Conference Contributions

2023

A 5G n77 Filter Using Shear Bulk Mode Resonator With Crystalline X-cut Lithium Niobate Films

F. Hartmann; S. E. K. Eroglu; E. Navarro-Gesse; C. Collado; J. Mateu et al. 

2024 Ieee International Microwave Filter Workshop, Imfw

2023-01-01

2nd IEEE-MTT-S International Microwave Filter Workshop (IMFW), Cocoa Beach, FL, FEB 21-23, 2024.

p. 78-80

DOI : 10.1109/IMFW59690.2024.10477114

A 3D-Printed Functional Mems Accelerometer

S. Pagliano; D. E. Marschner; D. Maillard; N. Ehrmann; G. Stemme et al. 

2023 Ieee 36Th International Conference On Micro Electro Mechanical Systems, Mems

2023-01-01

36th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Munich, GERMANY, Jan 15-19, 2023.

p. 594-597

DOI : 10.1109/MEMS49605.2023.10052385

2022

Optical Properties of Aluminium Nitride on Insulator for Integrated Photonics

J. Spettel; M. Liffredo; T. Cassese; H. Furci; F. Dubois et al. 

2022 European Conference On Optical Communication (Ecoc)

2022-01-01

European Conference on Optical Communication (ECOC), ELECTR NETWORK, Sep 18-22, 2022.

Optimization of Edge Profile for Improved Anti-Resonance Quality Factor in Lithium Niobate SH0 Resonators

S. Stettler; L. G. Villanueva 

2022 Ieee International Ultrasonics Symposium (Ieee Ius)

2022-01-01

IEEE International Ultrasonics Symposium (IUS), Venice, ITALY, Oct 10-13, 2022.

DOI : 10.1109/IUS54386.2022.9957511

2021

Fully Reconfigurable Coupled-Resonator Optical Waveguides (CROWs) with 10 nW Static Power MEMS

Y. J. Park; D. U. Kim; D. Y. Kim; M. S. Hong; A. Y. Takabayashi et al. 

2021 Conference On Lasers And Electro-Optics (Cleo)

2021-01-01

Conference on Lasers and Electro-Optics (CLEO), ELECTR NETWORK, May 09-14, 2021.

DOI : 10.1364/CLEO_SI.2021.STh1Q.5

16-Core Recirculating Programmable Si Photonic MEMS

D. Y. Kim; Y. J. Park; D. U. Kim; M. S. Hong; A. Y. Takabayashi et al. 

2021 Conference On Lasers And Electro-Optics (Cleo)

2021-01-01

Conference on Lasers and Electro-Optics (CLEO), ELECTR NETWORK, May 09-14, 2021.

DOI : 10.1364/CLEO_SI.2021.STh1Q.6

Resonance Frequency Dependence Of A1 Lamb Mode On The Pitch Of The Electrode Structure

V. Plessky; S. Yandrapalli; S. Kucuk; L. G. Villanueva 

2021 Joint Conference Of The European Frequency And Time Forum And Ieee International Frequency Control Symposium (Ieee Eftf-Ifcs 2021)

2021-01-01

Joint Conference of the European-Frequency-and-Time-Forum / IEEE International Frequency Control Symposium (EFTF/IFCS), ELECTR NETWORK, Jul 07-17, 2021.

DOI : 10.1109/EFTF/IFCS52194.2021.9604331

Study on the Performances of AlScN based SAW/BAW Hybrid Resonators A Parametric Analysis of Acoustic Wave Resonators with Large Figure of Merit

G. Lang; S. Yandrapalli; G. Villanueva 

2021 Joint Conference Of The European Frequency And Time Forum And Ieee International Frequency Control Symposium (Ieee Eftf-Ifcs 2021)

2021-01-01

Joint Conference of the European-Frequency-and-Time-Forum / IEEE International Frequency Control Symposium (EFTF/IFCS), ELECTR NETWORK, Jul 07-17, 2021.

DOI : 10.1109/EFTF/IFCS52194.2021.9604342

Towards a N77 Electroacoustic Filter Using Thin Films of Crystalline Y-cut Lithium Niobate

S. Yandrapalli; S. E. K. Eroglu; J. Mateu; C. Collado; V. Plessky et al. 

2021 Ieee Mtt-S International Microwave Filter Workshop (Imfw)

2021-01-01

IEEE MTT-S International Microwave Filter Workshop (IMFW), Perugia, ITALY, Nov 17-19, 2021.

p. 112-114

DOI : 10.1109/IMFW49589.2021.9642292

Proof Of Concept Of A Graphene-Based Resonant Accelerometer

D. Moreno; X. Fan; F. Niklaus; L. G. Villanueva 

2021 34Th Ieee International Conference On Micro Electro Mechanical Systems (Mems 2021)

2021-01-01

34th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), ELECTR NETWORK, Jan 25-29, 2021.

