. Favier; O. Vazquez Mena; L. G. Villanueva; J. Brugger 

33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007.

2006

MICRO-HALL SENSORS ON SU-8 CANTILEVERS FOR MAGNETIC IMAGINIG

C. Imboden; S. Mouaziz; G. Boero 

2006

Dynamic Stencil Lithography

H-C. Schneider 

2006.

Integrated Micro Hall Sensor on SU-8 Cantilever

C. Imboden 

2006.

Realization and characterization of magnetic multilayer for MFM tips

L. Schmid 

2006.

Chemical patterns of Octadecyltrimethoxysilane monolayers for the selective deposition of gold nanoparticles on silicon substrate

L. Ressier; B. Viallet; J. Grisolia; J. P. Peyrade; M. A. F. van den Boogaart 

Montpellier 2006 SPM, Sensors and Nanostructures International Conference, Montpellier, France, 3-6 June, 2006.

Photoluminescence characterization of localized 2D-layers of few-nanocrystals electronic devices

A. Arbouet; M. Carrada; V. Paillard; G. BenAssayag; C. Bonafos et al. 

The E-MRS 2006 Spring Meeting (E-MRS – IUMRS – ICEM 06), Nice, France, 29 May – 2 June, 2006.

Small AFM cantilevers for biological applications

A. Gangadharaiah 

2006.

Self-assembly of tunable, responsive polymer nanostructures : tools for nanofabrication of functional interfaces

S. Krishnamoorthy / J. Brugger (Dir.)  

Lausanne, EPFL, 2006. 

Fabrication and characterisation of ultrasensitive monocrystalline silicon cantilevers with integrated magnetic tips

A. Dysli 

2006.

Nanostencil Lithography – Quick & Clean: Towards a reliable scalable nanopatterning method

J. Brugger; L. Doeswijk; N. Takano; M. A. F. van den Boogaart; O. Vazquez-Mena 

32nd International Conference on Micro- and Nano Engineering 2006 (MNE 2006), Barcelona, Spain, 17-20 Sept, 2006.

Novel full platinum nanoprobes suitable for biological SPM experiments

J. Steen; V. Blech; J. Brugger; B. J. Kim 

International Conference on Microtechnologies in Medicine and Biology, Okinawa, Japan, 9-12 May, 2006.

Surface micromachining of Ceramic-MEMS based on SU-8 micromoulding of Polyureasilazane

V. Fakhfouri; J. Brugger 

CIMTEC 2006 (11th International Conferences on Modern Materials and Technologies), Sicily, Italy, 4-9 June, 2006.

Surface Micromachining of Polyureasilazane Based Ceramic-MEMS using SU-8 Micromolds

V. Fakhfouri; S. Jiguet; J. Brugger 

Advances in Science and Technology. 2006. Vol. 45, p. 1293 – 1298. DOI : 10.4028/www.scientific.net/AST.45.1293.

SMALL AFM CANTILEVERS FOR BIOLOGICAL APPLICATION

A. Gangadharaiah; J. Steen; J. Brugger; V. Walhorn; R. Ros 

2006

Inkjet-Based Deposition of Micro/Nano-Objects on Functional Surfaces – Controlling and Exploiting Self-Assembly across Length-Scales

G. Mermoud; V. Fakhfouri; A. Martinoli; J. Brugger 

LEA Laboratoire Européen Associé en Microtechnique, France, 12-13 Sept, 2006,.

Fabrication and functionalization of nanochannels by electron-beam-induced silicon oxide deposition

C. Danelon; C. Santschi; J. Brugger; H. Vogel 

Langmuir. 2006. Vol. 22, num. 25, p. 10711 – 10715. DOI : 10.1021/la061321c.

Nanostencil lithography for nanowire patterning

O. Vazquez M; C. W. Park; M. van den Boogaart; J. Brugger 

Nanoelectronics Days 2006, Aachen, Germany, 11-13 Oct, 2006.

FABRICATION OF NANOPORES IN SIN MEMBRANES USING FIB

C. Santschi; C. Danelon; H. Vogel; J. Brugger 

2006

Silicon Supported Membranes for Improved Large-Area and High-Density Micro/Nanostencil Lithography

M. A. F. van den Boogaart; L. M. Doeswijk; J. Brugger 

IEEE Journal of Microelectromechanical Systems. 2006. Vol. 15, num. 6, p. 1663 – 1670. DOI : 10.1109/JMEMS.2006.885981.

FABRICATION OF ULTRA SENSITIVE MONOCRYSTALLINE SILICON CANTILEVERS

A. Dysli; S. Mouaziz; G. Boero; J. Brugger 

2006

A Flexible Platform Based on Self-Assembly of Block-Copolymer Micelles to Create Nanotopographies of Tunable Dimensions in Different Materials. Combination with Top-Down Methods and first Applications as Cell Growth Substrates

S. Krishnamoorthy; C. Hibert; M. Liley; Â. Meister; M. Dalby et al. 

International Conference on Nanoscience and Technology ICN&T 2006, Basel, Switzerland, 30 July – 4 Aug, 2006.

Modelling pattern transfer in stencil lithography

M. Lishchynska; V. Bourenkov; M. A. F. van den Boogaart; J. Brugger; J. C. Greer 

32nd International Conference on Micro- and Nano Engineering 2006 (MNE 2006), Barcelona, Spain, 17-20 Sept, 2006.

Full tungsten and platinum nanoprobes for electrically conducting scanning probe methods

J. Steen; T. Harada; M. Ishii; J. Brugger 

2006. The 8th Korean MEMS Conference, Jeju, Korea, 6-8 April, 2006.

Polymer-based cantilevers with integrated electrodes

S. Mouaziz; G. Boero; R. S. Popovic; J. Brugger 

IEEE Journal of Microelectromechanical Systems. 2006. Vol. 15, num. 4, p. 890 – 895. DOI : 10.1109/JMEMS.2006.879376.

Application of Microstencil Lithography on Polymer Surfaces for Microfluidic Systems with Integrated Microelectrodes

N. Takano; L. M. Doeswijk; M. A. F. van den Boogaart; J. Brugger 

International Conference on Microtechnologies in Medicine and Biology, Okinawa, Japan, 9-12 May, 2006.

Reverse nanostencil lithography using dual pattern transfer

C. W. Park; O. Vazquez Mena; M. A. F. van den Boogaart; J. Brugger 

32nd International Conference on Micro- and Nano Engineering 2006 (MNE 2006), Barcelona, Spain, 17-20 Sept, 2006.

Corrugated membranes for improved pattern definition with micro/nanostencil lithography

M. A. F. van den Boogaart; M. Lishchynska; L. M. Doeswijk; J. C. Greer; J. Brugger 

Sensors and Actuators A. 2006. Vol. 130-131, p. 568 – 574. DOI : 10.1016/j.sna.2005.08.037.

Luminescent nanocrystal modified photoresin for fabrication of high-aspect ratio three-dimensional microstructures

C. Ingrosso; V. Fakhfouri; M. L. Curri; M. Striccoli; A. Agostiano et al. 

2006 MRS Fall Meeting, Boston, USA, 27 Nov – 1 Dec, 2006.

Self-Organized Nanostructures on Large Surfaces: A Versatile Toolbox

S. Krishnamoorthy; C. C. Hibert; J. Brugger; R. Pugin; H. Heinzelmann et al. 

Annual Meeting of the Swiss Physical Society, Lausanne, Switzerland, 13-14 Feb, 2006.

STAMP FABRICATION FOR NANOIMPRINT LITHOGRAPHY BY PATTERN DEFINITION WITH STENCIL LITHOGRAPHY

N. Takano; L. M. Doeswijk; M. A. F. van den Boogaart; J. Brugger 

2006

NANOSCALE DISPENSING OF LIQUIDS WITH AFM-CANTILEVER

C. Santschi; A. Meister; J. Brugger; H. Heinzelmann 

2006

Implantable Glucose Sensor, IGLUS III – Membrane Technology –

N. Takano; J. Brugger; H. Schift 

CTI Medtech Event 2006, Bern, Switzerland, 30 Aug, 2006.

Interdigital 50 nm Ti Electrode Arrays Fabricated Using XeF2 Enhanced Focused Ion Beam Etching

C. Santschi; M. Jenke; P. Hoffmann; J. Brugger 

Nanotechnology. 2006. Vol. 17, num. 11, p. 2722 – 2729. DOI : 10.1088/0957-4484/17/11/002.

