Conference Contributions

2024

Conference Papers

Project-Based Learning Approach for an Engineering Course: Challenges and Learnings of Teaching Transversal Skills

Y. Jalali; I. Capdevila; J. Paik 

2024. 52 Conference of the European Society for Engineering, Lausanne, Switzerland, 2024-09-02 – 2024-09-05. p. 1569 – 1581. DOI : 10.5281/zenodo.14256919.

CURRICULUM DEVELOPMENT AND EMERGING CURRICULUM MODELS IN ENGINEERING

J. E. Mitchell; I. Capdevila; S. Economides; A. Gwynne-Evans; M. Laperrouza et al. 

2024. 52 Conference of the European Society for Engineering, Lausanne, Switzerland, 2024-09-02 – 2024-09-05. p. 2741 – 2746. DOI : 10.5281/zenodo.14260987.

Optical Ring Resonators in Sputtered Aluminum Nitride on Insulator for Integrated Photonic MEMS

J. Spettel; N. Andrianov; F. Dubois; H. Furci; M. S. Azeem et al. 

2024. International Conference on Optical MEMS and Nanophotonics, San Sebastian, Spain, 2024-07-28 – 2024-08-01. DOI : 10.1109/OMN61224.2024.10685232.

Periodic Structure of Narrow FBARs Operating on SH1 Mode in LN Membrane Solidly Mounted on SiC Substrate

V. Plessky; N. Zhang; N. Xu; S. E. Kucuk; L. G. Villanueva 

2024. IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium, Taipei, Taiwan, Province of China, 2024-09-22 – 2024-09-26. DOI : 10.1109/UFFC-JS60046.2024.10794067.

2023

Conference Papers

18 GHz Frequency Comb in the UV via On-Chip Cascaded Harmonics

M. Ludwig; F. Ayhan; T. Voumard; T. Wildi; M. A. Gaafar et al. 

2023. CLEO: Science and Innovations, San Jose, United States, 2023-05-07 – 2023-05-12. DOI : 10.1364/CLEO_AT.2023.STu3L.2.

A 3D-Printed Functional Mems Accelerometer

S. Pagliano; D. E. Marschner; D. Maillard; N. Ehrmann; G. Stemme et al. 

2023. 36th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Munich, GERMANY, Jan 15-19, 2023. p. 594 – 597. DOI : 10.1109/MEMS49605.2023.10052385.

18 GHz Ultraviolet Astrocomb via Chip-Integrated Harmonic Generation

M. Ludwig; F. Ayhan; T. Voumard; T. Wildi; M. A. Gaafar et al. 

2023. European Quantum Electronics Conference, Munich, Germany, 2023-06-26 – 2023-06-30. p. 58363 – 58408.

A 5G n77 Filter Using Shear Bulk Mode Resonator With Crystalline X-cut Lithium Niobate Films

F. Hartmann; S. E. K. Eroglu; E. Navarro-Gesse; C. Collado; J. Mateu et al. 

2023. 2nd IEEE-MTT-S International Microwave Filter Workshop (IMFW), Cocoa Beach, FL, FEB 21-23, 2024. p. 78 – 80. DOI : 10.1109/IMFW59690.2024.10477114.

2022

Conference Papers

Optical Properties of Aluminium Nitride on Insulator for Integrated Photonics

J. Spettel; M. Liffredo; T. Cassese; H. Furci; F. Dubois et al. 

2022. European Conference on Optical Communication (ECOC), ELECTR NETWORK, Sep 18-22, 2022.

Optimization of Edge Profile for Improved Anti-Resonance Quality Factor in Lithium Niobate SH0 Resonators

S. Stettler; L. G. Villanueva 

2022. IEEE International Ultrasonics Symposium (IUS), Venice, ITALY, Oct 10-13, 2022. DOI : 10.1109/IUS54386.2022.9957511.

2021

Conference Papers

Fully Reconfigurable Coupled-Resonator Optical Waveguides (CROWs) with 10 nW Static Power MEMS

Y. J. Park; D. U. Kim; D. Y. Kim; M. S. Hong; A. Y. Takabayashi et al. 

2021. Conference on Lasers and Electro-Optics (CLEO), ELECTR NETWORK, May 09-14, 2021. DOI : 10.1364/CLEO_SI.2021.STh1Q.5.