p. 838-840

DOI : 10.1109/MEMS51782.2021.9375187

FABRICATION AND ANALYSIS OF THIN FILM LITHUM NIOBATE RESONATORS FOR 5GHz FREQUENCY AND LARGE k(t)(2) APPLICATIONS

S. Yandrapalli; S. E. Kucuk; B. Atakan; V. Plessky; L. G. Villanueva 

2021 34Th Ieee International Conference On Micro Electro Mechanical Systems (Mems 2021)

2021-01-01

34th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), ELECTR NETWORK, Jan 25-29, 2021.

p. 967-969

DOI : 10.1109/MEMS51782.2021.9375401

Thin Film Devices For 5G Communications

S. Yandrapalli; M. Liffredo; M. Faizan; S. Kucuk; D. Maillard et al. 

2021 34Th Ieee International Conference On Micro Electro Mechanical Systems (Mems 2021)

2021-01-01

34th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), ELECTR NETWORK, Jan 25-29, 2021.

p. 450-453

DOI : 10.1109/MEMS51782.2021.9375400

2020

Comb Transducer for Generation of SH0 Mode in Crystalline Piezoelectric Membrane

V. Plessky; J. Koskela; S. Yandrapalli 

Proceedings Of The 2020 Ieee International Ultrasonics Symposium (Ius)

2020-01-01

IEEE International Ultrasonics Symposium (IEEE IUS), Las Vegas, NV, Sep 07-11, 2020.

DOI : 10.1109/IUS46767.2020.9251395

Attenuation of Lamb Modes and SH Waves near cut-off Frequencies

V. Plessky; J. Koskela; S. Yandrapalli 

2020 Joint Conference Of The Ieee International Frequency Control Symposium And International Symposium On Applications Of Ferroelectrics (Ifcs-Isaf)

2020-01-01

Joint Conference of the IEEE International Frequency Control Symposium (IEEE IFCS) and IEEE International Symposium on Applications of Ferroelectrics (IEEE IFAS), ELECTR NETWORK, Jul 19-23, 2020.

DOI : 10.1109/IFCS-ISAF41089.2020.9234848

2019

Fabrication Of Lithium Niobate Bulk Acoustic Resonator For 5G Filters

M. Faizan; A. De Pastina; S. Yandrapalli; P. J. Turner; R. B. Hammond et al. 

2019 20Th International Conference On Solid-State Sensors, Actuators And Microsystems & Eurosensors Xxxiii (Transducers & Eurosensors Xxxiii)

2019-01-01

20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII (TRANSDUCERS and EUROSENSORS), Berlin, GERMANY, Jun 23-27, 2019.

p. 1752-1755

DOI : 10.1109/TRANSDUCERS.2019.8808179

Acoustic Actuation Of Suspended Graphene For Linear Excitation Of 2D Nems

M. Faizan; M. M. Parmar; P. Feng; L. G. Villanueva 

2019 20Th International Conference On Solid-State Sensors, Actuators And Microsystems & Eurosensors Xxxiii (Transducers & Eurosensors Xxxiii)

2019-01-01

20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII (TRANSDUCERS and EUROSENSORS), Berlin, GERMANY, Jun 23-27, 2019.

p. 2380-2383

DOI : 10.1109/TRANSDUCERS.2019.8808246

Phase Noise Measurements Of Aluminum Scandium Nitride Oscillators

A. Lozzi; M. Liffredo; E. T-T. Yen; J. Segovia-Fernandez; L. G. Villanueva 

2019 20Th International Conference On Solid-State Sensors, Actuators And Microsystems & Eurosensors Xxxiii (Transducers & Eurosensors Xxxiii)

2019-01-01

20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII (TRANSDUCERS and EUROSENSORS), Berlin, GERMANY, Jun 23-27, 2019.

p. 909-912

DOI : 10.1109/TRANSDUCERS.2019.8808738

Analysis of XBAR resonance and higher order spurious modes

S. Yandrapalli; V. Plessky; J. Koskela; V. Yantchev; P. Turner et al. 

2019 Ieee International Ultrasonics Symposium (Ius)

2019-01-01

IEEE International Ultrasonics Symposium (IUS), Glasgow, ENGLAND, Oct 06-09, 2019.

p. 185-188

DOI : 10.1109/ULTSYM.2019.8925993

Laterally excited bulk wave resonators (XBARs) based on thin Lithium Niobate platelet for 5GHz and 13 GHz filters

V. Plessky; S. Yandrapalli; P. J. Turner; L. G. Villanueva; J. Koskela et al. 

2019 Ieee Mtt-S International Microwave Symposium (Ims)

2019-01-01

IEEE-MTT-S International Microwave Symposium (IMS), Boston, MA, Jun 02-07, 2019.

p. 512-515

DOI : 10.1109/MWSYM.2019.8700876

Temperature fluctuations in M/NEMS

T. Larsen; G. Villanueva 

2nd Frontiers in Nanoelectromechanical Systems (FNS), Palm Springs, February 2019.

2018

Molybdenum Disulfide (MoS2) Nanoelectromechanical Resonators With On-Chip Aluminum Nitride (AlN) Piezoelectric Excitation

H. Jia; X-Q. Zheng; M. Faizan; T. Larsen; G. Villanueva et al. 

The 31st IEEE International Conference on Micro Electro Mechanical Systems, Belfast, Ireland, 21-25 January, 2018.

Piezoelectric Suspended Microchannel Resonators (SMRs)

A. De Pastina; D. Maillard; L. G. Villanueva 

15th International Workshop on Nanomechanical Cantilever Sensors (NMC), Seoul, June 2018.

2017

Fabrication of 2D Material Based NEMS Resonators

A. H. Tran; T. Larsen 

Frequency stability of PZE actuated suspended micro-channel resonators

A. De Pastina 

NanoFluidics and NanoMechanics Workshop, Turin, September 14-15, 2017.

Nonlinearities in NEMS

G. Villanueva; R. Karabalin; M. Matheny; R. Lifshitz; M. Cross et al. 

2017 IEEE International Ultrasonics Symposium (IUS), Washington DC, September 2017.

Piezoelectric Nanoelectromechanical Systems

K. Howell; A. De Pastina; A. Lozzi; T. Larsen; M. Faizan et al. 

2017-07-27

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, Taiwan, June 18-22, 2017.

DOI : 10.1109/TRANSDUCERS.2017.7994010

Frequency stability of PZE actuated suspended micro-channel resonators

A. De Pastina; A. Fernández-Tenllado 

Nonlinearities and Frequency Stability in NEMS

G. Villanueva; R. Karabalin; M. Matheny; E. Kenig; R. Lifshitz et al. 

14th International Workshop on NanoMechanical Sensors, Kona, Hawaii, April 2017.

FEM modeling of energy dissipation in SMRs

A. Gerbino; A. De Pastina; F. Gallaire; C. Meinhart 

Nano Fluidics and Nano Mechanics Workshop (NFNM) 2017, Turin, Italy, 14 – 15 September, 2017.

Experimental setup and o-ring based μfluidic interface for suspended microchannel resonators

D. Maillard; A. De Pastina 

Nano Fluidics and Nano Mechanics Workshop (NFNM) 2017, Turin, Italy, 14 – 15 September, 2017.

Energy dissipation in Suspended Microchannel Resonators as function of channel off-axis placement

M. Lucena Couto; A. De Pastina 

Nano Fluidics and Nano Mechanics Workshop (NFNM) 2017, Turin, Italy, 14 – 15 September, 2017.

Dielectric Transduction of NEMS

K. Howell 

2017 NAMIS International Workshop, Freiburg, September 2017.

Graphene Based Membrane Resonators

T. Larsen; F. Fantino; S. Stassi; A. Tran; C. Ricciardi et al. 

Nano Fluidics and Nano Mechanics Workshop (NFNM) 2017, Turin, Italy, 14 – 15 September, 2017.

Assembly of Silicon Nitride Channels

T. Larsen; C. C. Moreno; O. Vazquez-Mena 

Micro and Nano Engineering (MNE) 2017, Braga, Portugal, 18 – 22 September, 2018.

Release area confinement in Contour Mode Resonators

A. Lozzi; A. De Pastina; L. G. Villanueva; E. T-T. Yen 

2017 IEEE International Ultrasonics Symposium (IUS)

2017

IEEE International Ultrasonics Symposium (IUS), Washington, DC, SEP 06-09, 2017.

DOI : 10.1109/ULTSYM.2017.8092127

2016

3D FEM dissipation model of suspended micro channel resonators

A. De Pastina; A. Fani; F. Gallaire; G. Villanueva 

5th Micro and Nano Flows Conference (MNF 2016), Milan, Italy, September 11-14, 2016.

Parylene-Based Hollow Nanomechanical Resonators For Bioapplications

A. De Pastina; A. N. D. Aupée; T. Larsen; G. Villanueva 

42nd Micro and Nano Engineering Conference, Vienna, Austria, September 19-23, 2016.

50 nm thick AlN Films for Actuation and Detection of Nanoscale Resonators

K. Howell; W. Bashir; A. De Pastina; R. Matloub Aghdam; P. Muralt et al. 

42nd Micro and Nano Engineering Conference, Vienna, Austria, September 19-23, 2016.

Graphene Based Mechanical Resonators Fabricated via Direct Dry Transfer

T. Larsen; P. R. Whelan; M. Di Gisi; P. Bøggildb; G. Villanueva 

42nd Micro and Nano Engineering Conference, Vienna, Austria, September 19-23, 2016.

Anchor Losses Dependence on Electrode Material in Contour Mode Resonators

A. Lozzi; E. T. T. Yen; G. Villanueva 

2016 IEEE International Frequency Control Symposium (IFCS)

2016

2016 IEEE International Frequency Control Symposium, New Orleans, Luisiana, USA, May 9-12, 2016.

p. 100-103

DOI : 10.1109/FCS.2016.7546736

2015

Fabrication of suspended micro-resonator integrated with PZE electrodes

A. De Pastina; G. Villanueva 

NanoBioTech-Montreux, Montreux, Switzerland, November 16-18, 2015.

NEMS Oscillators – Future Challenges and Workarounds

G. Villanueva 

15th IEEE Conference on Nanotechnology (IEEENano), Rome, July 2015.

Fabrication of suspended hollow micro-resonators integrated with PZE electrodes

A. De Pastina; G. Villanueva 

18th Conference in NanoBioTech, Montreux, November 2015.

2014

Laser Detection Back-Action in Cantilevers

G. Villanueva; T. Larsen; s. schmid; J. Sader; A. Boisen 

40th International Conference on Micro- and Nano- Engineering (MNE), 2014, Lausanne, September, 2014.

Position Dependent Optical Back-Action in Cantilever Resonators

G. Villanueva; T. Larsen; S. Schmid; J. E. Sader; A. Boisen 

11th International Workshop on Nanomechanical Cantilever Sensors (NMC), Madrid, May 2014.

Metal-Insulator Interface Losses in Multimaterial Resonators

G. Villanueva; B. Amato; T. Larsen; S. Schmid; A. Boisen 

11th International Workshop on Nanomechanical Cantilever Sensors (NMC), Madrid, May 2014.

Optical detection of radio waves through a nanomechanical transducer

T. Bagci; A. Simonsen; E. Zeuthen; J. M. Taylor; L. G. Villanueva et al. 

Frontiers in Optics Laser Science (FiO/LS 2014), 2014, Tucson, 2014.

Interface Losses In Multimaterial Resonators

L. G. Villanueva; B. Amato; T. Larsen; S. Schmid 

2014 Ieee 27Th International Conference On Micro Electro Mechanical Systems (Mems)

2014

27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), San Francisco, CA, USA, 26-30 Jan. 2014.

p. 632-635

DOI : 10.1109/MEMSYS.2014.6765720

2013

Pyrolysed carbon resonators – Fabrication and characterization

L. Amato; B. Amato; G. Villanueva; J. Emnéus; A. Heiskanen et al. 

39th International Conference on Micro- and Nano- Engineering (MNE), 2013, London, September, 2013.

Resonant Photothermal Spectroscopy Of Nanoparticulate Matter

T. Larsen; S. Schmid; L. G. Villanueva; A. Boisen 

10th International Workshop on Nanomechanical Cantilever Sensors (NMC), Stanford, 2013.

Optical Detection of Radio-Frequency Signals via a Strongly Coupled Nano-Electromechanical System

T. Bagci; A. Simonsen; E. Zeuthen; J. M. Taylor; L. G. Villanueva et al. 

CLEO, San Diego, USA, 2013.

Optical Readout of Coupling Between a Nanomembrane and an LC Circuit at Room Temperature

T. Bagci; A. Simonsen; E. Zeuthen; J. M. Taylor; L. G. Villanueva et al. 

2013 Conference on Lasers & Electro-Optics Europe & International Quantum Electronics Conference CLEO EUROPE/IQEC

2013

CLEO Europe – IQEC, Munich, Germany, 2013.

DOI : 10.1109/CLEOE-IQEC.2013.6801215

2012

Novel Oscillator Topologies

L. G. Villanueva; E. Kenig; R. B. Karabalin; M. H. Matheny; R. Lifshitz et al. 

NEMS Workshop, Barcelona, Spain, 2012.

A novel high-throughput on-wafer electromechanical sensitivity characterization system for piezoresistive cantilevers

G. Tosolini; L. G. Villanueva; F. Perez-Murano; J. Bausells 

26th IEEE International Conference on Microelectronic Test Structures (ICMTS)

2012

26th IEEE International Conference on Microelectronic Test Structures (ICMTS), San Diego, USA, 2012.

p. 55-60

DOI : 10.1109/ICMTS.2012.6190613

2011

Nonlinear dynamics in NEMS

L. G. Villanueva; R. B. Karabalin; M. H. Matheny; M. C. Cross; M. L. Roukes 

2nd international workshop in NEMS, Toulouse, France, 2011.

Self sensing cantilevers for the measurement of (biomolecular) forces

G. Tosolini; F. Perez-Murano; J. Bausells; L. G. Villanueva 

8th Spanish Conference on Electron Devices (CDE)

2011

8th Spanish Conference on Electron Devices (CDE), Palma de Mallorca, Spain, 2011.

p. 1-4

DOI : 10.1109/SCED.2011.5744171

Control of Nonlinearity in a Doubly-Clamped Nanomechanical Beams

M. H. Matheny; L. G. Villanueva; R. B. Karabalin; J. E. Sader; M. L. Roukes 

IEEE International Frequency Control Symposium (IFCS), San Francisco, USA, 2011.

Opto-thermal actuation in double layer polymer microcantilevers

C. Martin-Olmos; L. G. Villanueva; A. Llobera; A. Voigt; G. Gruetzner et al. 

Nano-Opto-Mechanical Systems (Noms)

2011

Nano-Opto-Mechanical Systems (NOMS), San Diego, USA, 2011.

DOI : 10.1117/12.897353

Ultra-low power palladium-coated MEMS resonators for hydrogen detection under ambient conditions

J. Henriksson; L. G. Villanueva; J. Brugger 

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

2011

16th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Beijing, China, 5-9 June, 2011.

p. 787-790

DOI : 10.1109/TRANSDUCERS.2011.5969266

2010

Piezoelectric Nanomechanical Devices

R. B. Karabalin; M. H. Matheny; L. G. Villanueva; X. L. Feng; S. C. Masmanidis et al. 

IEEE International Frequency Control Symposium (IFCS), Newport Beach, USA, 2010.

Pd-functionalized MEMS resonator for hydrogen gas sensing

J. Henriksson; L. G. Villanueva; T. Kiefer; J. Brugger 

Nano-Tera Annual Plenary Meeting, Bern, Switzerland, April 29, 2010.

Fabrication of Metallic Nanodots by Stencil Lithography for Localized Surface Plasmon Resonance Biosensing

O. Vazquez-Mena; T. Sannomiya; L. G. Villanueva; J. Voros; J. Brugger 

Functionalized Plasmonic Nanostructures for Biosensing, Ascona, Switzerland, April 18-23, 2010.

Pd-functionalized MEMS resonator for hydrogen gas sensing at ambient pressure

J. Henriksson; L. G. Villanueva; T. Kiefer; J. Brugger 

7th International Workshop on Nanomechanical Cantilever Sensors, Banff, Canada., May 26-28, 2010.

Flexible Membranes Improve Resolution in Stencil Lithography

K. Sidler; O. Vazquez-Mena; L. G. Villanueva; V. Savu; J. Brugger 

The 54th International Conference on Electron, Ion, and Photon Beam Technology, & Nanofabrication, Anchorage, Alaska, U.S.A., June 1- 4, 2010.

Metallic Nanodot Arrays Fabricated by Stencil Lithography on SiO2 and Polymer Substrates

O. Vazquez-Mena; T. Sannomiya; L. G. Villanueva; V. Savu; K. Sidler et al. 

The 54th International Conference on Electron, Ion, and Photon Beam Technology, & Nanofabrication, Anchorage, Alaska, U.S.A., June 1-4, 2010.

Very Large Scale Arrays of Chemo-Mechanical Nano-Switches for Ultralow Power Hydrogen Sensing

T. Kiefer; A. Salette; L. G. Villanueva; J. Brugger 

23rd International IEEE Conference on Micro Electro Mechanical Systems MEMS’2010

2010

23rd International IEEE Conference on Micro Electro Mechanical Systems MEMS’2010, Hong Kong, 24-28 January, 2010.

DOI : 10.1109/MEMSYS.2010.5442547

2009

All through stencil MOSFET fabrication

L. G. Villanueva; O. Vazquez-Mena; J. Montserrat; V. Savu; K. Sidler et al. 

Fall meeting of the American Vacuum Society (AVS), San Jose, CA, USA, 2009.

Silicon microcantilevers with MOSFET detection

G. Tosolini; G. Villanueva; F. Perez-Murano; J. Bausells 

Trends in Nanotechnology (TNT), Oviedo, Spain, September 07-11, 2009.

Silicon microcantilevers with MOSFET detection

G. Tosolini; G. Villanueva; F. Perez-Murano; J. Bausells 

Microelectronic Engineering

2009

35th International Conference on Micro- and Nano- Engineering (MNE), Gent, Belgium, 2009.

p. 1245-1247

DOI : 10.1016/j.mee.2009.11.125

Silicon microcantilevers with piezoresistive and MOSFET detection

G. Tosolini; G. Villanueva; J. Bausells; A. García Loureiro; N. S. Iglesias et al. 

7th Spanish Conference on Electron Devices (CDE)

2009

7th Spanish Conference on Electron Devices (CDE), Santiago de Compostela, Spain, 2009.

p. 428-31

DOI : 10.1109/SCED.2009.4800525

Mechanically tuneable microoptical structure based on PDMS

V. J. Cadarso; A. Llobera; G. Villanueva; J. A. Plaza; J. Brugger et al. 

Proceedings of the Eurosensors XXIII conference

2009

XXIII Eurosensors Conference, Lausanne, Switzerland, September 6-9, 2009..

p. 560-563

DOI : 10.1016/j.proche.2009.07.140

Stencilled Conducting Bismuth Nanowires

V. Savu; S. Neuser; L. G. Villanueva; O. Vazquez-Mena; K. Sidler et al. 

Proceedings of the 53rd International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication

2009

53rd International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Marco Island, FL, USA, May 26-29, 2009.

DOI : 10.1116/1.3292630

Direct Etching of High Aspect structures through a Stencil

G. Villanueva; O. Vazquez-Mena; C. Hibert; J. Brugger 

Proceedings of the 22nd IEEE International Conference on Micro Electro Mechanical Systems 2009

2009

MEMS 2009, Sorrento, Italy, January 25-29, 2009.

DOI : 10.1109/MEMSYS.2009.4805339

Analysis and Applications of Nanostructures Created by Stencil Lithography

O. Vazquez-Mena; T. Sannomiya; M. Tosun; J. Voros; G. Villanueva et al. 

15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

2009

15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Denver, USA, 2009.

DOI : 10.1109/SENSOR.2009.5285463

Minimized Blurring in Stencil Lithography using a Compliant Membrane

K. Sidler; G. Villanueva; O. Vazquez-Mena; J. Brugger 

15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

2009

15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Denver, USA, 2009..

DOI : 10.1109/SENSOR.2009.5285768

Analysis and Applications of Nanostructures Created by Stencil Lithography

O. Vázquez-Mena; T. Sannomiya; M. Tosun; J. Voros; G. Villanueva et al. 

The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2009), Denver, Colorado, USA, June 21-25, 2009.

Minimized Blurring in Stencil Lithography using a Compliant Membrane

K. Sidler; G. Villanueva; O. Vazquez-Mena; J. Brugger 

The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2009), Denver, Colorado, USA, June 21-25 2009.

2008

Ion Beam Etching: Replication of Micro Nano-structured 3D Stencil Masks

P. Weber; E. Guibert; S. Mikhailov; J. Brugger; G. Villanueva 

20th International Conference on the Application of Accelerators in Research and Industry (CAARI)

2008

20th International Conference on the Application of Accelerators in Research and Industry (CAARI), Fort Worth, USA, 2008.

p. 539-541

DOI : 10.1063/1.3120093

Stencil Lithography: Quick and Clean

G. Villanueva; J. Brugger 

Smart Systems Integration (SSI), Barcelona, Spain, 2008.

Quad beam polymeric optomechanical systems

V. J. Cadarso; A. Llobera; G. Villanueva; V. Seidemann; S. Buttgenbach et al. 

International Symposium on Optomechatronic Technologies

2008

International Symposium on Optomechatronic Technologies, San Diego, USA, 2008.

p. 72660T (12 pp.)

DOI : 10.1117/12.807287

Research activities at LMIS1-EPFL

T. Kiefer; O. Vazquez Mena; K. Sidler Arnet; V. Fakhfouri; K. Pataky et al. 

5th NAMIS International workshop, Freiburg, Germany, April 4th-5th, 2008.

Hydrogen Sensors based on Nanoscaled Discontinuities in Palladium

T. Kiefer; F. Favier; L. G. Villanueva; O. Vazquez Mena; A. Salette et al. 

NAMIS International autumn school, Tokyo, Japan, September 2008.

Discontinuous Palladium Nanostructures for H2 Sensing

C. Fournier; T. Kiefer; L. G. Villanueva; F. Fargier; J. Brugger et al. 

ECS Transactions

2008

ECS Transactions, Hawaii, 2008.

p. 457-463

DOI : 10.1149/1.2981151

Stress and aging minimization in photoplastic AFM probes

C. Martin; A. Llobera; G. Villanueva; A. Voigt; G. Gruetzner et al. 

34th International Conference on Micro and Nano Engineering 2008 (MNE 2008)

2008

34th International Conference on Micro and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008.

DOI : 10.1016/j.mee.2008.12.033

Discontinuous Palladium Nanostructures for H2 Sensing

C. Fournier; T. Kiefer; L. G. Villanueva; F. Fargier; R. Penner et al. 

Pacific Rim Meeting on Electrochemical and Solid-State Science (PRIME2008), Honolulu, Hawaii, October 12-17 2008.

Direct fabrication of NIL stamps using Stencil Lithography

L. G. Villanueva; O. Vazquez Mena; T. Kiefer; J. Brugger 

Eurosensors XXII, Dresden, Germany, September 7-10, 2008.

Resistless ion implantation of sub-micron scale features through nano-stencil

G. Villanueva; C. Martin; O. Vazquez-Mena; J. Montserrat; P. Langlet et al. 

34th International Conference on Micro- and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008.

Design and optimization of nanogap array sensors

T. Kiefer; L. G. Villanueva; J. Brugger 

Eurosensors XXII, Dresden, Germany, September 7-10, 2008.

Stress and aging minimization in photoplastic AFM probes

C. Martin; A. Llobera; G. Villanueva; A. Voigt; G. Gruetzner et al. 

34th International Conference on Micro and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008.

Fabrication of Highly Ordered Vertical Nanogap Arrays and Networks on a Large Scale

T. Kiefer; G. Villanueva; .. Brugger 

34th International Conference on Micro- and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008.

Resistivity Measurements of Gold Wires Fabricated by Stencil Lithography on Flexible Polymer Substrates

K. Sidler; O. Vazquez Mena; V. Savu; G. Villanueva; M. A. F. van den Boogaart et al. 

Microelectronic Engineering

2008

33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007.

p. 1108-1111

DOI : 10.1016/j.mee.2007.12.069

Direct fabrication of NEMS by etching through Stencil

G. Villanueva; J. Brugger 

Micro Nano cantilever Sensors 2008 (MNCS 08), Mainz, Germany, May 19-21, 2008.

Sub-100 nm-scale Aluminum Nanowires by Stencil Lithography: Fabrication and Characterization

O. Vazquez-Mena; V. Savu; K. Sidler; G. Villanueva; M. A. F. van den Boogaart et al. 

IEEE-NEMS 2008 Proceedings

2008

3rd IEEE International Conference of Nano/Micro Engineered and Molecular Systems, Sanya, Hainan Island, China, January 6-9, 2008..

p. 807-811

DOI : 10.1109/NEMS.2008.4484447

Etching of sub-micrometer structures through Stencil

G. Villanueva; O. Vazquez-Mena; M. A. F. van den Boogaart; K. Sidler; V. Savu et al. 

Microelectronic Engineering Journal

2008

33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), 23-26 Sept, 2007, Copenhagen, Denmark, Copenhagen, Denmark, 23-26 Sept, 2007.

p. 1010-1014

DOI : 10.1016/j.mee.2007.12.068

Novel methods to pattern polymers for microfluidics

C. Martin; A. Llobera; T. Leïchlé; G. Villanueva; A. Voigt et al. 

Microelectronic Engineering

2008

33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007.

p. 972-975

DOI : 10.1016/j.mee.2008.01.052

2007

Piezoresistive micro cantilevers for Biomolecular force detection

G. Villanueva; G. Rius; J. Montserrat; F. Perez-Murano; J. Bausells 

6th Spanish Conference on Electron Devices (CDE)

2007

6th Spanish Conference on Electron Devices (CDE), Sevilla, Spain, 2007.

p. 212-215

DOI : 10.1109/SCED.2007.384029

DRIE based novel technique for AFM probes fabrication

G. Villanueva; J. A. Plaza; A. Sanchez; K. Zinoviev; F. Perez-Murano et al. 

Microelectronic Engineering

2007

32nd International Conference on Micro- and Nano- Engineering (MNE), Barcelona, Spain, 2006.

p. 1132-1135

DOI : 10.1016/j.mee.2007.01.078

Novel cantilever design with high control of the mechanical performance

J. A. Plaza; K. Zinoviev; G. Villanueva; C. Dominguez 

Microelectronic Engineering

2007

32nd International Conference on Micro- and Nano- Engineering (MNE), Barcelona, Spain, 2006.

p. 1292-1295

DOI : 10.1016/j.mee.2007.01.111

Polymer microoptoelectromechanical systems: Variable optical attenuators and accelerometers

A. Llobera; G. Villanueva; V. J. Cadarso; V. Seidemann; S. Buttgenbach et al. 

14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

2007

14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Lyon, France, 2007.

p. U544-U545

DOI : 10.1109/SENSOR.2007.4300321

Piezoresistive cantilevers for biomolecular detection

J. Bausells; G. Villanueva; F. Perez-Murano 

4th International Workshop on Nanomechanical Sensors (NMC), Montreal, Canada, 2007.

Etching of sub-micrometer structures through Stencil

G. Villanueva; O. Vazquez-Mena; M. van den Boogaart; K. Sidler; V. Savu et al. 

33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007.

Focused Ion Beam Engineered Nanogap in a Palladium Microwire as a Mechanical Switch for Hydrogen Detection

T. Kiefer; F. Favier; O. Vazquez Mena; L. G. Villanueva; J. Brugger 

33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007.

Reusability of nanostencils for the patterning of Aluminum nanostructures by selective wet etching

O. Vázquez-Mena; G. Villanueva; M. A. F. van den Boogaart; V. Savu; J. Brugger 

33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), Copenhagen, Denmark, 23-26 Sept, 2007.

2006

Piezoresistive cantilevers for intermolecular force detection

G. Villanueva; G. Rius; J. Montserrat; F. Peerez-Murano; J. Bausells 

3rd International Workshop on Nanomechanical Sensors (NMC), Copenhagen, Denmark, 2006.

Transfer of small structures by bonding

G. Villanueva; J. A. Plaza; E. Gonzalez; J. Bausells 

Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems

2006

International Workshop on Wafer Bonding for MEMS (WWB), Halle, 11-12 October 2004.

p. 455-461

DOI : 10.1007/s00542-005-0041-7

Piezoresistive cantilevers in a commercial CMOS technology for intermolecular force detection

G. Villanueva; F. Perez-Murano; M. Zimmermann; J. Lichtenberg; J. Bausells 

Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN)

2006

Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN), Baltimore, USA, 2006.

p. 1302-1305

Piezoresistive cantilevers in a commercial CMOS technology for intermolecular force detection

G. Villanueva; F. Perez-Murano; M. Zimmermann; J. Lichtenberg; J. Bausells 

Microelectronic Engineering

2006

31st International Conference on Micro- and Nano- Engineering (MNE), Vienna, Austria, 2005.

p. 1302-1305

DOI : 10.1016/j.mee.2006.01.223

Development of a diagnosis tool based on the measurement of molecular interactions using CMOS-integrated piezoresistive microcantilevers

J. Bausells; G. Villanueva; F. Perez-Murano; J. Lichtenberg; M. Zimmermann et al. 

3rd International Workshop on Nanomechanical Sensors (NMC)

2006

3rd International Workshop on Nanomechanical Sensors (NMC), Copenhagen, Denmark, 2006.

p. 212-215

2005

Development of an artificial nose integrating NEMS and biological olfactory receptors

E. Pajot; J. Minic; Y. Gorojankina; R. Salesse; J. Bausells et al. 

5th Spanish Conference on Electron Devices (CDE), Tarragona, 2005.