Block copolymer micelles as switchable templates for nanofabrication

S. Krishnamoorthy; R. Pugin; J. Brugger; H. Heinzelmann; A. C. Hoogerwerf et al. 

Langmuir. 2006. Vol. 22, num. 8, p. 3450 – 3452. DOI : 10.1021/la052299a.

ELECTROSTATIC CLAMPING CHUCK FOR NANOSTENCILS

H. C. Schneider; M. A. F. van den Boogaart; A. Lal; H. Bleuler; J. Brugger 

2006

Application of Microstencil Lithography on Polymer Surfaces for Microfluidic Systems with Integrated Microelectrodes

N. Takano; L. M. Doeswijk; M. A. F. van den Boogaart; J. Brugger 

2006. 2006 International Conference on Microtechnologies in Medicine and Biology, Okinawa, Japan, 9-12 May, 2006.

Formation of Metal Nano- and Micro-patterns on Self-Assembled Monolayers Using Pulsed Laser Deposition through Nanostencils and Electroless Deposition

E. A. Speets; P. te Riele; M. A. F. van den Boogaart; L. M. Doeswijk; B. J. Ravoo et al. 

Advanced Functional Materials. 2006. Vol. 16, num. 10, p. 1337 – 1342. DOI : 10.1002/adfm.200500933.

Permalloy thin films exchange-coupled to arrays of stencilled cobalt islands

L. J. Heyderman; A. F. Rodríguez; F. Nolting; A. Hoffmann; J. E. Pearson et al. 

32nd International Conference on Micro- and Nano Engineering 2006 (MNE 2006), Barcelona, Spain, 17-20 Sept, 2006.

Development of actuators using PVDF piezoelectric polymer

R. S. Wiederkehr; M. C. Salvadori; J. Brugger 

XXIX Brazilian National Meeting of Physics of Condensate Matter (Encontro Nacional de Física da Matéria Condensada), Sao Lourenço, Brazil, 9-13 May, 2006.

Permalloy thin films exchange coupled to arrays of cobalt islands

A. Fraile Rodriguez; L. J. Heyderman; F. Nolting; A. Hoffmann; J. E. Pearson et al. 

Applied Physics Letters. 2006. Vol. 89, num. 14, p. 142508. DOI : 10.1063/1.2357007.

Surface Micromachining of Polyureasilazane Based Ceramic-MEMS using SU-8 Micromolds

V. Fakhfouri; S. Jiguet; J. Brugger 

2006. CIMTEC 2006 (11th International Conferences on Modern Materials and Technologies), Sicily, Italy, 4-9 June, 2006. p. 1293 – 1298.

IMPROVED LARGE-AREA AND HIGH-DENSITY NANOSTENCIL LITHOGRAPHY

M. A. F. van den Boogaart; L. M. Doeswijk; J. Brugger 

2006

Synthesis of localized 2D-layers of silicon nanoparticles embedded in a SiO2 layer by a stencil-masked ultra-low energy ion implantation process

C. Dumas; J. Grisolia; G. BenAssayag; C. Bonafos; S. Schamm et al. 

14th International Conference on Superlattices, Nano-Structures and Nano-Devices, Istanbul, Turkey, 30 July – 4 Aug, 2006.

MEMS-based nanopatterning: new challenges and opportunities for Materials Science

J. Brugger 

2nd Workshop on Characterization of Materials for MEMS/MST Devices, Tokyo, Japan, 6 Nov.

Full platinum nanoprobes for electrically conducting scanning probe methods

J. Steen; T. Harada; M. Ishii; J. Brugger 

The 16th International Microscopy Congress, Sapporo, Japan, 3-8 Sept, 2006.

HYBRID SPM PROBE WITH PLATINUM CANTILEVER AND TIP FOR ELECTRICALLY CONDUCTING MODE SPM EXPERIMENTS

J. Steen; T. Harada; M. Ishii; J. Brugger 

2006

Approach of Top-down technology to self-assembled materials for applications in nano-patterning and various sensing devices

N. Takano; V. Fakhfouri; T. Kiefer; Y. Luo; S. Mouaziz et al. 

EPFL-IIS-KIMM Joint Workshop on Micro/Nano Mechatronics and Production Technologies, Tokyo, Japan, 16 and 18 Oct, 2006.

Photoluminescence characterization of few-nanocrystals electronic devices

A. Arbouet; M. Carrada; F. Demangeot; V. Paillard; G. BenAssayag et al. 

Journal of Luminescence. 2006. Vol. 121, num. 2, p. 340 – 343. DOI : 10.1016/j.jlumin.2006.08.070.

Directed assembling of gold nanoparticles using Van der Waals interactions

B. Viallet; L. Ressier; J. Grisolia; R. Podgajny; C. Amiens et al. 

14th International Conference on Superlattices, Nano-Structures and Nano-Devices, Istanbul, Turkey, 30 July – 4 Aug, 2006.

High-aspect ratio three-dimensional photoresin-based microstructures doped with luminescent nanocrystals

V. Fakhfouri; C. Ingrosso; M. L. Curri; M. Striccoli; A. Agostiano et al. 

32nd International Conference on Micro- and Nano Engineering 2006 (MNE 2006), Barcelona, Spain, 17-20 Sept, 2006.

Reverse transfer of nanostencil patterns using intermediate sacrificial layer and lift-off process

C. W. Park; O. Vazquez Mena; M. A. F. van den Boogaart; J. Brugger 

Journal of Vacuum Science and Technology B. 2006. Vol. 24, num. 6, p. 2772 – 2775. DOI : 10.1116/1.2366610.

Stenci Lithography: Status and Prospectives

M. van den Boogaart; L. Doeswijk; C. W. Park; O. Vazquez Mena; N. Takano et al. 

International Conference on Nanoscience and Technology ICN&T 2006, Basel, Switzerland, 30 July – 4 Aug, 2006.

Conduction Mechanisms in Organic MOSFETs with Bottom and Top Source and Drain Contacts

C. Anghel; D. Tsamados; M. van den Boogaart; J. Brugger; A. M. Ionescu 

36th European Solid-State Device Research Conference, Montreux, Switzerland, 18-22 Sept, 2006.

MONOLITHIC INTEGRATION OF NANOMECHANICAL RESONATORS WITH CMOS CIRCUITRY: FULL-WAFER NANOPATTERNING BY NANOSTENCIL LITHOGRAPHY

J. Arcamone; F. Pérez-Murano; M. A. F. van den Boogaart; J. Brugger 

2006

Cell Membranes Suspended Across Nanoaperture Arrays

C. Danelon; J-B. Perez; C. Santschi; J. Brugger; H. Vogel 

Langmuir. 2006. Vol. 22, num. 1, p. 22 – 25. DOI : 10.1021/la052387v.

Emerging Nanopatterning Methods based on MEMS Technology

F. Pérez-Murano; J. Brugger 

Ultimate Lithography and Nanofabrication for Electronics and Life Science (LITHO2006), Marseille, France, 25-30 June, 2006.

MICROFABRICATED HALL SENSORS MINIATURIZED TO THE NANOMETER SCALE

S. Mouaziz; C. Santschi; G. Boero; R. Popovic; J. Brugger 

2006

Fabrication of metallic patterns by microstencil lithography on polymer surfaces suitable as microelectrodes in integrated microfluidic systems

N. Takano; L. M. Doeswijk; M. A. F. van den Boogaart; J. Auerswald; H. F. Knapp et al. 

Journal of Micromechanics and Microengineering. 2006. Vol. 16, num. 8, p. 1606 – 1613. DOI : 10.1088/0960-1317/16/8/023.

Full tungsten and platinum nanoprobes for electrically conducting scanning probe methods

J. Steen; T. Harada; M. Ishii; J. Brugger 

Korean MEMS Conference, Jeju, Korea, 6-8 April, 2006.

SETTING-UP AND EVALUATION OF UV-IMPRINT LITHOGRAPHY

N. Takano; T. Kiefer; J. Brugger; G. A. Racine 

2006

Combined Al-protection and HF-vapor release process for ultrathin single crystal silicon cantilevers

S. Mouaziz; G. Boero; G. Moresi; C. Degen; Q. Lin et al. 

Microelectronic Engineering. 2006. Vol. 83, num. 4-9, p. 1306 – 1308. DOI : 10.1016/j.mee.2006.01.218.