Thin Film Devices For 5G Communications

S. Yandrapalli; M. Liffredo; M. Faizan; S. Kucuk; D. Maillard et al. 

2021. 34th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), ELECTR NETWORK, Jan 25-29, 2021. p. 450 – 453. DOI : 10.1109/MEMS51782.2021.9375400.

Proof Of Concept Of A Graphene-Based Resonant Accelerometer

D. Moreno; X. Fan; F. Niklaus; L. G. Villanueva 

2021. 34th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), ELECTR NETWORK, Jan 25-29, 2021. p. 838 – 840. DOI : 10.1109/MEMS51782.2021.9375187.

16-Core Recirculating Programmable Si Photonic MEMS

D. Y. Kim; Y. J. Park; D. U. Kim; M. S. Hong; A. Y. Takabayashi et al. 

2021. Conference on Lasers and Electro-Optics (CLEO), ELECTR NETWORK, May 09-14, 2021. DOI : 10.1364/CLEO_SI.2021.STh1Q.6.

Towards a N77 Electroacoustic Filter Using Thin Films of Crystalline Y-cut Lithium Niobate

S. Yandrapalli; S. E. K. Eroglu; J. Mateu; C. Collado; V. Plessky et al. 

2021. IEEE MTT-S International Microwave Filter Workshop (IMFW), Perugia, ITALY, Nov 17-19, 2021. p. 112 – 114. DOI : 10.1109/IMFW49589.2021.9642292.

Study on the Performances of AlScN based SAW/BAW Hybrid Resonators A Parametric Analysis of Acoustic Wave Resonators with Large Figure of Merit

G. Lang; S. Yandrapalli; G. Villanueva 

2021. Joint Conference of the European-Frequency-and-Time-Forum / IEEE International Frequency Control Symposium (EFTF/IFCS), ELECTR NETWORK, Jul 07-17, 2021. DOI : 10.1109/EFTF/IFCS52194.2021.9604342.

FABRICATION AND ANALYSIS OF THIN FILM LITHUM NIOBATE RESONATORS FOR 5GHz FREQUENCY AND LARGE k(t)(2) APPLICATIONS

S. Yandrapalli; S. E. Kucuk; B. Atakan; V. Plessky; L. G. Villanueva 

2021. 34th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), ELECTR NETWORK, Jan 25-29, 2021. p. 967 – 969. DOI : 10.1109/MEMS51782.2021.9375401.

Resonance Frequency Dependence Of A1 Lamb Mode On The Pitch Of The Electrode Structure

V. Plessky; S. Yandrapalli; S. Kucuk; L. G. Villanueva 

2021. Joint Conference of the European-Frequency-and-Time-Forum / IEEE International Frequency Control Symposium (EFTF/IFCS), ELECTR NETWORK, Jul 07-17, 2021. DOI : 10.1109/EFTF/IFCS52194.2021.9604331.

2020

Conference Papers

Comb Transducer for Generation of SH0 Mode in Crystalline Piezoelectric Membrane

V. Plessky; J. Koskela; S. Yandrapalli 

2020. IEEE International Ultrasonics Symposium (IEEE IUS), Las Vegas, NV, Sep 07-11, 2020. DOI : 10.1109/IUS46767.2020.9251395.

Attenuation of Lamb Modes and SH Waves near cut-off Frequencies

V. Plessky; J. Koskela; S. Yandrapalli 

2020. Joint Conference of the IEEE International Frequency Control Symposium (IEEE IFCS) and IEEE International Symposium on Applications of Ferroelectrics (IEEE IFAS), ELECTR NETWORK, Jul 19-23, 2020. DOI : 10.1109/IFCS-ISAF41089.2020.9234848.

2019

Conference Papers

Acoustic Actuation Of Suspended Graphene For Linear Excitation Of 2D Nems

M. Faizan; M. M. Parmar; P. Feng; L. G. Villanueva 

2019. 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII (TRANSDUCERS and EUROSENSORS), Berlin, GERMANY, Jun 23-27, 2019. p. 2380 – 2383. DOI : 10.1109/TRANSDUCERS.2019.8808246.

Laterally excited bulk wave resonators (XBARs) based on thin Lithium Niobate platelet for 5GHz and 13 GHz filters

V. Plessky; S. Yandrapalli; P. J. Turner; L. G. Villanueva; J. Koskela et al. 

2019. IEEE-MTT-S International Microwave Symposium (IMS), Boston, MA, Jun 02-07, 2019. p. 512 – 515. DOI : 10.1109/MWSYM.2019.8700876.

Phase Noise Measurements Of Aluminum Scandium Nitride Oscillators

A. Lozzi; M. Liffredo; E. T-T. Yen; J. Segovia-Fernandez; L. G. Villanueva 

2019. 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII (TRANSDUCERS and EUROSENSORS), Berlin, GERMANY, Jun 23-27, 2019. p. 909 – 912. DOI : 10.1109/TRANSDUCERS.2019.8808738.

Analysis of XBAR resonance and higher order spurious modes

S. Yandrapalli; V. Plessky; J. Koskela; V. Yantchev; P. Turner et al. 

2019. IEEE International Ultrasonics Symposium (IUS), Glasgow, ENGLAND, Oct 06-09, 2019. p. 185 – 188. DOI : 10.1109/ULTSYM.2019.8925993.

Fabrication Of Lithium Niobate Bulk Acoustic Resonator For 5G Filters

M. Faizan; A. De Pastina; S. Yandrapalli; P. J. Turner; R. B. Hammond et al. 

2019. 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII (TRANSDUCERS and EUROSENSORS), Berlin, GERMANY, Jun 23-27, 2019. p. 1752 – 1755. DOI : 10.1109/TRANSDUCERS.2019.8808179.

Talks

Temperature fluctuations in M/NEMS

T. Larsen; G. Villanueva 

2nd Frontiers in Nanoelectromechanical Systems (FNS), Palm Springs, February 2019.

2018

Posters

Molybdenum Disulfide (MoS2) Nanoelectromechanical Resonators With On-Chip Aluminum Nitride (AlN) Piezoelectric Excitation

H. Jia; X-Q. Zheng; M. Faizan; T. Larsen; G. Villanueva et al. 

The 31st IEEE International Conference on Micro Electro Mechanical Systems, Belfast, Ireland, 21-25 January, 2018.

Talks

Piezoelectric Suspended Microchannel Resonators (SMRs)

A. De Pastina; D. Maillard; L. G. Villanueva 

15th International Workshop on Nanomechanical Cantilever Sensors (NMC), Seoul, June 2018.

2017

Conference Papers

Piezoelectric Nanoelectromechanical Systems

K. Howell; A. De Pastina; A. Lozzi; T. Larsen; M. Faizan et al. 

2017. Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, Taiwan, June 18-22, 2017. DOI : 10.1109/TRANSDUCERS.2017.7994010.

Release area confinement in Contour Mode Resonators

A. Lozzi; A. De Pastina; L. G. Villanueva; E. T-T. Yen 

2017. IEEE International Ultrasonics Symposium (IUS), Washington, DC, SEP 06-09, 2017. DOI : 10.1109/ULTSYM.2017.8092127.

Posters

Fabrication of 2D Material Based NEMS Resonators

A. H. Tran; T. Larsen 

Dielectric Transduction of NEMS

K. Howell 

2017 NAMIS International Workshop, Freiburg, September 2017.

Energy dissipation in Suspended Microchannel Resonators as function of channel off-axis placement

M. Lucena Couto; A. De Pastina 

Nano Fluidics and Nano Mechanics Workshop (NFNM) 2017, Turin, Italy, 14 – 15 September, 2017.

FEM modeling of energy dissipation in SMRs

A. Gerbino; A. De Pastina; F. Gallaire; C. Meinhart 

Nano Fluidics and Nano Mechanics Workshop (NFNM) 2017, Turin, Italy, 14 – 15 September, 2017.

Experimental setup and o-ring based μfluidic interface for suspended microchannel resonators

D. Maillard; A. De Pastina 

Nano Fluidics and Nano Mechanics Workshop (NFNM) 2017, Turin, Italy, 14 – 15 September, 2017.

Assembly of Silicon Nitride Channels

T. Larsen; C. C. Moreno; O. Vazquez-Mena 

Micro and Nano Engineering (MNE) 2017, Braga, Portugal, 18 – 22 September, 2018.

Talks

Frequency stability of PZE actuated suspended micro-channel resonators

A. De Pastina 

NanoFluidics and NanoMechanics Workshop, Turin, September 14-15, 2017.

Nonlinearities in NEMS

G. Villanueva; R. Karabalin; M. Matheny; R. Lifshitz; M. Cross et al. 

2017 IEEE International Ultrasonics Symposium (IUS), Washington DC, September 2017.

Nonlinearities and Frequency Stability in NEMS

G. Villanueva; R. Karabalin; M. Matheny; E. Kenig; R. Lifshitz et al. 

14th International Workshop on NanoMechanical Sensors, Kona, Hawaii, April 2017.

Graphene Based Membrane Resonators

T. Larsen; F. Fantino; S. Stassi; A. Tran; C. Ricciardi et al. 

Nano Fluidics and Nano Mechanics Workshop (NFNM) 2017, Turin, Italy, 14 – 15 September, 2017.

2016

Conference Papers

Anchor Losses Dependence on Electrode Material in Contour Mode Resonators

A. Lozzi; E. T. T. Yen; G. Villanueva 

2016. 2016 IEEE International Frequency Control Symposium, New Orleans, Luisiana, USA, May 9-12, 2016. p. 100 – 103. DOI : 10.1109/FCS.2016.7546736.

Posters

50 nm thick AlN Films for Actuation and Detection of Nanoscale Resonators

K. Howell; W. Bashir; A. De Pastina; R. Matloub Aghdam; P. Muralt et al. 

42nd Micro and Nano Engineering Conference, Vienna, Austria, September 19-23, 2016.

Parylene-Based Hollow Nanomechanical Resonators For Bioapplications

A. De Pastina; A. N. D. Aupée; T. Larsen; G. Villanueva 

42nd Micro and Nano Engineering Conference, Vienna, Austria, September 19-23, 2016.

Graphene Based Mechanical Resonators Fabricated via Direct Dry Transfer

T. Larsen; P. R. Whelan; M. Di Gisi; P. Bøggildb; G. Villanueva 

42nd Micro and Nano Engineering Conference, Vienna, Austria, September 19-23, 2016.

Talks

3D FEM dissipation model of suspended micro channel resonators

A. De Pastina; A. Fani; F. Gallaire; G. Villanueva 

5th Micro and Nano Flows Conference (MNF 2016), Milan, Italy, September 11-14, 2016.

2015

Posters

Fabrication of suspended hollow micro-resonators integrated with PZE electrodes

A. De Pastina; G. Villanueva 

18th Conference in NanoBioTech, Montreux, November 2015.

Fabrication of suspended micro-resonator integrated with PZE electrodes

A. De Pastina; G. Villanueva 

NanoBioTech-Montreux, Montreux, Switzerland, November 16-18, 2015.

Talks

NEMS Oscillators – Future Challenges and Workarounds

G. Villanueva 

15th IEEE Conference on Nanotechnology (IEEENano), Rome, July 2015.

2014

Conference Papers

Interface Losses In Multimaterial Resonators

L. G. Villanueva; B. Amato; T. Larsen; S. Schmid 

2014. 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), San Francisco, CA, USA, 26-30 Jan. 2014. p. 632 – 635. DOI : 10.1109/MEMSYS.2014.6765720.

Posters

Metal-Insulator Interface Losses in Multimaterial Resonators

G. Villanueva; B. Amato; T. Larsen; S. Schmid; A. Boisen 

11th International Workshop on Nanomechanical Cantilever Sensors (NMC), Madrid, May 2014.

Talks

Optical detection of radio waves through a nanomechanical transducer

T. Bagci; A. Simonsen; E. Zeuthen; J. M. Taylor; L. G. Villanueva et al. 

Frontiers in Optics Laser Science (FiO/LS 2014), 2014, Tucson, 2014.

Position Dependent Optical Back-Action in Cantilever Resonators

G. Villanueva; T. Larsen; S. Schmid; J. E. Sader; A. Boisen 

11th International Workshop on Nanomechanical Cantilever Sensors (NMC), Madrid, May 2014.

Laser Detection Back-Action in Cantilevers

G. Villanueva; T. Larsen; s. schmid; J. Sader; A. Boisen 

40th International Conference on Micro- and Nano- Engineering (MNE), 2014, Lausanne, September, 2014.

2013

Conference Papers

Optical Readout of Coupling Between a Nanomembrane and an LC Circuit at Room Temperature

T. Bagci; A. Simonsen; E. Zeuthen; J. M. Taylor; L. G. Villanueva et al. 

2013. CLEO Europe – IQEC, Munich, Germany, 2013. DOI : 10.1109/CLEOE-IQEC.2013.6801215.

Posters

Optical Detection of Radio-Frequency Signals via a Strongly Coupled Nano-Electromechanical System

T. Bagci; A. Simonsen; E. Zeuthen; J. M. Taylor; L. G. Villanueva et al. 

CLEO, San Diego, USA, 2013.

Pyrolysed carbon resonators – Fabrication and characterization

L. Amato; B. Amato; G. Villanueva; J. Emnéus; A. Heiskanen et al. 

39th International Conference on Micro- and Nano- Engineering (MNE), 2013, London, September, 2013.

Talks

Resonant Photothermal Spectroscopy Of Nanoparticulate Matter

T. Larsen; S. Schmid; L. G. Villanueva; A. Boisen 

10th International Workshop on Nanomechanical Cantilever Sensors (NMC), Stanford, 2013.

2012

Conference Papers

A novel high-throughput on-wafer electromechanical sensitivity characterization system for piezoresistive cantilevers

G. Tosolini; L. G. Villanueva; F. Perez-Murano; J. Bausells 

2012. 26th IEEE International Conference on Microelectronic Test Structures (ICMTS), San Diego, USA, 2012. p. 55 – 60. DOI : 10.1109/ICMTS.2012.6190613.

Talks

Novel Oscillator Topologies

L. G. Villanueva; E. Kenig; R. B. Karabalin; M. H. Matheny; R. Lifshitz et al. 

NEMS Workshop, Barcelona, Spain, 2012.

2011

Conference Papers

Ultra-low power palladium-coated MEMS resonators for hydrogen detection under ambient conditions

J. Henriksson; L. G. Villanueva; J. Brugger 

2011. 16th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Beijing, China, 5-9 June, 2011. p. 787 – 790. DOI : 10.1109/TRANSDUCERS.2011.5969266.

Opto-thermal actuation in double layer polymer microcantilevers

C. Martin-Olmos; L. G. Villanueva; A. Llobera; A. Voigt; G. Gruetzner et al. 

2011. Nano-Opto-Mechanical Systems (NOMS), San Diego, USA, 2011. DOI : 10.1117/12.897353.

Self sensing cantilevers for the measurement of (biomolecular) forces

G. Tosolini; F. Perez-Murano; J. Bausells; L. G. Villanueva 

2011. 8th Spanish Conference on Electron Devices (CDE), Palma de Mallorca, Spain, 2011. p. 1 – 4. DOI : 10.1109/SCED.2011.5744171.

Posters

Control of Nonlinearity in a Doubly-Clamped Nanomechanical Beams

M. H. Matheny; L. G. Villanueva; R. B. Karabalin; J. E. Sader; M. L. Roukes 

IEEE International Frequency Control Symposium (IFCS), San Francisco, USA, 2011.

Talks

Nonlinear dynamics in NEMS

L. G. Villanueva; R. B. Karabalin; M. H. Matheny; M. C. Cross; M. L. Roukes 

2nd international workshop in NEMS, Toulouse, France, 2011.

2010

Conference Papers

Very Large Scale Arrays of Chemo-Mechanical Nano-Switches for Ultralow Power Hydrogen Sensing

T. Kiefer; A. Salette; L. G. Villanueva; J. Brugger 

2010. 23rd International IEEE Conference on Micro Electro Mechanical Systems MEMS’2010, Hong Kong, 24-28 January, 2010. DOI : 10.1109/MEMSYS.2010.5442547.

Posters

Pd-functionalized MEMS resonator for hydrogen gas sensing

J. Henriksson; L. G. Villanueva; T. Kiefer; J. Brugger 

Nano-Tera Annual Plenary Meeting, Bern, Switzerland, April 29, 2010.

Fabrication of Metallic Nanodots by Stencil Lithography for Localized Surface Plasmon Resonance Biosensing

O. Vazquez-Mena; T. Sannomiya; L. G. Villanueva; J. Voros; J. Brugger 

Functionalized Plasmonic Nanostructures for Biosensing, Ascona, Switzerland, April 18-23, 2010.

Pd-functionalized MEMS resonator for hydrogen gas sensing at ambient pressure

J. Henriksson; L. G. Villanueva; T. Kiefer; J. Brugger 

7th International Workshop on Nanomechanical Cantilever Sensors, Banff, Canada., May 26-28, 2010.

Talks

Piezoelectric Nanomechanical Devices

R. B. Karabalin; M. H. Matheny; L. G. Villanueva; X. L. Feng; S. C. Masmanidis et al. 

IEEE International Frequency Control Symposium (IFCS), Newport Beach, USA, 2010.

Flexible Membranes Improve Resolution in Stencil Lithography

K. Sidler; O. Vazquez-Mena; L. G. Villanueva; V. Savu; J. Brugger 

The 54th International Conference on Electron, Ion, and Photon Beam Technology, & Nanofabrication, Anchorage, Alaska, U.S.A., June 1- 4, 2010.

Metallic Nanodot Arrays Fabricated by Stencil Lithography on SiO2 and Polymer Substrates

O. Vazquez-Mena; T. Sannomiya; L. G. Villanueva; V. Savu; K. Sidler et al. 

The 54th International Conference on Electron, Ion, and Photon Beam Technology, & Nanofabrication, Anchorage, Alaska, U.S.A., June 1-4, 2010.

2009

Conference Papers

Minimized Blurring in Stencil Lithography using a Compliant Membrane

K. Sidler; G. Villanueva; O. Vazquez-Mena; J. Brugger 

2009. 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Denver, USA, 2009.. DOI : 10.1109/SENSOR.2009.5285768.

Stencilled Conducting Bismuth Nanowires

V. Savu; S. Neuser; L. G. Villanueva; O. Vazquez-Mena; K. Sidler et al. 

2009. 53rd International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Marco Island, FL, USA, May 26-29, 2009. DOI : 10.1116/1.3292630.

Silicon microcantilevers with piezoresistive and MOSFET detection

G. Tosolini; G. Villanueva; J. Bausells; A. García Loureiro; N. S. Iglesias et al. 

2009. 7th Spanish Conference on Electron Devices (CDE), Santiago de Compostela, Spain, 2009. p. 428 – 31. DOI : 10.1109/SCED.2009.4800525.

Direct Etching of High Aspect structures through a Stencil

G. Villanueva; O. Vazquez-Mena; C. Hibert; J. Brugger 

2009. MEMS 2009, Sorrento, Italy, January 25-29, 2009. DOI : 10.1109/MEMSYS.2009.4805339.

Analysis and Applications of Nanostructures Created by Stencil Lithography

O. Vazquez-Mena; T. Sannomiya; M. Tosun; J. Voros; G. Villanueva et al. 

2009. 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Denver, USA, 2009. DOI : 10.1109/SENSOR.2009.5285463.

Silicon microcantilevers with MOSFET detection

G. Tosolini; G. Villanueva; F. Perez-Murano; J. Bausells 

2009. 35th International Conference on Micro- and Nano- Engineering (MNE), Gent, Belgium, 2009. p. 1245 – 1247. DOI : 10.1016/j.mee.2009.11.125.

Mechanically tuneable microoptical structure based on PDMS

V. J. Cadarso; A. Llobera; G. Villanueva; J. A. Plaza; J. Brugger et al. 

2009. XXIII Eurosensors Conference, Lausanne, Switzerland, September 6-9, 2009.. p. 560 – 563. DOI : 10.1016/j.proche.2009.07.140.

Posters

Analysis and Applications of Nanostructures Created by Stencil Lithography

O. Vázquez-Mena; T. Sannomiya; M. Tosun; J. Voros; G. Villanueva et al. 

The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2009), Denver, Colorado, USA, June 21-25, 2009.

Silicon microcantilevers with MOSFET detection

G. Tosolini; G. Villanueva; F. Perez-Murano; J. Bausells 

Trends in Nanotechnology (TNT), Oviedo, Spain, September 07-11, 2009.

Talks

Minimized Blurring in Stencil Lithography using a Compliant Membrane

K. Sidler; G. Villanueva; O. Vazquez-Mena; J. Brugger 

The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2009), Denver, Colorado, USA, June 21-25 2009.

All through stencil MOSFET fabrication

L. G. Villanueva; O. Vazquez-Mena; J. Montserrat; V. Savu; K. Sidler et al. 

Fall meeting of the American Vacuum Society (AVS), San Jose, CA, USA, 2009.

2008

Conference Papers

Quad beam polymeric optomechanical systems

V. J. Cadarso; A. Llobera; G. Villanueva; V. Seidemann; S. Buttgenbach et al. 

2008. International Symposium on Optomechatronic Technologies, San Diego, USA, 2008. DOI : 10.1117/12.807287.

Novel methods to pattern polymers for microfluidics

C. Martin; A. Llobera; T. Leïchlé; G. Villanueva; A. Voigt et al. 

2008. 33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007. p. 972 – 975. DOI : 10.1016/j.mee.2008.01.052.