FIB and DRIE combination for nanotip fabrication

G. Villanueva; J. A. Plaza; A. Sanchez-Amores; J. Bausells; E. Martinez et al. 

5th Spanish Conference on Electron Devices (CDE)

2005

5th Spanish Conference on Electron Devices (CDE), Tarragona, Spain, 2005.

p. 443-446

DOI : 10.1109/SCED.2005.1504477

Polysilicon piezoresistive cantilevers for intermolecular force detection

G. Villanueva; J. Bausells; J. Montserrat; F. Perez-Murano 

5th Spanish Conference on Electron Devices (CDE)

2005

5th Spanish Conference on Electron Devices (CDE), Tarragona, Spain, 2005.

p. 495-498

DOI : 10.1109/SCED.2005.1504494

Fabrication of AFM Probes: Tip, Cantilever and Chip micromachining by DRIE

J. A. Plaza; G. Villanueva; A. Sanchez; K. Zinoviev 

19th European Conference on Sensors and Actuators (Eurosensors), Barcelona, Spain, 2005.

Artificial nose integrating biological olfactory receptors and NEMS

G. Gomila; A. Errachid; F. Bessueille; O. Ruiz; E. Pajot et al. 

International Symposium on Olfaction and Electronic Nose (ISOEN)

2005

International Symposium on Olfaction and Electronic Nose (ISOEN), Barcelona, Spain, 2005.

p. 529-532

Development of an artificial nose integrating NEMS and biological olfactory receptors

G. Gomila; A. Errachid; F. Bessueille; O. Ruiz; E. Pajot et al. 

5th Spanish Conference on Electron Devices (CDE)

2005

5th Spanish Conference on Electron Devices (CDE), Tarragona, SPAIN, 2005.

p. 529-532

DOI : 10.1109/SCED.2005.1504506

Focused ion beam production of nanoelectrode arrays

A. Errachid; C. A. Mills; M. Pla; E. Martínez; G. Villanueva et al. 

19th European Conference on Sensors and Actuators (Eurosensors), Barcelona, Spain, 2005.

Fabrication and characterization of Co-Ni magnetic cantilevers

M. Duch; J. A. Plaza; G. Villanueva; R. Perez; J. Esteve et al. 

5th Spanish Conference on Electron Devices (CDE)

2005

5th Spanish Conference on Electron Devices (CDE), Tarragona, Spain, 2005.

p. 201-204

DOI : 10.1109/SCED.2005.1504357

2004

DRIE and FIB combination for nanotip fabrication

G. Villanueva; J. A. Plaza; A. Sanchez-Amores; J. Bausells; E. Martinez et al. 

30th International Conference on Micro- and Nano- Engineering (MNE), Rotterdam, 2004.

Submicron piezoresistive cantilevers in a CMOS-compatible technology for intermolecular force detection

G. Villanueva; J. Montserrat; F. Perez-Murano; G. Rius; J. Bausells 

Microelectronic Engineering

2004

29th International Conference on Micro- and Nano- Engineering (MNE), Cambridge, UK, 22-25 September 2003.

p. 480-486

DOI : 10.1016/j.mee.2004.03.021

CMOS-integrated, cantilever-based sensor devices: the Biofinger project

J. Lichtenberg; J. Bausells; A. Baron; M. Crowley; L. McDonnell et al. 

1st International Workshop on Nanomechanical Sensors (NMC)

2004

1st International Workshop on Nanomechanical Sensors (NMC), Madrid, 2004.

p. 212-215

Nanosensors based on biological olfactory receptors

G. Gomila; A. Errachid; F. Bessueille; O. Ruiz; E. Pajot et al. 

8th European Conference on Micro&Nanoscale Technologies for Biosciences (Nanotech), Montreux, 2004.

Fabrication of nanoelectrodes combining standard microfabrication processes and focused ion beam (FIB)

A. Errachid; E. Martinez; G. Villanueva; J. Bausells; J. Samitier 

Trends in Nanotechnology (TNT), Segovia, 2004.

Immobilization of streptavidin on aminoterminated functionalised gold using microcontact printing to obtain biosensors

A. Errachid; E. Araya; F. Bessueille; C. A. Mills; G. Villanueva et al. 

3rd International Conference on Nanoimprint and NanoTechnologies (NNT), Wien, 2004.

Co-Ni material for magnetic cantilevers

M. Duch; J. A. Plaza; G. Villanueva; R. Perez; J. Esteve et al. 

18th European Conference on Sensors and Actuators (Eurosensors), Rome, 2004.

2003

E-beam defined polysilicon piezoresistive cantilevers for intermolecular force detection

G. Villanueva; G. Rius; J. Bausells; J. Montserrat; F. Perez-Murano 

4th Spanish Conference on Electron Devices (CDE), Calella, 2003.