Electrically conducting probes with full tungsten cantilever and tip for scanning probe applications

J. A. J. Steen; J. Hayakawa; T. Harada; K. Lee; F. Calame et al. 

Nanotechnology. 2006. Vol. 17, num. 5, p. 1464 – 1469. DOI : 10.1088/0957-4484/17/5/050.

MICROFABRICATED RECYCLABLE MOULDS FOR FULL-WAFER STRUCTURING OF CERAMIC PRECURSOR POLYMERS

V. Fakhfouri; J. Brugger 

2006

Stencil lithography : an ancient technique for advanced micro- and nano-patterning

M. A. F. v. d. Boogaart / J. Brugger (Dir.)  

Lausanne, EPFL, 2006. 

Tuning the Dimensions and Periodicities of Nanostructures Starting from the Same Polystyrene-block-poly(2-vinylpyridine) Diblock Copolymer

S. Krishnamoorthy; R. Pugin; J. Brugger; H. Heinzelmann; C. Hinderling 

Advanced Functional Materials. 2006. Vol. 16, num. 11, p. 1469 – 1475. DOI : 10.1002/adfm.200500524.

SUB-MICRON SCALE PATTERN TRANSFER INTO POLYMERS BY THERMAL IMPRINT LITHOGRAPHY

T. Kiefer; N. Takano; C. Santschi; J. Brugger; G. A. Racine et al. 

2006

Novel full platinum nanoprobes suitable for biological SPM experiments

J. Steen; V. Blech; J. Brugger; B. J. Kim 

2006. 2006 International Conference on Microtechnologies in Medicine and Biology, Okinawa, Japan, 9-12 May, 2006.

Micro- and nanostructured devices for investigating biomolecular interactions

C. Danelon; M. Jenke; C. Schreiter; G. Kim; J-B. Perez et al. 

Chimia. 2006. Vol. 60, num. 11, p. 754 – 760. DOI : 10.2533/chimia.2006.754.

Dry etching release of polymer-based cantilevers with integrated electrodes

S. Mouaziz; C. Imboden; G. Boero; R. Popovic; J. Brugger 

International workshop on nanomechanical sensors, Copenhagen, Denmark, 7-10 May, 2006.

Full wafer integration of NEMS on CMOS by nanostencil lithography

J. Arcamone; M. van den Boogaart; F. Serra-Graells; S. Hansen; J. Brugger et al. 

IEEE International Electron Devices Meeting, San Francisco, USA, 11-13 Dec, 2006,.

MECHANOSENSITIVE CELL SUBSTRATE

K. Pataky; J. Brugger; M. Chiquet 

2006

REVERSE TRANSFER OF NANOSTENCIL PATTERNS USING INTERMEDIATE SACRIFICIAL LAYER AND LIFT-OFF

C. W. Park; O. Vazquez; M. A. F. van den Boogaart; J. Brugger 

2006

MICROFABRICATED MOLDS FOR INKJET APPLICATIONS

Y. Luo; V. Fakhfouri; K. Pataky; J. Brugger 

2006

FABRICATION OF NANOAPERTURES ON STENCILS USING FOCUSED ION BEAMS FOR SHADOW MASK EVAPORATION

O. Vazquez Mena; C. W. Park; M. van den Boogaart; J. Brugger 

2006

Full wafer integration of NEMS on CMOS by nanostencil lithography

J. Arcamone; M. van den Boogaart; F. Serra-Graells; S. Hansen; J. Brugger et al. 

2006. 2006 IEEE international Electron Devices, Electron Devices Meeting, Electron Devices Meeting, 2006. IEDM ’06. International, December 11-13, San Francisco, U.S.A., December 11-13, 2006. p. 1 – 4. DOI : 10.1109/IEDM.2006.346830.

2005

X-ray ferromagnetic resonance spectroscopy

G. Boero; S. Rusponi; P. Bencok; R. S. Popovic; H. Brune et al. 

Applied Physics Letters. 2005. Vol. 87, num. 15, p. 1 – 3. DOI : 10.1063/1.2089180.

Dynamic Stencil Deposition

H-C. Schneider 

2005.

Deposition on Curved Surfaces by Means of E-Beam Evaporation

C. Imboden 

2005.

Deformation in thin SiN membranes due to residual stresses

B. van Schaik 

2005.

Diffusion-engineered quasiparticle multiplication for STJ single photon detectors

V. A. Savu; C. M. Wilson; L. Fruzio; D. E. Prober; R. J. Schoelkopf 

IEEE Transactions on Applied Superconductivity. 2005. Vol. 15, num. 2, p. 609 – 612. DOI : 10.1109/TASC.2005.849956.

Micro-Four-Point probe based on SU-8 cantilevers

S. Keller 

2005.

Superparamagnetic microbead inductive detector

M. Lany; G. Boero; R. Popovic 

Review of Scientific Instruments. 2005. Vol. 76, num. 8, p. 084301. DOI : 10.1063/1.1988131.

In-situ stabilization of membranes for improved large-area and high-density nanostencil lithography

M. A. F. van den Boogaart; M. Lishchynska; L. M. Doeswijk; J. C. Greer; J. Brugger 

13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’05), Seoul, Korea, 5-9 June, 2003.

Fully tungsten and platinum nanoprobes for electrically conducting scanning probe methods

J. Steen; T. Harada; M. Ishii; J. Brugger 

The 4th IIS / KIMM / EPFL Joint Symposium on Micro/Nano Science and Technology, Seiken Symposium No. 41, Neuchatel, Switzerland, 17-19 Oct, 2005.

Nanoparticle arrays with tunable particle dimensions and periodicities

S. Krishnamoorthy; R. Pugin; J. Brugger; H. Heinzelmann; C. Hinderling 

NanoEurope 2005, St-Gallen, Switzerland, 13-15 Sept, 2005.

Advancing towards well-controlled full-wafer nanostencil lithography

L. M. Doeswijk; M. A. F. van den Boogaart; N. Takano; J. Brugger 

International Conference on Micro- and Nano Engineering 2005 (MNE 2005), Vienna, Austria, 19-22 Sept, 2005.

EVAPORATION THROUGH SHADOW MASKS ON UNCONVENTIONAL SUBSTRATES

L. M. Doeswijk; M. A. F. van den Boogaart; C. Imboden; J. Brugger 

2005

Surface microfabricated SU-8 devices with integrated electrodes for scanning probe microscopy

S. Mouaziz; G. Boero; R. Popovic; L. Scandella; J. Brugger 

Eurosensors XIX, 19th European conference on Solid-State Transducers, Barcelona, Spain, 11-14 Sept, 2005.

Micromechanical testing of SU-8 cantilevers

M. Hopcroft; T. Kramer; G. Kim; K. Takashima; Y. Higo et al. 

Fatigue and Fracture of Engineering Materials and Structures. 2005. Vol. 28, num. 8, p. 735 – 742. DOI : 10.1111/j.1460-2695.2005.00873.x.

INTERDIGITATED NANOELECTRODES FABRICATED USING FIB

C. Santschi; M. Jenke; J. Brugger; P. Hoffmann 

2005

Complex oxide nanostructures by pulsed laser deposition through nanostencils

C. Cojocaru; C. Harnagea; F. Rosei; A. Pignolet; M. van den Boogaart et al. 

Applied Physics Letters. 2005. Vol. 86, num. 18, p. 183107 (3 pages). DOI : 10.1063/1.1923764.

Submicrometer Hall devices fabricated by focused electron-beam-induced deposition

G. Boero; I. Utke; T. Bret; N. Quack; M. Todorova et al. 

Virtual Journal of Nanoscale Science & Technology. 2005. Vol. 86, p. 042503.

IN-SITU STABILIZATION OF MEMBRANES FOR IMPROVED LARGE-AREA AND HIGH-DENSITY NANOSTENCIL LITHOGRAPHY

M. A. F. van den Boogaart; L. M. Doeswijk; J. Brugger 

2005

Nanostencil-based lithography for silicon nanowires fabrication

D. Grogg; C. Santschi; V. Pott; A. M. Ionescu; J. Brugger 

Nanoelectronics Days 2005, Jülich, Germany, 9-11 Feb, 2005.

NANOSTENCIL-BASED LITHOGRAPHY FOR SILICON NANOWIRES FABRICATION

D. Grogg; C. Santschi; M. A. F. van den Boogaart; J. Brugger; V. Pott et al. 

2005

Combined Al-protection and HF-vapour release process for ultrathin cantilevers

S. Mouaziz; G. Boero; G. Moresi; C. Degen; Q. Lin et al. 

International Conference on Micro- and Nano Engineering 2005 (MNE 2005), Vienna, Austria, 19-22 Sept, 2005.

Microscopic four-point probe based on SU-8 cantilevers

S. Keller; S. Mouaziz; G. Boero; J. Brugger 

Review of Scientific Instruments. 2005. Vol. 76, num. 12, p. 125102 (4 pages). DOI : 10.1063/1.2140443.

Tunable surface nanostructures from Block copolymer self-assembly

S. Krishnamoorthy; R. Pugin; H. Heinzelmann; J. Brugger; C. Hinderling 

SFC EuroChem 2005, Nancy, France, 28 Aug – 1 Sept, 2005.

ALL TUNGSTEN AFM CANTILEVER WITH < 40 NANOMETRE PYRAMIDAL TIP

J. Steen; T. Harada; J. Hayakawa; J. Brugger 

2005

Submicrometer Hall devices fabricated by focused electron-beam-induced deposition

G. Boero; I. Utke; T. Bret; N. Quack; M. Todorova et al. 

Applied Physics Letters. 2005. Vol. 86, num. 4, p. 042503 (3 pages). DOI : 10.1063/1.1856134.

ASSESSMENT OF MICROSTENCILING TECHNIQUE FOR LOW-COST PRODUCTION OF MICROELECTRODES

N. Takano; M. A. F. van den Boogaart; L. Doeswijk; J. Brugger; J. Auerswald et al. 

2005

Pattern recovery by dry etching of gap-induced blurring in nanostencil lithography

J. Arcamone; A. Sanchez-Amores; L. M. Doeswijk; M. A. F. van den Boogaart; J. Brugger et al. 

International Conference on Micro- and Nano Engineering 2005 (MNE 2005), Vienna, Austria, 19-22 Sept, 2005.

Microscopic four-point probe (u4PP) based on SU-8 cantilevers

S. Keller; S. Mouaziz; G. Boero; J. Brugger 

International Conference on Micro- and Nano Engineering 2005 (MNE 2005), Vienna, Austria, 19-22 Sept, 2005.

NANOINGENEERING OF SIN MEMBRANES USING FIB

C. Santschi; N. Takano; M. A. F. van den Boogaart; D. Grogg; C. Danelon et al. 

2005

Silicon Nanowires Patterning by Sidewall and Nano-Oxidation Processing

V. Pott; D. Grogg; J. Brugger; A. M. Ionescu 

Nanoelectronics Days 2005, Jülich, Germany, 9-11 Feb, 2005.

MICROFABRICATED HALL SENSORS ON SU-8 CANTILEVERS

S. Mouaziz; G. Boero; R. S. Popovic; J. Brugger; L. Scandella 

2005

Pulsed Laser Deposition of Metals on Self-Assembled Monolayers

E. Speets; B. J. Ravoo; G. Rijnders; J. Brugger; D. Reinhoudt et al. 

MC7: Functional Materials for the 21st Century, Edinburgh, UK, 5-8 July, 2005.

Force Spectroscopy with a Novel Small Focus AFM

V. Walhorn; J. Martini; R. Eckel; J. Steen; T. Kramer et al. 

Deutsche Physikalische Gesellschaft (DPG)-Spring Meeting, “Physik seit Einstein”, Berlin, Germany, 4-9 March, 2005.

MEMS tools for combinatorial materials processing and high-throughput characterization

A. Ludwig; J. Cao; J. Brugger; I. Takeuchi 

Measurement Science and Technology. 2005. Vol. 16, num. 1, p. 111 – 118. DOI : 10.1088/0957-0233/16/1/015.

Nanostencil technique and its applications to Nanoelectronics

O. Vazquez; J. Brugger 

Workshop on Nano-Scale Systems and Technologies, Lausanne, Switzerland, 5-7 Oct, 2005.

Simulation Study on Mechanical Stabilization of MEMS Stencils for Nanolithography

M. Lishchynska; M. A. F. van den Boogaart; J. Brugger 

Micromechanics Europe 2005 (MME 2005), Göteborg, Sweden, 4-6 Sept, 2005.

Nanocomposites based on luminescent colloidal nanocrystals in polymers: new opportunities for micro and nano fabrication

M. Tamborra; C. Ingrosso; M. Striccoli; A. Petrella; M. L. Curri et al. 

The 9th Annual European Conference On Micro & Nanoscale Technologies for the Biosciences (Nanotech Montreux 2005), Montreux, Switzerland, 15-17 Nov, 2005.

Surface Nanostructuring through block copolymer self-assembly

S. Krishnamoorthy; R. Pugin; H. Heinzelmann; J. Brugger; C. Hinderling 

2nd BENEFRI Material Day, Neuchatel, Switzerland, 24 June, 2005.

Microscopic four-point probe based on SU-8 cantilevers

S. Keller; S. Mouaziz; G. Boero; J. Brugger 

Virtual Journal of Nanoscale Science & Technology. 2005. Vol. 12, num. 26.

MICRO-MOULDING OF CERAMIC STRUCTURES USING CERAMIC-PRECURSOR POLYMERS

V. Fakhfouri; J. Brugger 

2005

Tunable PDMS Nanostructured Ssurfaces Through Replication of Nanoscale Topography of Diblock Copolymer Micellar Thin Films

S. Krishnamoorthy; R. Pugin; M. Liley; M. J. Dalby; R. O. C. Oreffo et al. 

Biosurf VI – Tissue-Surface Interaction, Lausanne, Switzerland, 21-23 Sept, 2005.

Characterisation and applications of stencil lithography

M. A. F. van den Boogaart; L. M. Doeswijk; N. Takano; O. Vazquez Mena; J. Brugger et al. 

NaPa project meeting, European project “Emerging Nanopatterning Methods”, Lausanne, Switzerland, 12-14 Sept, 2005.

Nanofabrication by shadow deposition through nanostencils

J. Brugger; G. Kim 

Nanolithography and patterning techniques in microelectronics; Cambridge: Woodhead Publishing Limited, 2005. p. 218 – 237.

Methods for rapid prototyping of nanomechanical (NEMS) devices

J. Brugger 

15th NID Workshop, Madrid, Spain, 31 Jan – 2 Feb, 2005.

Ink-Jetting of Polymers and Biomaterials

V. Fakhfouri; K. Pataky; Y. Luo; K. Shakhbazov; A. Terskikh et al. 

The 9th Annual European Conference On Micro & Nanoscale Technologies for the Biosciences (Nanotech Montreux 2005), Montreux, Switzerland, 15-17 Nov, 2005.

Emerging nanopatterning methods based on MEMS tools

J. Brugger 

FIS conference on future integrated systems, Cambridge, UK, 8-11 Aug, 2005.

2004

Parity-violating electron deuteron scattering and the proton’s neutral weak axial vector form factor

T. M. Ito; T. Averett; D. Barkhuff; G. Batigne; D. H. Beck et al. 

Physical Review Letters. 2004. Vol. 92, num. 10, p. 102003. DOI : 10.1103/PhysRevLett.92.102003.

Fabrication and characterization of metal nanolevers made by shadow mask technology

D. Grogg 

2004.

Polymer structuring by inkjet printing technology / Micro heating arrays with tungsten

S. Jung 

2004.

Fabrication of solid-state Nanopores for DNA analysis

M. Volatier 

2004.

Diffusion-engineered single-photon spectrometer for UV/visible detection

V. Savu; L. Li; A. Mukherjee; C. M. Wilson; L. Frunzio et al. 

Nuclear Instruments and Methods in Physics Research A. 2004. Vol. 520, num. 1-3, p. 237 – 239. DOI : 10.1016/j.nima.2003.11.332.

Complex Oxide Nanostructures by Pulsed Laser Deposition through Nanostencils

C. V. Cojocaru; C. Harnagea; M. A. F. van den Boogaart; J. Brugger; F. Rosei et al. 

MRS Fall Meeting, Boston, USA, 29 Nov – 3 Dec, 2004.

Microfabrication d’un capteur de température en céramique

V. Fakhfouri; J. Brugger 

LEA Laboratoire Européen Associé en Microtechnique, France, 21-22 Sept, 2004.