Discontinuous Palladium Nanostructures for H2 Sensing

C. Fournier; T. Kiefer; L. G. Villanueva; F. Fargier; J. Brugger et al. 

2008. ECS Transactions, Hawaii, 2008. p. 457 – 463. DOI : 10.1149/1.2981151.

Etching of sub-micrometer structures through Stencil

G. Villanueva; O. Vazquez-Mena; M. A. F. van den Boogaart; K. Sidler; V. Savu et al. 

2008. 33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), 23-26 Sept, 2007, Copenhagen, Denmark, Copenhagen, Denmark, 23-26 Sept, 2007. p. 1010 – 1014. DOI : 10.1016/j.mee.2007.12.068.

Sub-100 nm-scale Aluminum Nanowires by Stencil Lithography: Fabrication and Characterization

O. Vazquez-Mena; V. Savu; K. Sidler; G. Villanueva; M. A. F. van den Boogaart et al. 

2008. 3rd IEEE International Conference of Nano/Micro Engineered and Molecular Systems, Sanya, Hainan Island, China, January 6-9, 2008.. p. 807 – 811. DOI : 10.1109/NEMS.2008.4484447.

Stress and aging minimization in photoplastic AFM probes

C. Martin; A. Llobera; G. Villanueva; A. Voigt; G. Gruetzner et al. 

2008. 34th International Conference on Micro and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008. DOI : 10.1016/j.mee.2008.12.033.

Resistivity Measurements of Gold Wires Fabricated by Stencil Lithography on Flexible Polymer Substrates

K. Sidler; O. Vazquez Mena; V. Savu; G. Villanueva; M. A. F. van den Boogaart et al. 

2008. 33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007. p. 1108 – 1111. DOI : 10.1016/j.mee.2007.12.069.

Ion Beam Etching: Replication of Micro Nano-structured 3D Stencil Masks

P. Weber; E. Guibert; S. Mikhailov; J. Brugger; G. Villanueva 

2008. 20th International Conference on the Application of Accelerators in Research and Industry (CAARI), Fort Worth, USA, 2008. p. 539 – 541. DOI : 10.1063/1.3120093.

Posters

Fabrication of Highly Ordered Vertical Nanogap Arrays and Networks on a Large Scale

T. Kiefer; G. Villanueva; .. Brugger 

34th International Conference on Micro- and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008.

Resistless ion implantation of sub-micron scale features through nano-stencil

G. Villanueva; C. Martin; O. Vazquez-Mena; J. Montserrat; P. Langlet et al. 

34th International Conference on Micro- and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008.

Direct fabrication of NIL stamps using Stencil Lithography

L. G. Villanueva; O. Vazquez Mena; T. Kiefer; J. Brugger 

Eurosensors XXII, Dresden, Germany, September 7-10, 2008.

Direct fabrication of NEMS by etching through Stencil

G. Villanueva; J. Brugger 

Micro Nano cantilever Sensors 2008 (MNCS 08), Mainz, Germany, May 19-21, 2008.

Design and optimization of nanogap array sensors

T. Kiefer; L. G. Villanueva; J. Brugger 

Eurosensors XXII, Dresden, Germany, September 7-10, 2008.

Hydrogen Sensors based on Nanoscaled Discontinuities in Palladium

T. Kiefer; F. Favier; L. G. Villanueva; O. Vazquez Mena; A. Salette et al. 

NAMIS International autumn school, Tokyo, Japan, September 2008.

Talks

Research activities at LMIS1-EPFL

T. Kiefer; O. Vazquez Mena; K. Sidler Arnet; V. Fakhfouri; K. Pataky et al. 

5th NAMIS International workshop, Freiburg, Germany, April 4th-5th, 2008.

Discontinuous Palladium Nanostructures for H2 Sensing

C. Fournier; T. Kiefer; L. G. Villanueva; F. Fargier; R. Penner et al. 

Pacific Rim Meeting on Electrochemical and Solid-State Science (PRIME2008), Honolulu, Hawaii, October 12-17 2008.

Stress and aging minimization in photoplastic AFM probes

C. Martin; A. Llobera; G. Villanueva; A. Voigt; G. Gruetzner et al. 

34th International Conference on Micro and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008.

Stencil Lithography: Quick and Clean

G. Villanueva; J. Brugger 

Smart Systems Integration (SSI), Barcelona, Spain, 2008.