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EPFL Research Facilities
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Center of MicroNanoTechnology
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Biological Electron Microscopy Facility
Bioengineering & Organoids Technology platform
Bioinformatics Competence Center
Biomolecular Screening Facility
Interdisciplinary Centre for Electron Microscopy
Center of MicroNanoTechnology
Center of PhenoGenomics
Flow Cytometry Core Facility
Gene Expression Core Facility
Bertarelli Foundation Gene Therapy Core Facility
Helium liquefaction and recovery system
Histology Core Facility
Proteomics Core Facility
Technology Platform for Hydraulic Machines
BioImaging and Optics Core Facility
Protein Production and Structure Core Facility
Scientific IT & Application Support SCITAS
Swiss CAT+
Equipment
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Thin films
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Ebeam lithography
Photolithography
Etching
Thin films
Metrology
Packaging – Miscellaneous
III/V Lab - IPHYS
LPCVD / Dry or wet oxidation / Alloying / Doping / Diffusion / Densification / Annealing / ALD
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Ebeam lithography
Photolithography
Etching
Thin films
Metrology
Packaging – Miscellaneous
III/V Lab - IPHYS
ROVAK Flash Lamp Annealing System Semi-Line 3.0
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Centrotherm furnaces
Plade RCA
ATOMIC LAYER DEPOSITION BENEQ TFS200 (ALD 1)
ATOMIC LAYER DEPOSITION BENEQ TFS200 (ALD 2)
RTP JETFIRST 200
ROVAK Flash Lamp Annealing System Semi-Line 3.0
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ROVAK Flash Lamp Annealing System Semi-Line 3.0
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Operation Manual
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