Fabrication and characterization of metal nanolevers made by shadow mask technology

D. Grogg; M. A. F. van den Boogaart; H. Kawakatsu; J. Brugger; B. J. Kim 

EIPBN conference 2004, San Diego, USA, 1-4 June, 2004.

Nanomechanical structures with 91 MHz resonance frequency fabricated by local deposition and dry etching

G. Kim; S. Kawai; M. Nagashio; H. Kawakatsu; J. Brugger 

Journal of Vacuum Science and Technology B. 2004. Vol. 22, num. 4, p. 1658 – 1661. DOI : 10.1116/1.1761240.

Nanodispenser for attoliter volume deposition using atomic force microscopy probes modified by focused-ion-beam milling

A. Meister; M. Liley; J. Brugger; R. Pugin; H. Heinzelmann 

Applied Physics Letters. 2004. Vol. 85, num. 25, p. 6260 – 6262. DOI : 10.1063/1.1842352.

DUV/MEMS based stencils for full-wafer scale, resistless, patterning of mesoscopic structures

M. A. F. van den Boogaart; G. M. Kim; R. Pellens; J. v/d Heuvel; J. Brugger 

EIPBN conference 2004, San Diego, USA, 1-4 June, 2004.

Reinforcement of single-walled carbon nanotube bundles by intertube bridging

A. Kis; G. Csanyi; J. P. Salvetat; T. N. Lee; E. Couteau et al. 

Nature Materials. 2004. Vol. 3, num. 3, p. 153 – 157. DOI : 10.1038/nmat1076.

Enhancement of the nanostencil method and its applications

L. M. Doeswijk; M. A. F. van den Boogaart; D. Grogg; J. Brugger 

3rd International conference on Nanoimprint and Nanoprint Technology (NNT ’04), Vienna, Austria, 1-3 Dec, 2004.

Current-driven switching of exchange biased spin-valve giant magnetoresistive nanopillars using a conducting nanoprobe

J. Hayakawa; K. Ito; M. Fujimori; S. Heike; T. Hashizume et al. 

Journal of Applied Physics. 2004. Vol. 96, num. 6, p. 3440 – 3442. DOI : 10.1063/1.1769605.

Native membranes on subwavelentgh holes for membrane receptors analysis

C. Danelon; J. B. Perez; B. Meyer; E. Ilegems; J. Brugger et al. 

LCPPM 2004 Autumn School, Rosenlaui, Switzerland, 20-24 Sept, 2004.

Electron tunneling through ultra thin ferroelectric films

A. Petraru; N. A. Pertsev; R. Meyer; V. Nagarajan; J. Brugger et al. 

MRS Fall Meeting, Boston, USA, 29 Nov – 3 Dec, 2004.

Formation of Nanowires by Self-Assembly on Highly Oriented Pyrolytic Graphite (HOPG)

S. Gopakumar; M. A. F. van den Boogaart; F. Favier; J. Brugger 

TNT 2004 “Trends in Nanotechnology”, Segovia, Spain, 13-17 Sept, 2004.

Ties between microsystem technology and nano-engineering

J. Brugger; L. Doeswijk; S. Gopakumar; D. Grogg; G. M. Kim et al. 

TNT 2004 “Trends in Nanotechnology”, Segovia, Spain, 13-17 Sept, 2004.

Deep-ultraviolet–microelectromechanical systems stencils for high-throughput resistless patterning of mesoscopic structures

M. A. F. van den Boogaart; G. M. Kim; R. Pellens; J. P. van den Heuvel; J. Brugger 

Virtual Journal of Biological Physics Research. 2004. Vol. 8, num. 12.

Surface Nanostructuring by Molecular Self-Assembly

S. Krishnamoorthy; R. Pugin; J. Brugger; H. Heinzelmann; C. Hinderling 

1st Workshop on Plasmon-Nano-Devices, Neuchatel, Switzerland, 3-4 June, 2004.

High-throughput surface patterning with wafer-sized stencils fabricated by a DUV/MEMS process

M. A. F. van den Boogaart; G. M. Kim; R. Pellens; J. P. v/d Heuvel; L. M. Doeswijk et al. 

Micro- and Nano Engineering 2004 International Conference, Rotterdam, The Netherlands, 19-22 Sept, 2004.

Full-wafer stencils fabricated by a DUV/MEMS process for high-throughput patterning of mesoscopic structures

M. A. F. van den Boogaart; G. M. Kim; R. Pellens; J. P. v/d Heuvel; L. M. Doeswijk et al. 

TNT 2004 “Trends in Nanotechnology”, Segovia, Spain, 13-17 Sept, 2004.

SU-8 based Micro-/Nano-Tools for Life-Science Experiments

G. M. Kim; M. Jenke; C. Schreiter; H. Vogel; T. T. Duong et al. 

4th Korea-Switzerland Joint Symposium in MEMS and Nano-technologies, Les Diablerets, Switzerland, 1-3 Feb, 2004.

Exploring microstencils for sub-micron patterning using pulsed laser deposition

F. Vroegindeweij; E. Speets; J. Steen; J. Brugger; D. Blank 

Applied Physics A – Mater. Sci. Process.. 2004. Vol. 79, num. 4-6, p. 743 – 745. DOI : 10.1007/s00339-004-2749-0.

Small SiN AFM Cantilevers for High Frequency Application

T. Kramer; J. Steen; J. Brugger; V. Walhorn; J. Martini et al. 

TNT 2004 “Trends in Nanotechnology”, Segovia, Spain, 13-17 Sept, 2004.

MEMS based nanopatterning

M. A. F. van den Boogaart; D. Grogg; C. Santschi; N. Takano; S. Gopakumar et al. 

The 8th Annual European Conference on Micro & Nanoscale Technologies for the Biosciences (Nanotech 2004), Montreux, Switzerland, 16-18 Nov, 2004.

Self-assembled nanowires connected to micropads using the nanostencil method

S. Gopakumar; M. A. F. van den Boogaart; F. Favier; J. Brugger 

The 8th Annual European Conference on Micro & Nanoscale Technologies for the Biosciences (Nanotech 2004), Montreux, Switzerland, 16-18 Nov, 2004.

Nanostenciling: a Versatile Approach for Surfaces Patterning

C. V. Cojocaru; C. Harnagea; F. Rosei; A. Pignolet; M. A. F. van den Boogaart et al. 

Entretiens Jacques Cartier – Nanotechnology: Nanofabrication and Nanodevices in Electronics and Photonics, Montreal, Canada, 6-7 Oct, 2004.

Micro/nano Scale Patterning Method by Micro Contact Printing with Novel Type of PDMS Stamp

J. G. Kim; N. Takama; J. Brugger; B. J. Kim 

EIPBN conference 2004, San Diego, USA, 1-4 June, 2004.

Ties between Microsystems Technology and Nano-Engineering

N. Takano; L. Doeswijk; S. Gopakumar; D. Grogg; G. M. Kim et al. 

KIMM-EPFL-IIS Joint Workshop on Micro/Nano Mechatronics and Production Technologies, Seoul, Korea, 11-12 Oct, 2004.

Fabrication of Miniaturized Shadow-mask for Local Deposition

G. M. Kim; J. Brugger 

Journal of Korean Society of Precision Engineering. 2004. Vol. 21, num. 8.

Nanofabrication a Base de MEMS

J. Brugger 

Entretiens Jacques Cartier – Nanotechnology: Nanofabrication and Nanodevices in Electronics and Photonics, Montreal, Canada, 6-7 Oct, 2004.

MEMS-based nanopatterning and NEMS

J. Brugger 

1st Nanospain workshop, San Sebastian, Sapin, 10-12 March, 2004.

Surface Patterning using Attoliter Deposition by AFM Probes

A. Meister; M. Liley; J. Brugger; R. Pugin; H. Heinzelmann 

Nanofair 2003, St-Gallen, Switzerland, 13-16 Sept, 2004.

Microfabricated AFM probe with tungsten cantilever and < 40 nm pyramidal tip

J. Steen; T. Harada; J. Brugger 

Seeing at the NanoScale II, Grenoble, France, 13-15 Oct, 2004.

Deep-ultraviolet-microelectromechanicaI systems stencils for high-throughput resistless. patterning of mesoscopic structures

M. van den Boogaart; G. Kim; R. Pellens; J. van den Heuvel; J. Brugger 

Journal of Vacuum Science and Technology B. 2004. Vol. 22, num. 6, p. 3174 – 3177. DOI : 10.1116/1.1802931.

Small Cantilever AFM for Single Molecule Force Spectroscopy

J. Martini; V. Walhorn; J. Steen; T. Kramer; G. M. Kim et al. 

Deutsche Physikalische Gesellschaft (DPG)-Spring Meeting of the Division for Condensed Matter Physics, Regensburg, Germany, 8-12 March, 2004.

Surface Patterning using Attoliter Deposition by AFM Probes

A. Meister; M. Liley; J. Brugger; R. Pugin; H. Heinzelmann 

TNT 2004 “Trends in Nanotechnology”, Segovia, Spain, 13-17 Sept, 2004.

Bismuth Micro and Nano Hall Sensors on Photo-plastic Cantilevers for Scanning Hall Probe Microscopy

S. Mouaziz; G. Boero; L. Scandella; R. Popovic; J. Brugger 

TNT 2004 “Trends in Nanotechnology”, Segovia, Spain, 13-17 Sept, 2004.

Resistless Fabrication and Characterisation of Metal Nanolevers Arrays

D. Grogg; M. A. F. van den Boogaart; H. Kawakatsu; J. Brugger; B. J. Kim 

TNT 2004 “Trends in Nanotechnology”, Segovia, Spain, 13-17 Sept, 2004.

2003

Planar microcoil-based microfluidic NMR probes

C. Massin; F. Vincent; A. Homsy; K. Ehrmann; G. Boero et al. 

Journal of Magnetic Resonance. 2003. Vol. 164, num. 2, p. 242 – 255. DOI : 10.1016/S1090-7807(03)00151-4.

Capillarity Induced Negative Pressure of Water Plugs in Nanochannels

N. R. Tas; P. Mela; T. Kramer; J. W. Berenschot; A. van den Berg 

Nano Letters. 2003. Vol. 3, num. 11, p. 1537 – 1540. DOI : 10.1021/nl034676e.

Electron-spin resonance probe based on a 100 mu m planar microcoil

G. Boero; M. Bouterfas; C. Massin; F. Vincent; P. Besse et al. 

Review of Scientific Instruments. 2003. Vol. 74, num. 11, p. 4794 – 4798. DOI : 10.1063/1.1621064.

Micro-Hall devices: performance, technologies and applications

G. Boero; M. Demierre; P. Besse; R. Popovic 

SENSORS AND ACTUATORS A-PHYSICAL. 2003. Vol. 106, num. 1-3, p. 314 – 320. DOI : 10.1016/S0924-4247(03)00192-4.

Photoplastic near-field optical probe with sub-100 nm aperture made by replication from a nanomould

G. Kim; B. Kim; E. Ten Have; F. Segerink; N. Van Hulst et al. 

Journal of Microscopy. 2003. Vol. 209, num. 3, p. 267 – 271. DOI : 10.1046/j.1365-2818.2003.01134.x.

Self-Assembled Monolayer Coatings on Nanostencils for the Reduction of Materials Adhesion

M. Koelbel; R. W. Tjerkstra; G. M. Kim; J. Brugger; C. J. M. van Rijn et al. 

Advanced Functional Materials. 2003. Vol. 13, num. 3, p. 219 – 224. DOI : 10.1002/adfm.200390033.

Micromechanical testing of SU-8 cantilevers

M. Hopcroft; T. Kramer; G. M. Kim; K. Takashima; Y. Higo et al. 

International Conference on Advanced Technology in Experimental Mechanics 2003 (ATEM’03), Nagoya, Japan, 10-12 Sep, 2003.

All-photoplastic microstencil with self-alignment for multiple layer shadow-mask patterning

G. M. Kim; B. J. Kim; J. Brugger 

Sensors and Actuators A. 2003. Vol. 107, num. 2, p. 132 – 136. DOI : 10.1016/S0924-4247(03)00298-X.

Exploring microstencils for sub-micron patternig using Pulsed Laser Deposition

F. Vroegindeweij; J. Steen; J. Brugger; D. H. A. Blank 

7th International Conference on Laser Ablation, Hersonissos, Crete, Greece, 5-10 Oct, 2003.

Fabrication of functional structures on thin silicon nitride membranes

P. Ekkels; R. Tjerkstra; G. Krijnen; J. Berenschot; J. Brugger et al. 

Microelectronic Engineering. 2003. Vol. 67-8, p. 422 – 429. DOI : 10.1016/S0167-9317(03)00098-4.

Micro- and nano-patterning using local deposition through miniaturized shadow mask

G. M. Kim; J. Brugger 

5th Korean MEMS Conference, Jeju, Korea, 15-17 May, 2003.

“MELODE” Membrane for local Deposition

M. A. F. van den Boogaart; G. M. Kim; J. Brugger 

Nanofair 2003, St-Gallen, Switzerland, 09-11 Sept, 2003.

Optically addressing a large number of cantilevers

D. Kobayashi; S. Kawai; M. Nagashio; D. Saya; H. Toshiyoshi et al. 

12th International Conference on Scanning Tunneling Microscopy/Spectroscopy and Related Techniques (STM’03), Eindhoven, The Netherlands, 21-25 July, 2003.

90 MHz nanomechanical structures fabricated by stencil deposition and dry etching

G. M. Kim; M. A. F. van den Boogaart; S. Kawai; H. Kawakatsu; J. Brugger 

2003. 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’03), Boston, USA, 8-12 June, 2003. p. 883 – 886. DOI : 10.1109/SENSOR.2003.1215616.

Fabrication and application of a full wafer size micro/nanostencil for multiple length-scale surface patterning

G. Kim; M. van den Boogaart; J. Brugger 

Microelectronic Engineering. 2003. Vol. 67-68, p. 609 – 614. DOI : 10.1016/S0167-9317(03)00121-7.

Micromechanical testing of SU-8 cantilevers

M. Hopcroft; T. Kramer; G. M. Kim; K. Takashima; Y. Higo et al. 

2003. International Conference on Advanced Technology in Experimental Mechanics 2003 (ATEM’03), Nagoya, Japan, 10-12 Sep, 2003.

Bismuth Hall Sensors on Plastic Cantilevers

S. Mouaziz; G. Boero; J. Brugger 

Nanofair 2003, St-Gallen, Switzerland, 09-11 Sept, 2003.

Exploring microstencils for sub-micron patternig using Pulsed Laser Deposition

F. Vroegindeweij; J. Steen; J. Brugger; D. H. A. Blank 

2003. 7th International Conference on Laser Ablation, Hersonissos, Crete, Greece, 5-10 Oct, 2003.

90 MHz nanomechanical structures fabricated by stencil deposition and dry etching

G. M. Kim; M. A. F. van den Boogaart; S. Kawai; H. Kawakatsu; J. Brugger 

12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’03), Boston, USA, 8-12 June, 2003.

Micro- and nano-patterning using local deposition through miniaturized shadow mask

G. M. Kim; J. Brugger 

2003. 5th Korean MEMS Conference, Jeju, Korea, 15-17 May, 2003.

Proceedings of 28th International conference on Micro- and Nanoengineering (MNE’02, Sept. 16-19, 2003, Lugano, Switzerland)

J. Brugger; J. Gobrecht; H. Rothuizen; U. Staufer; P. Vettiger 

2003. 

Fabrication of an active nanostencil with intergrated microshutters

R. W. Tjerkstra; P. Ekkels; G. Krijnen; S. Egger; E. Berenschot et al. 

2003. 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’2003), Boston, USA, 8-12 June, 2003. p. 1651 – 1654. DOI : 10.1109/SENSOR.2003.1217099.

Fabrication of an active nanostencil with intergrated microshutters

R. W. Tjerkstra; P. Ekkels; G. Krijnen; S. Egger; E. Berenschot et al. 

12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’2003), Boston, USA, 8-12 June, 2003.

Size-dependent free solution DNA electrophoresis in structured microfluidic systems

T. Duong; G. Kim; R. Ros; M. Streek; F. Schmid et al. 

Microelectronic Engineering. 2003. Vol. 67-8, p. 905 – 912. DOI : 10.1016/S0167-9317(03)00153-9.

2002

High-Q factor RF planar microcoils for micro-scale NMR spectroscopy

C. Massin; G. Boero; F. Vincent; J. Abenhaim; P-A. Besse et al. 

Sensors and Actuators, A: Physical. 2002. Vol. 97-98, p. 280 – 288. DOI : 10.1016/S0924-4247(01)00847-0.

Detection of a single magnetic microbead using a miniaturized silicon Hall sensor

P-A. Besse; G. Boero; M. Demierre; V. Pott; R. Popovic 

Applied Physics Letters. 2002. Vol. 80, num. 22, p. 4199 – 4201. DOI : 10.1063/1.1483909.

Nanomechanical structure can be made without lithography

G. M. Kim; M. A. F. van den Boogaart; J. Brugger 

Gordon Research Conference on Nanostructure Fabrication, Tilton NH, USA, 4-9 Aug, 2002.

Surface Modification With Self-Assembled Monolayers for Nanoscale Replication of Photoplastic MEMS

G. M. Kim; B. J. Kim; M. Liebau; J. Huskens; D. N. Reinhoudt et al. 

IEEE Journal of Microelectromechanical Systems. 2002. Vol. 11, num. 3, p. 175 – 181. DOI : 10.1109/JMEMS.2002.1007395.

Fabrication of functional structures on thin silicon nitride membranes

P. Ekkels; R. W. Tjerkstra; G. J. M. Krijnen; J. W. Berenschot; J. Brugger et al. 

Micro- and Nano Engineering 2002 International Conference (MNE2002), Lugano, Switzerland, 16-19 Sept, 2002.

Shadow-mask evaporation through monolayer-modified nanostencils

M. Kolbel; R. Tjerkstra; J. Brugger; C. van Rijn; W. Nijdam et al. 

Nano Letters. 2002. Vol. 2, num. 12, p. 1339 – 1343. DOI : 10.1021/nl025784o.

Electrical properties of light-addressed sub-µm electrodes fabricated by use of nanostencil-technology

V. Bucher; J. Brugger; D. Kern; G. M. Kim; M. Schubert et al. 

Microelectronic Engineering. 2002. Vol. 61–62, p. 971 – 980. DOI : 10.1016/S0167-9317(02)00422-7.

Tying top down to bottom up: Nano-engineering between bolecular and um-scale

J. Brugger; G. M. Kim; B. J. Kim; J. Holleman; J. Huskens et al. 

Seiken Symposium on Micro/Nano Mechatronics, Tokyo, Japan, 25-26 March, 2002.

“MELODE” Membrane for local Deposition

M. A. F. van den Boogaart; G. M. Kim; J. Brugger 

Nanoscience Workshop, Switzerland, 30 sept – 4 Oct, 2002.

Size-dependent free solution DNA electrophoresis in structured microfluidic systems

T. T. Duong; G. M. Kim; R. Ros; M. Streek; F. Schmid et al. 

Micro- and Nano Engineering 2002 International Conference (MNE2002), Lugano, Switzerland, 16-19 Sept, 2002.

Unconventional micro/nano patterning method combining shadow-mask pattern and micro-contact printing

B. J. Kim; G. M. Kim; S. T. Lathika; J. Brugger 

1st International conference on Nanoimprint and Nanoprint Technology, San Francisco, USA, 11-13 Dec, 2002.

Polymer NFO probe made by a nanomolding method

G. M. Kim; E. ten Have; F. Segerink; B. J. Kim; N. F. van Hulst et al. 

7th International conference on Near-field Optics and Related Techniques, Rochester, USA, 11-15 Aug, 2002.

Full wafer size micro/nanostencil with multiple length-scale apertures

G. M. Kim; M. A. F. van den Boogaart; J. Brugger 

Micro- and Nano Engineering 2002 International Conference (MNE2002), Lugano, Switzerland, 16-19 Sept, 2002.

Top down meets bottom up: Nano-engineering for link between nm- and μm-scale

G. M. Kim; B. J. Kim; J. Holleman; J. Huskens; E. ten Have et al. 

2002. 3rd Korea-Switzerland Joint Symposium in MEMS and Nano-technologies, Jeju, Korea, 19-20 June, 2002.

Top down meets bottom up: Nano-engineering for link between nm- and um-scale

G. M. Kim; B. J. Kim; J. Holleman; J. Huskens; E. ten Have et al. 

3rd Korea-Switzerland Joint Symposium in MEMS and Nano-technologies, Jeju, Korea, 19-20 June, 2002.

Replication molds having nanometer-scale shape control fabricated by means of oxidation and etching

G. Kim; A. Kovalgin; J. Holleman; J. Brugger 

Journal of Nanoscience and Nanotechnology. 2002. Vol. 2, num. 1, p. 55 – 59. DOI : 10.1166/jnn.2002.073.

2001

Measurement of the vector analyzing power in elastic electron-proton scattering as a probe of the double virtual Compton amplitude

S. P. Wells; T. Averett; D. Barkhuff; D. H. Beck; E. J. Beise et al. 

PHYSICAL REVIEW C. 2001. Vol. 63, num. 6, p. 064001. DOI : 10.1103/PhysRevC.63.064001.

Hall detection of magnetic resonance

G. Boero; P. Besse; R. Popovic 

Applied Physics Letters. 2001. Vol. 79, num. 10, p. 1498 – 1500. DOI : 10.1063/1.1399306.

Fully integrated probe for proton nuclear magnetic resonance magnetometry

G. Boero; J. Frounchi; B. Furrer; P. Besse; R. Popovic 

Review of Scientific Instruments. 2001. Vol. 72, num. 6, p. 2764 – 2768. DOI : 10.1063/1.1374599.

Direct integration of micromachined pipettes in a flow channel for single DNA molecule study by optical tweezers

C. Rusu; R. van’t Oever; M. de Boer; H. Jansen; E. Berenschot et al. 

IEEE Journal of Microelectromechanical Systems. 2001. Vol. 10, num. 2, p. 238 – 246. DOI : 10.1109/84.925758.

Photoplastic shadow-masks for rapid resistless multi-layer micropatterning

G. M. Kim; B. J. Kim; J. Brugger 

11th International Conference on Solid-State Sensors and Actuators (Transducers ’01) and Eurosensors XV, Munich, Germany, 10-14 June, 2001.

Moulded photoplastic probes for near-field optical applications

B. J. Kim; J. W. Flamma; E. S. ten Have; M. F. Garcia-Parajo; N. F. van Hulst et al. 

Journal of Microscopy. 2001. Vol. 202, num. 1, p. 16 – 21. DOI : 10.1046/j.1365-2818.2001.00820.x.

Photoplastic shadow-masks for rapid resistless multi-layer micropatterning

G. M. Kim; B. J. Kim; J. Brugger 

2001. 11th International Conference on Solid-State Sensors and Actuators (Transducers ’01) and Eurosensors XV, Munich, Germany, 10-14 June, 2001. p. 1632 – 1635. DOI : 10.1007/978-3-642-59497-7_379.

SAMs meet MEMS – surface modification with self-assembled monolayers for the dry-demolding of photoplastic MEMS/NEMS

B. J. Kim; G. M. Kim; M. Liebau; J. Huskens; D. N. Reinhoudt et al. 

IEEE International Workshop on MEMS 2001, Interlaken, Switzerland, 21-25 Jan, 2001.

A self-assembled monolayer-assisted surface microfabrication and release technique

B. J. Kim; M. Liebau; J. Huskens; D. N. Reinhoudt; J. Brugger 

Microelectronic Engineering. 2001. Vol. 57-58, p. 755 – 760. DOI : 10.1016/S0167-9317(01)00469-5.

Chemical surface modification of Silicon nitride

M. Koelbel; J. Huskens; J. Brugger; D. N. Reinhoudt 

Micro- and Nanoengineering International Conference (MNE2001), Grenoble, France, 16-19 Sept, 2001.

SAMs meet MEMS – surface modification with self-assembled monolayers for the dry-demolding of photoplastic MEMS/NEMS

B. J. Kim; G. M. Kim; M. Liebau; J. Huskens; D. N. Reinhoudt et al. 

2001. IEEE International Workshop on MEMS 2001, Interlaken, Switzerland, 21-25 Jan, 2001. p. 106 – 109. DOI : 10.1109/MEMSYS.2001.906490.

