Skip to content
Logo EPFL, École polytechnique fédérale de Lausanne
  • About
  • Education
  • Research
  • Innovation
  • Schools
  • Campus
Show / hide the search form
Hide the search form
  • EN
  3. Research
    • About
    • Education
    • Research
    • Innovation
    • Schools
    • Campus
    • Laboratories list
  4. EPFL Research Facilities
    • Mission and Policy
    • Research Domains
    • EPFL Research Facilities
    • Faculty members
    • Solutions 4 Sustainability - S4S
    • Awards and Prizes
    • Funding Opportunities
    • Research Management Support
    • From Lab to Market
    • Research Ethics
    • Research with Animals
    • Open Science
    • Contact Us
  5. Center of MicroNanoTechnology
    • Biological Electron Microscopy Facility
    • Bioengineering & Organoids Technology platform
    • Bioinformatics Competence Center
    • Biomolecular Screening Facility
    • Interdisciplinary Centre for Electron Microscopy
    • Center of MicroNanoTechnology
    • Center of PhenoGenomics
    • Flow Cytometry Core Facility
    • Gene Expression Core Facility
    • Bertarelli Foundation Gene Therapy Core Facility
    • Helium liquefaction and recovery system
    • Histology Core Facility
    • Proteomics Core Facility
    • Technology Platform for Hydraulic Machines
    • BioImaging and Optics Core Facility
    • Protein Production and Structure Core Facility
    • Scientific IT & Application Support SCITAS
    • Swiss CAT+
  6. Equipment
    • Reservations
    • Organisation
    • Equipment
    • Process
  • About
  • Education
  • Research
  • Innovation
  • Schools
  • Campus

In the same section

  • Reservations
  • Organisation
  • Equipment
    • Ebeam lithography
    • Photolithography
    • Etching
    • Thin films
    • Metrology
    • Packaging – Miscellaneous
    • III/V Lab – IPHYS
  • Process

Equipment

Ebeam lithography
Photolithography
Etching
Thin films
Metrology
Packaging – Miscellaneous
III/V Lab – IPHYS

Staff & location

  • Who we are
  • Associated Campuses
  • Facts
  • Presidency
  • Vice Presidencies
  • Working at EPFL
  • Recruiting EPFL Talents
  • News & Media
  • Sustainability
  • Equality & Diversity
  • Respect
  • Philanthropy
  • EPFL Alumni
  • Bachelor
  • Master
  • Doctorate
  • Continuing Education
  • International
  • Teaching
  • Admission
  • Study Management
  • Educational Initiatives
  • Education & Science Outreach
  • Research Domains
  • Faculty Members
  • