![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2020/03/control_computer_1-384x216.gif)
Control Computer
Description of the working environments on the main ebeam tool control computer in zone 7 of the cleanroom.
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2020/04/IMG_3356-384x216.jpg)
Loading & Unloading
Procedure for safe loading and unloading of a sample holder to and from the ebeam tool.
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2020/04/IMG_0950-384x216.jpg)
Alignment Microscope
Checking the sample height and measuring the writing position prior to loading of the holder into the ebeam tool.
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2020/04/IMG_0945-384x216.jpg)
Holders
Available holders for substrates: 50mm, 75mm, 100mm, 150mm, 5inch mask, piece-parts