For low energy surface preparation for SEM cross section or planar viewing.
![](https://www.epfl.ch/research/facilities/cime/wp-content/uploads/2020/08/Ion-beam-milling-SEM-300x156.png)
![](https://www.epfl.ch/research/facilities/cime/wp-content/uploads/2020/08/Ion-beam-milling-SEM-SnSe-186x300.png)
CIME Ion miller:
1 Gatan ILION II
![](https://www.epfl.ch/research/facilities/cime/wp-content/uploads/2020/08/ILION-300x169.jpg)
Features:
- low incidence angle 0-10°, sectorial rotation of the sample, Voltage: 0,1-8 kV
- Vacuum load-lock and liquid nitrogen cold stage to provide rapid workflows on beam sensitive samples
- Real-time observation of the polishing process including an optical microscope with digital imaging; images can be stored and analyzed with DigitalMicrograph® software from Gatan
- Repeatable results from recipes and operation of the Ilion™ II via a 10″ color touch screen interface
- Damage-free surfaces for analytical techniques, such as cathodoluminescence and EBSD, where the signal is generated near the surface