Papers

2025

Journal Articles

Fabrication of fluid-compatible trilayer cantilevers with integrated piezoelectric actuators

M. Neuenschwander; D. Maillard; N. Hosseini; M. Kangül; L. G. Villanueva et al. 

Sensors and Actuators A: Physical. 2025. Vol. 383, p. 116217. DOI : 10.1016/j.sna.2025.116217.

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Hydrodynamic Cavitation-Induced Thrombolysis on a Clot-on-a-Chip Platform

B. Ozogul; U. Akar; R. Mercimek; F. R. Talabazar; S. S. Sarraf et al. 

Advanced NanoBiomed Research. 2025. Vol. 5, num. 1, p. 2400112. DOI : 10.1002/anbr.202400112.

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Measuring direct flexoelectricity at the nanoscale

D. Moreno-Garcia; L. G. Villanueva 

IEEE Electron Device Letters. 2025. DOI : 10.1109/LED.2025.3541892.

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Fabrication of periodically poled lithium niobate waveguides for broadband nonlinear photonics

F. Ayhan; M. Ludwig; T. Herr; V. Brasch; L. G. Villanueva 

APL Photonics. 2025. Vol. 10, num. 1, p. 016118. DOI : 10.1063/5.0227255.

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2024

Journal Articles

Effect of annealing on flexoelectricity in hafnium oxide (HfO2)

D. Moreno Garcia; G. Villanueva 

APPLIED PHYSICS LETTERS. 2024. Vol. 125, num. 23. DOI : 10.1063/5.0236565.

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Ultraviolet astronomical spectrograph calibration with laser frequency combs from nanophotonic lithium niobate waveguides

M. Ludwig; F. Ayhan; T. M. Schmidt; T. Wildi; T. Voumard et al. 

Nature communications. 2024. Vol. 15, num. 1. DOI : 10.1038/s41467-024-51560-x.

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Ultraviolet to mid-infrared optical properties of sputtered Al(Sc)N-on-SiO2 thin films and experimental demonstration of AlN integrated photonic devices in the telecom C-band

J. Spettel; N. Andrianov; F. Dubois; M. Azeem; H. Furci et al. 

Optics Express. 2024. Vol. 32, num. 24, p. 42529 – 42544. DOI : 10.1364/OE.540975.

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Flexoelectricity in amorphous hafnium oxide (HfO2)

D. Moreno-Garcia; K. M. Howell; L. G. Villanueva 

APL Materials. 2024. Vol. 12, num. 10, p. 101112. DOI : 10.1063/5.0220532.

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New insights on cavitating flows over a microscale backward-facing step

M. Maleki; F. Rokhsar talabazar; E. Toyran; A. Priyadarshi; A. Sheibani Aghdam et al. 

Physics of Fluids. 2024. Vol. 36, num. 9, p. 093335. DOI : 10.1063/5.0225030.

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Photostrictive Actuators Based on Freestanding Ferroelectric Membranes

S. Ganguly; D. Pesquera; D. M. Garcia; U. Saeed; N. Mirzamohammadi et al. 

Advanced Materials. 2024. DOI : 10.1002/adma.202310198.

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Silicon microresonator arrays: A comprehensive study on fabrication techniques and pH-controlled stress-induced variations in cantilever stiffness

G. Brunetti; A. De Pastina; C. Rotella; V. Usov; G. Villanueva et al. 

Microelectronic Engineering. 2024. Vol. 287, p. 112154. DOI : 10.1016/j.mee.2024.112154.

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In-Sensor Passive Speech Classification with Phononic Metamaterials

T. Dubcek; D. Moreno-Garcia; T. Haag; P. Omidvar; H. R. Thomsen et al. 

Advanced Functional Materials. 2024. DOI : 10.1002/adfm.202311877.

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Piezoelectric and elastic properties of Al0.60Sc0.40N thin films deposited on patterned metal electrodes

M. Liffredo; N. Xu; S. Stettler; F. Peretti; L. G. Villanueva 

Journal of Vacuum Science & Technology. 2024. Vol. A42, num. 4. DOI : 10.1116/6.0003497.

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Reviews

Emulating paper: A review of reflective display technologies

D. Herle; O. J. Martin; L. G. Villanueva; N. Quack 

Journal of Optical Microsystems. 2024. Vol. 4, num. 2, p. 020901. DOI : 10.1117/1.JOM.4.2.020901.

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2023

Journal Articles

Resonant Transducers Consisting of Graphene Ribbons with Attached Proof Masses for NEMS Sensors

X. Fan; D. Moreno-Garcia; J. Ding; K. B. Gylfason; L. G. Guillermo Villanueva et al. 

Acs Applied Nano Materials. 2023. Vol. 7, num. 1, p. 102 – 109. DOI : 10.1021/acsanm.3c03642.

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Toward Band n78 Shear Bulk Acoustic Resonators Using Crystalline Y-Cut Lithium Niobate Films With Spurious Suppression

S. Yandrapalli; S. K. Eroglu; J. Mateu; C. Collado; V. Plessky et al. 

Journal Of Microelectromechanical Systems. 2023. DOI : 10.1109/JMEMS.2023.3282024.

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Broadband Mechanically Tunable Metasurface Reflectivity Modulator in the Visible Spectrum

D. Herle; A. Kiselev; L. G. Villanueva; O. J. F. Martin; N. Quack 

Acs Photonics. 2023. Vol. 10, num. 6, p. 1882 – 1889. DOI : 10.1021/acsphotonics.3c00276.

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Transversal Spurious Mode Suppression in Ultra-Large-Coupling SH0 Acoustic Resonators on YX36 degrees-Cut Lithium Niobate

S. Stettler; L. G. Villanueva 

Journal Of Microelectromechanical Systems. 2023. DOI : 10.1109/JMEMS.2023.3262021.

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Simulating supercontinua from mixed and cascaded nonlinearities

T. Voumard; M. Ludwig; T. Wildi; F. Ayhan; V. Brasch et al. 

Apl Photonics. 2023. Vol. 8, num. 3, p. 036114. DOI : 10.1063/5.0135252.

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2022

Journal Articles

A parametric study on pool boiling heat transfer and critical heat flux on structured surfaces with artificial cavities

B. P. Benam; V. E. Ahmadi; A. R. Motezakker; S. Saeidiharzand; L. G. Villanueva et al. 

Applied Thermal Engineering. 2022. Vol. 221, p. 119841. DOI : 10.1016/j.applthermaleng.2022.119841.

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Determination of a clinically effective evobrutinib dose: Exposure-response analyses of a phase II relapsing multiple sclerosis study

O. Papasouliotis; D. Mitchell; P. Girard; F. Dangond; M. Dyroff 

Cts-Clinical And Translational Science. 2022. DOI : 10.1111/cts.13407.

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Micro 3D printing of a functional MEMS accelerometer

S. Pagliano; D. E. Marschner; D. Maillard; N. Ehrmann; G. Stemme et al. 

Microsystems & Nanoengineering. 2022. Vol. 8, num. 1, p. 105. DOI : 10.1038/s41378-022-00440-9.

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A Resonant Graphene NEMS Vibrometer

D. Moreno-Garcia; X. Fan; A. D. Smith; M. C. Lemme; V. Messina et al. 

Small. 2022.  p. 2201816. DOI : 10.1002/smll.202201816.

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Study of Thin Film LiNbO3 Laterally Excited Bulk Acoustic Resonators

S. Yandrapalli; S. E. K. Eroglu; V. Plessky; H. B. Atakan; L. G. Villanueva 

Journal Of Microelectromechanical Systems. 2022. DOI : 10.1109/JMEMS.2022.3143354.

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2021

Journal Articles

Balancing of Coupled Piezoelectric NEMS Resonators

J. Fan; J. Lemonde; D. Maillard; M. Kaeppeli; L. G. Villanueva 

Frontiers In Mechanical Engineering-Switzerland. 2021. Vol. 7, p. 722538. DOI : 10.3389/fmech.2021.722538.

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A formula for the admittance of laterally excited bulk wave resonators (XBARs)

V. Plessky; S. Kuecuek; S. Yandrapalli; L. G. Villanueva 

Electronics Letters. 2021. Vol. 57, num. 20, p. 773 – 775. DOI : 10.1049/ell2.12261.

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Design and fabrication of a vigorous “cavitation-on-a-chip” device with a multiple microchannel configuration

F. Rokhsar Talabazar; M. Jafarpour; M. Zuvin; H. Chen; M. T. Gevari et al. 

Microsystems & Nanoengineering. 2021. Vol. 7, num. 1, p. 44. DOI : 10.1038/s41378-021-00270-1.

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Avoiding transduction-induced heating in suspended microchannel resonators using piezoelectricity

D. Maillard; A. De Pastina; A. M. Abazari; L. G. Villanueva 

Microsystems & Nanoengineering. 2021. Vol. 7, num. 1, p. 34. DOI : 10.1038/s41378-021-00254-1.

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On cavitation inception and cavitating flow patterns in a multi-orifice microfluidic device with a functional surface

A. H. Shafaghi; F. R. Talabazar; M. Zuvin; M. T. Gevari; L. G. Villanueva et al. 

Physics Of Fluids. 2021. Vol. 33, num. 3, p. 032005. DOI : 10.1063/5.0037736.

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2020

Journal Articles

Frequency fluctuations in nanomechanical silicon nitride string resonators

P. Sadeghi; A. Demir; L. G. Villanueva; H. Kaehler; S. Schmid 

Physical Review B. 2020. Vol. 102, num. 21, p. 214106. DOI : 10.1103/PhysRevB.102.214106.

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On the effect of linear feedback and parametric pumping on a resonator’s frequency stability

Z. Mohammadi; T. L. Heugel; J. M. L. Miller; D. D. Shin; H-K. Kwon et al. 

New Journal Of Physics. 2020. Vol. 22, num. 9, p. 093049. DOI : 10.1088/1367-2630/abb1dd.

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Fabrication of clamped-clamped beam resonators with embedded fluidic nanochannel

D. Scaiola; S. Stassi; R. Calmo; D. Maillard; S. S. G. Varricchio et al. 

Microelectronic Engineering. 2020. Vol. 231, p. 111395. DOI : 10.1016/j.mee.2020.111395.

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Evidence of Smaller 1/F Noise in AlScN-Based Oscillators Compared to AlN-Based Oscillators

A. Lozzi; M. Liffredo; E. T-T. Yen; J. Segovia-Fernandez; L. G. Villanueva 

Journal Of Microelectromechanical Systems. 2020. Vol. 29, num. 3, p. 306 – 312. DOI : 10.1109/JMEMS.2020.2988354.

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Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications

X. Fan; A. D. Smith; F. Forsberg; S. Wagner; S. Schroder et al. 

Microsystems & Nanoengineering. 2020. Vol. 6, num. 1, p. 17. DOI : 10.1038/s41378-019-0128-4.

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Large Suspended Monolayer and Bilayer Graphene Membranes with Diameter up to 750 mu m

S. A. Akbari; V. Ghafarinia; T. Larsen; M. M. Parmar; L. G. Villanueva 

Scientific Reports. 2020. Vol. 10, num. 1, p. 6426. DOI : 10.1038/s41598-020-63562-y.

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Frequency-scalable fabrication process flow for lithium niobate based Lamb wave resonators

M. Faizan; L. G. Villanueva 

Journal Of Micromechanics And Microengineering. 2020. Vol. 30, num. 1, p. 015008. DOI : 10.1088/1361-6439/ab5b7b.

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Engineered Lateral Roughness Element Implementation and Working Fluid Alteration to Intensify Hydrodynamic Cavitating Flows on a Chip for Energy Harvesting

M. T. Gevari; A. H. Shafaghi; G. Villanueva; M. Ghorbani; A. Koşar 

Micromachines. 2020. Vol. 11, num. 1, p. 49. DOI : 10.3390/mi11010049.

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Reviews

Directed Self-Assembly of Block Copolymers for the Fabrication of Functional Devices

C. Pinto-Gomez; F. Perez-Murano; J. Bausells; L. G. Villanueva; M. Fernandez-Regulez 

Polymers. 2020. Vol. 12, num. 10, p. 2432. DOI : 10.3390/polym12102432.

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Suspended micro/nano channel resonators: a review

A. De Pastina; L. G. Villanueva 

Journal Of Micromechanics And Microengineering. 2020. Vol. 30, num. 4, p. 043001. DOI : 10.1088/1361-6439/ab6df1.

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2019

Journal Articles

Shape memory polymer resonators as highly sensitive uncooled infrared detectors

U. Adiyan; T. Larsen; J. J. Zárate; L. G. Villanueva; H. Shea 

Nature Communications. 2019. Vol. 10, p. 4518. DOI : 10.1038/s41467-019-12550-6.

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On “Cavitation on Chip” in Microfluidic Devices With Surface and Sidewall Roughness Elements

M. Ghorbani; G. Deprem; E. Ozdemir; A. R. Motezakker; L. G. Villanueva et al. 

Journal Of Microelectromechanical Systems. 2019. Vol. 28, num. 5, p. 890 – 899. DOI : 10.1109/JMEMS.2019.2925541.

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5 GHz Band n79 wideband microacoustic filter using thin lithium niobate membrane

P. J. Turner; B. Garcia; V. Yantchev; G. Dyer; S. Yandrapalli et al. 

Electronics Letters. 2019. Vol. 55, num. 17, p. 942 – 943. DOI : 10.1049/el.2019.1658.

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Optimum ratio of hydrophobic to hydrophilic areas of biphilic surfaces in thermal fluid systems involving boiling

A. R. Motezakker; A. K. Sadaghiani; S. Celik; T. Larsen; L. G. Villanueva et al. 

International Journal Of Heat And Mass Transfer. 2019. Vol. 135, p. 164 – 174. DOI : 10.1016/j.ijheatmasstransfer.2019.01.139.

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Modular interface and experimental setup for in-vacuum operation of microfluidic devices

D. Maillard; A. De Pastina; T. Larsen; L. G. Villanueva 

Review of Scientific Instruments. 2019. Vol. 90, num. 4, p. 045006. DOI : 10.1063/1.5088946.

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Engineered acoustic mismatch for anchor loss control in contour mode resonators

A. Lozzi; A. De Pastina; E. T-T. Yen; L. G. Villanueva 

Applied Physics Letters. 2019. Vol. 114, num. 10, p. 103502. DOI : 10.1063/1.5086156.

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Effect of AlN seed layer on crystallographic characterization of piezoelectric AlN

K. M. Howell; W. Bashir; A. De Pastina; R. Matloub; P. Muralt et al. 

Journal of Vacuum Science & Technology A. 2019. Vol. 37, num. 2, p. 021504. DOI : 10.1116/1.5082888.

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5 GHz laterally-excited bulk-wave resonators (XBARs) based on thin platelets of lithium niobate

V. Plessky; S. Yandrapalli; P. J. Turner; L. G. Villanueva; J. Koskela et al. 

Electronics Letters. 2019. Vol. 55, num. 2, p. 98 – 100. DOI : 10.1049/el.2018.7297.

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Al0.83Sc0.17N Contour-Mode Resonators With Electromechanical Coupling in Excess of 4.5%

A. Lozzi; E. T-T. Yen; P. Muralt; L. G. Villanueva 

IEEE Transactions On Ultrasonics Ferroelectrics And Frequency Control. 2019. Vol. 66, num. 1, p. 146 – 153. DOI : 10.1109/TUFFC.2018.2882073.

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2018

Journal Articles

Intensifying cavitating flows in microfluidic devices with poly(vinyl alcohol) (PVA) microbubbles

M. Ghorbani; H. Chen; L. G. Villanueva; D. Grishenkov; A. Kosar 

Physics Of Fluids. 2018. Vol. 30, num. 10, p. 102001. DOI : 10.1063/1.5051606.

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Observation of a phononic quadrupole topological insulator

M. Serra-Garcia; V. Peri; R. Susstrunk; O. Bilal; T. Larsen et al. 

Nature. 2018. Vol. 555, num. 7696, p. 342 – 345. DOI : 10.1038/nature25156.

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Hydrodynamic cavitation in microfluidic devices with roughened surfaces

M. Ghorbani; A. Sadaghiani; L. Villanueva; A. Kosar 

Journal of Micromechanics and Microengineering. 2018. Vol. 28, num. 7, p. 075016. DOI : 10.1088/1361-6439/aab9d0.

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Fabrication of suspended microchannel resonators with integrated piezoelectric transduction

A. De Pastina; D. Maillard; L. Villanueva 

Microelectronic Engineering. 2018. Vol. 192, p. 83 – 87. DOI : 10.1016/j.mee.2018.02.011.

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Reviews

Effective quality factor tuning mechanisms in micromechanical resonators

J. M. L. Miller; A. Ansari; D. B. Heinz; Y. Chen; I. B. Flader et al. 

Applied Physics Reviews. 2018. Vol. 5, num. 4, p. 041307. DOI : 10.1063/1.5027850.

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2017

Journal Articles

Asymmetrically coupled resonators for mass sensing

S. Marquez; M. Alvarez; J. A. Plaza; L. G. Villanueva; C. Dominguez et al. 

Applied Physics Letters. 2017. Vol. 111, num. 11, p. 113101. DOI : 10.1063/1.5003023.

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Position and mode dependent optical detection back-action in cantilever beam resonators

T. Larsen; S. Schmid; S. Dohn; J. E. Sader; A. Boisen et al. 

Journal Of Micromechanics And Microengineering. 2017. Vol. 27, num. 3, p. 035006. DOI : 10.1088/1361-6439/aa591e.

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Three-Dimensional Nano-Acoustic Bragg Reflectors for CMOS Embedded NEMS

S. Yandrapalli; D. Ruffieux; L. G. Villanueva 

IEEE Transactions On Nanotechnology. 2017. Vol. 16, num. 4, p. 653 – 658. DOI : 10.1109/Tnano.2017.2701006.

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Energy Harvesting in Microscale with Cavitating Flows

M. Ghorbani; A. Mohammadi; A. R. Motezakker; L. G. Villanueva; Y. Leblebici et al. 

ACS Omega. 2017. Vol. 2, num. 10, p. 6870 – 6877. DOI : 10.1021/acsomega.7b01204.

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2016

Journal Articles

Frequency fluctuations in silicon nanoresonators

M. Sansa; E. Sage; E. C. Bullard; M. Gely; T. Alava et al. 

Nature Nanotechnology. 2016. Vol. 11, num. 6, p. 552 – 558. DOI : 10.1038/Nnano.2016.19.

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2015

Journal Articles

Modelling the Size Effects on the Mechanical Properties of Micro/Nano Structures

A. Abazari; S. Safavi; G. Rezazadeh; G. Villanueva 

Sensors. 2015. Vol. 15, num. 11, p. 28543 – 28562. DOI : 10.3390/s151128543.

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Reviews

Resistless nanofabrication by stencil lithography: A review

O. Vazquez-Mena; L. Gross; S. Xie; L. G. Villanueva; J. Brugger 

Microelectronic Engineering. 2015. Vol. 132, p. 236 – 254. DOI : 10.1016/j.mee.2014.08.003.

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2014

Journal Articles

Optical detection of radio waves through a nanomechanical transducer

T. Bagci; A. Simonsen; S. Schmid; L. G. Villanueva; E. Zeuthen et al. 

Nature. 2014. Vol. 507, num. 7490, p. 81 – 85. DOI : 10.1038/nature13029.

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Single-layer graphene on silicon nitride micromembrane resonators

S. Schmid; T. Bagci; E. Zeuthen; J. M. Taylor; P. K. Herring et al. 

Journal of Applied Physics. 2014. Vol. 115, num. 5, p. 054513. DOI : 10.1063/1.4862296.

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Evidence of Surface Loss as Ubiquitous Limiting Damping Mechanism in SiN Micro- and Nanomechanical Resonators

L. G. Villanueva; S. Schmid 

Physical Review Letters. 2014. Vol. 113, num. 22, p. 227201. DOI : 10.1103/PhysRevLett.113.227201.

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Phase Synchronization of Two Anharmonic Nanomechanical Oscillators

M. H. Matheny; M. Grau; L. G. Villanueva; R. B. Karabalin; M. C. Cross et al. 

Physical Review Letters. 2014. Vol. 112, num. 1, p. 014101. DOI : 10.1103/PhysRevLett.112.014101.

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Demonstration of suppressed phonon tunneling losses in phononic bandgap shielded membrane resonators for high-Q optomechanics

Y. Tsaturyan; A. Barg; A. Simonsen; L. G. Villanueva; S. Schmid et al. 

Optics Express. 2014. Vol. 22, num. 6, p. 6810 – 6821. DOI : 10.1364/OE.22.006810.

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2013

Journal Articles

Photothermal Analysis of Individual Nanoparticulate Samples Using Micromechanical Resonators

T. Larsen; S. Schmid; L. G. Villanueva; A. Boisen 

ACS Nano. 2013. Vol. 7, num. 7, p. 6188 – 6193. DOI : 10.1021/nn402057f.

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Surpassing Fundamental Limits of Oscillators Using Nonlinear Resonators

L. G. Villanueva; E. Kenig; R. B. Karabalin; M. H. Matheny; R. Lifshitz et al. 

Physical Review Letters. 2013. Vol. 110, num. 17, p. 177208. DOI : 10.1103/Physrevlett.110.177208.

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Nonlinearity in nanomechanical cantilevers

L. G. Villanueva; R. B. Karabalin; M. H. Matheny; D. Chi; J. E. Sader et al. 

Physical Review B. 2013. Vol. 87, num. 2, p. 024304. DOI : 10.1103/Physrevb.87.024304.

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Nonlinear Mode-Coupling in Nanomechanical Systems

M. H. Matheny; L. G. Villanueva; R. B. Karabalin; J. E. Sader; M. L. Roukes 

Nano Letters. 2013. Vol. 13, num. 4, p. 1622 – 1626. DOI : 10.1021/Nl400070e.

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Resistless Fabrication of Nanoimprint Lithography (NIL) Stamps Using Nano-Stencil Lithography

L. G. Villanueva; O. Vazquez-Mena; C. Martin-Olmos; A. V. Savu; K. Sidler et al. 

Micromachines. 2013. Vol. 4, p. 370 – 377. DOI : 10.3390/mi4040370.

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Fluid-mediated parallel self-assembly of polymeric micro-capsules for liquid encapsulation and release

L. Jacot-Descombes; C. Martin-Olmos; M. R. Gullo; V. J. Cadarso; G. Mermoud et al. 

Soft Matter. 2013. Vol. 9, p. 9931 – 9938. DOI : 10.1039/c3sm51923f.

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2012

Journal Articles

Optimal operating points of oscillators using nonlinear resonators

E. Kenig; M. C. Cross; L. G. Villanueva; R. B. Karabalin; M. H. Matheny et al. 

Physical Review E. 2012. Vol. 86, num. 5, p. 056207. DOI : 10.1103/Physreve.86.056207.

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High-Resolution Resistless Nanopatterning on Polymer and Flexible Substrates for Plasmonic Biosensing Using Stencil Masks

O. Vazquez Mena; T. Sannomiya; M. Tosun; G. Villanueva; A. V. Savu et al. 

ACS Nano. 2012. Vol. 6, num. 6, p. 5474 – 5481. DOI : 10.1021/nn301358n.

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Ultra-low power hydrogen sensing based on a palladium-coated nanomechanical beam resonator

J. Henriksson; L. G. Villanueva; J. Brugger 

Nanoscale. 2012. Vol. 4, num. 16, p. 5059 – 5064. DOI : 10.1039/C2NR30639E.

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Passive Phase Noise Cancellation Scheme

E. Kenig; M. C. Cross; R. Lifshitz; R. B. Karabalin; L. G. Villanueva et al. 

Physical Review Letters. 2012. Vol. 108, num. 26, p. 264102. DOI : 10.1103/Physrevlett.108.264102.

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Highly ordered palladium nanodot patterns for full concentration range hydrogen sensing

L. G. Villanueva; F. Fargier; T. Kiefer; M. Ramonda; J. Brugger et al. 

Nanoscale. 2012. Vol. 4, p. 1964 – 1967. DOI : 10.1039/C2NR11983H.

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Compliant membranes improve resolution in full-wafer micro/nanostencil lithography

K. Sidler; G. Villanueva; O. Vazquez-Mena; V. Savu; J. Brugger 

Nanoscale. 2012. Vol. 4, p. 773 – 778. DOI : 10.1039/c2nr11609j.

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All-stencil transistor fabrication on 3D silicon substrates

G. Villanueva; O. Vazquez-Mena; C. Martin-Olmos; V. Savu; K. Sidler et al. 

Journal of Micromechanics and Microengineering. 2012. Vol. 22, num. 9, p. 095022. DOI : 10.1088/0960-1317/22/9/095022.

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Conductivity of SU-8 Thin Films through Atomic Force Microscopy Nano-Patterning

C. Martin-Olmos; G. Villanueva; P. van der Wal; A. Llobera; N. de Rooij et al. 

Advanced Functional Materials. 2012. Vol. 22, num. 7, p. 1482 – 1488. DOI : 10.1002/adfm.201102789.

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Fast on-wafer electrical, mechanical, and electromechanical characterization of piezoresistive cantilever force sensors

G. Tosolini; L. G. Villanueva; F. Perez-Murano; J. Bausells 

Review of Scientific Instruments. 2012. Vol. 83, num. 1, p. 015002. DOI : 10.1063/1.3673603.

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Stress-Induced Variations in the Stiffness of Micro- and Nanocantilever Beams

R. B. Karabalin; L. G. Villanueva; M. H. Matheny; J. E. Sader; M. L. Roukes 

Physical Review Letters. 2012. Vol. 108, num. 23, p. 236101. DOI : 10.1103/Physrevlett.108.236101.

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2011

Journal Articles

Localized Ion Implantation Through Micro/Nanostencil Masks

G. Villanueva; C. Martin Olmos; O. Vazquez Mena; J. Montserrat; P. Langlet et al. 

IEEE Transactions on Nanotechnology. 2011. Vol. 10, num. 5, p. 940 – 946. DOI : 10.1109/TNANO.2010.2090171.

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50 nm thick AlN film-based piezoelectric cantilevers for gravimetric detection

P. Ivaldi; J. Abergel; M. H. Matheny; L. G. Villanueva; R. B. Karabalin et al. 

Journal of Micromechanics and Microengineering. 2011. Vol. 21, num. 8, p. 085023. DOI : 10.1088/0960-1317/21/8/085023.

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A Nanoscale Parametric Feedback Oscillator

L. G. Villanueva; R. B. Karabalin; M. H. Matheny; E. Kenig; M. C. Cross et al. 

Nano Letters. 2011. Vol. 11, num. 11, p. 5054 – 5059. DOI : 10.1021/Nl2031162.

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Reliable and Improved Nanoscale Stencil Lithography by Membrane Stabilization, Blurring and Clogging Corrections

O. Vazquez-Mena; K. Sidler; V. Savu; C. W. Park; L. G. Villanueva et al. 

IEEE Transactions on Nanotechnology. 2011. Vol. 10, num. 2, p. 352 – 357. DOI : 10.1109/TNANO.2010.2042724.

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Metallic Nanodot Arrays by Stencil Lithography for Plasmonic Biosensing Applications

O. Vazquez-Mena; T. Sannomiya; L. G. Villanueva; J. Voros; J. Brugger 

ACS Nano. 2011. Vol. 5, num. 2, p. 844 – 853. DOI : 10.1021/nn1019253.

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2010

Journal Articles

Mechanically tuneable microoptical structure based on PDMS

V. J. Cadarso; A. Llobera; G. Villanueva; J. A. Plaza; J. Brugger et al. 

Sensors and Actuators a-Physical. 2010. Vol. 162, num. 2, p. 260 – 266. DOI : 10.1016/j.sna.2010.02.025.

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Large arrays of chemo-mechanical nanoswitches for ultralow-power hydrogen sensing

T. Kiefer; A. Salette; G. Villanueva; J. Brugger 

Journal of Micromechanics and Microengineering. 2010. Vol. 20, p. 105019. DOI : 10.1088/0960-1317/20/10/105019.

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Sharp High-Aspect-Ratio AFM Tips Fabricated by a Combination of Deep Reactive Ion Etching and Focused Ion Beam Techniques

D. Caballero; G. Villanueva; J. A. Plaza; C. A. Mills; J. Samitier et al. 

Journal of Nanoscience and Nanotechnology. 2010. Vol. 10, num. 1, p. 497 – 501. DOI : 10.1166/jnn.2010.1737.

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Stenciled conducting bismuth nanowires

V. Savu; S. Neuser; G. Villanueva; O. Vazquez-Mena; K. Sidler et al. 

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 2010. Vol. 28, num. 1, p. 169 – 172. DOI : 10.1116/1.3292630.

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The transition in hydrogen sensing behavior in non-continuous palladium films

T. Kiefer; G. Villanueva; F. Fargier; F. Favier; J. Brugger 

Applied Physics Letters. 2010. Vol. 97, num. 12, p. 121911. DOI : 10.1063/1.3491263.

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Fast and robust hydrogen sensors based on discontinuous palladium films on polyimide, fabricated on a wafer scale

T. Kiefer; G. Villanueva; F. Fargier; F. G. Favier; J. Brugger 

Nanotechnology. 2010. Vol. 21, num. 50, p. 505501. DOI : 10.1088/0957-4484/21/50/505501.

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2009

Journal Articles

Microcollimator for Micrometer-Wide Stripe Irradiation of Cells Using 20–30 keV X Rays

K. Pataky; L. G. Villanueva; A. Liani; O. Zgheib; N. Jenkins et al. 

Radiation Research. 2009. Vol. 172, num. 2, p. 252 – 259. DOI : 10.1667/RR1483.1.

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Conduction in rectangular quasi-one-dimensional and two-dimensional random resistor networks away from the percolation threshold

T. Kiefer; G. Villanueva; J. Brugger 

Physical Review E. 2009. Vol. 80, num. 2, p. 021104. DOI : 10.1103/Physreve.80.021104.

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Analysis of the blurring in stencil lithography

O. Vazquez-Mena; L. G. Villanueva; V. Savu; K. Sidler; P. Langlet et al. 

Nanotechnology. 2009. Vol. 20, num. 41, p. 415303. DOI : 10.1088/0957-4484/20/41/415303.

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Stress and aging minimization in photoplastic AFM probes

C. Martin; A. Llobera; G. Villanueva; A. Voigt; G. Gruetzner et al. 

Microelectronic Engineering. 2009. Vol. 86, num. 4-6, p. 1226 – 1229. DOI : 10.1016/j.mee.2008.12.033.

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2008

Journal Articles

Crystalline silicon cantilevers for piezoresistive detection of biomolecular forces

G. Villanueva; J. A. Plaza; J. Montserrat; F. Perez-Murano; J. Bausells 

Microelectronic Engineering. 2008. Vol. 85, num. 5-6, p. 1120 – 1123. DOI : 10.1016/j.mee.2008.01.082.

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A single nanotrench in a palladium microwire for hydrogen detection

T. Kiefer; F. Favier; O. Vazquez; G. Villanueva; J. Brugger 

Nanotechnology. 2008. Vol. 19, num. 12, p. 125502. DOI : 10.1088/0957-4484/19/12/125502.

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Detection of bacteria based on the thermomechanical noise of a nanomechanical resonator: origin of the response and detection limits

D. Ramos; J. Tamayo; J. Mertens; M. Calleja; G. Villanueva et al. 

Nanotechnology. 2008. Vol. 19, num. 3, p. 035503. DOI : 10.1088/0957-4484/19/03/035503.

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3-D modulable PDMS-based microlens system

V. J. Cadarso; A. Llobera; G. Villanueva; C. Dominguez; J. A. Plaza 

Optics Express. 2008. Vol. 16, num. 7, p. 4918 – 4929. DOI : 10.1364/OE.16.004918.

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