2000

Parity violation in elastic electron-proton scattering and the proton’s strange magnetic form factor

D. T. Spayde; T. Averett; D. Barkhuff; D. H. Beck; E. J. Beise et al. 

Physical Review Letters. 2000. Vol. 84, num. 6, p. 1106 – 1109. DOI : 10.1103/PhysRevLett.84.1106.

Strange magnetism and the anapole structure of the proton

R. Hasty; A. M. Hawthorne-Allen; T. Averett; D. Barkhuff; D. H. Beck et al. 

SCIENCE. 2000. Vol. 290, num. 5499, p. 2117 – 2119. DOI : 10.1126/science.290.5499.2117.

Realised examples of microsystems and their applications

P. Besse; C. Schott; G. Boero; F. Borger; R. Popovic 

Measurement and Control. 2000. Vol. 33, num. 9, p. 261 – 264. DOI : 10.1177/002029400003300902.

1998

The variable density gas jet internal target for Experiment 835 at Fermilab

D. Allspach; A. Hahn; C. Kendziora; S. Pordes; G. Boero et al. 

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 1998. Vol. 410, num. 2, p. 195 – 205. DOI : 10.1016/S0168-9002(98)00236-8.

An NMR magnetometer with planar microcoils and integrated electronics for signal detection and amplification

G. Boero; C. de Raad Iseli; P. Besse; R. Popovic 

SENSORS AND ACTUATORS A-PHYSICAL. 1998. Vol. 67, num. 1-3, p. 18 – 23. DOI : 10.1016/S0924-4247(97)01722-6.

A chemical sensor based on amicromechanical cantilever array for the identification of gases and vapors

H. P. Lang; R. Berger; F. Battiston; J. P. Ramseyer; E. Meyer et al. 

Appl. Phys. A. 1998. Vol. 66, num. 7, p. S61 – S64. DOI : 10.1007/s003390051100.

Sequential position readout from arrays of micromechanical cantilever sensors

H. P. Lang; R. Berger; A. Andreoli; J. Brugger; M. Despont et al. 

Applied Physics Letters. 1998. Vol. 72, num. (3), p. 383 – 385. DOI : 10.1063/1.120749.

High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS

H. Lorenz; M. Despont; N. Fahrni; J. Brugger; P. Vettiger et al. 

Sensors and Actuators A: physical. 1998. Vol. 64, num. 1, p. 33 – 39. DOI : 10.1016/S0924-4247(98)80055-1.

Low-cost PDMS seal ring for single-side wet etching of MEMS structures

J. Brugger; G. Beljakovic; M. Despont; H. Biebuyck; N. F. de Rooij et al. 

Sensors and Actuators A. 1998. Vol. 70, num. 1-2, p. 191 – 194. DOI : 10.1016/S0924-4247(98)00132-0.

Piezoresistive cantilever designed for torque magnetometry

M. Willemin; C. Rossel; J. Brugger; M. Despont; H. Rothuizen et al. 

Journal of Applied Physics. 1998. Vol. 83, num. 3, p. 1163. DOI : 10.1063/1.366811.

Characterization of an integrated force sensor based on a MOS transistor for applications in scanning force microscopy

T. Akiyama; A. Tonin; H. Hidber; J. Brugger; P. Vettiger et al. 

Sensors and Actuators A. 1998. Vol. 64, num. 1, p. 1 – 6. DOI : 10.1016/S0924-4247(98)80051-4.

1997

Observation of antihydrogen production in flight at CERN

W. Oelert; G. Baur; G. Boero; S. Brauksiepe; A. Buzzo et al. 

Hyperfine Interactions. 1997. Vol. 109, num. 1-4, p. 191 – 203. DOI : 10.1023/A:1012609601849.

Production of antihydrogen in relativistic collisions

G. Baur; G. Boero; S. Brauksiepe; A. Buzzo; W. Eyrich et al. 

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 1997. Vol. 391, num. 1, p. 201 – 204. DOI : 10.1016/S0168-9002(96)01197-7.

A high-flow hydrogen dissociator based on a surface-wave discharge

G. Boero; W. Kubischta; P. Leprince 

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 1997. Vol. 398, num. 2-3, p. 157 – 161. DOI : 10.1016/S0168-9002(97)00823-1.

Silicon Micro/Nanomechanical Device Fabrication Based on Focused Ion Beam Surface Modification and KOH Etching

J. Brugger; G. Beljakovic; M. Despont; N. F. de Rooij; P. Vettiger 

Microeleetronic Engineering. 1997. Vol. 35, p. 401 – 404. DOI : 10.1016/S0167-9317(96)00210-9.

1996

Production of antihydrogen

G. Baur; G. Boero; A. Brauksiepe; A. Buzzo; W. Eyrich et al. 

Physics Letters B. 1996. Vol. 368, num. 3, p. 251 – 258. DOI : 10.1016/0370-2693(96)00005-6.

The internal Xe-jet target for the formation of antihydrogen (H̄) atoms at CERN LEAR

G. Boero; M. Lovetere; M. Macrí; S. Passaggio; A. Pozzo 

Nuovo Cimento della Societa Italiana di Fisica A. 1996. Vol. 109, num. 11, p. 1581 – 1590. DOI : 10.1007/BF02778241.

Scanning force microscopy in the dynamic mode using microfabricated capacitive sensors

N. Blanc; J. Brugger; N. F. de Rooij; U. Duerig 

Journal of Vacuum Science & Technology B. 1996. Vol. 14, num. 2, p. 901 – 905. DOI : 10.1116/1.589171.

1995

Microfabricated Tools for the Scanning Force Microscope

J. BRUGGER / N. F. de Rooij (Dir.)  

Université de Neuchâtel, 1995. 

AFM imaging with an xy-micropositioner with integrated tip

P-F. Indermühle; V. P. Jaecklin; J. Brugger; C. Linder; N. F. de Rooij et al. 

Sensors and Actuators A. 1995. Vol. 46-47, p. 562 – 565. DOI : 10.1016/0924-4247(94)00962-H.

1994

Design and fabrication of an overhanging xy-microactuator with integrated tip for scanning surface profiling

P. F. Indermuehle; C. Linder; J. Brugger; V. P. Jaecklin; N. F. de Rooij 

Sensors and Actuators A. 1994. Vol. 43, num. 1-3, p. 346 – 350. DOI : 10.1016/0924-4247(93)00704-8.

Microlever with combined integrated sensor/actuator functions for scanning force microscopy

J. Brugger; N. Blanc; P. Renaud; N. F. de Rooij 

Sensors and Actuators A. 1994. Vol. 43, num. 1-3, p. 339 – 345. DOI : 10.1016/0924-4247(93)00701-5.

Mechanical and optical properties of surface micromachined torsional mirrors in silicon, polysilicon and aluminum

V. P. Jaecklin; C. Linder; J. Brugger; N. F. de Rooij; J. M. Moret et al. 

Sensors and Actuators A. 1994. Vol. 43, num. 1-3, p. 296 – 274. DOI : 10.1016/0924-4247(93)00699-5.

1993

Microfabricated tools for nanoscience

J. Brugger; V. P. Jaecklin; C. Linder; N. Blanc; P. F. Indermühle et al. 

Journal of Micromechanics and Microengineering. 1993. Vol. 3, num. 4, p. 161 – 167. DOI : 10.1088/0960-1317/3/4/001.

1992

Micromachined silicon cantilevers and tips for bidirectional force microscopy

R. A. Buser; J. Brugger; N. F. de Rooij 

Ultramicroscopy. 1992. Vol. 42-44, p. 1476 – 1480. DOI : 10.1016/0304-3991(92)90469-Z.

Micromachined atomic force microprobe with integrated capacitive read-out

J. Brugger; R. A. Buser; N. F. de Rooij 

Journal of Micromechanics and Microengineering. 1992. Vol. 2, p. 218 – 220. DOI : 10.1088/0960-1317/2/3/026.

Silicon cantilevers and tips for scanning force microscopy

J. Brugger; R. A. Buser; N. F. de Rooij 

Sensors and Actuators A. 1992. Vol. 34, num. 3, p. 193 – 200. DOI : 10.1016/0924-4247(92)85002-J.

1991

Micromachined Silicon Cantilevers and Tips for Scanning Probe Microscopy

R. Buser; J. Brugger; N. de Rooij 

Microelectronic Engineering. 1991. Vol. 15, num. 1-4, p. 407 – 410. DOI : 10.1016/0167-9317(91)90252-9.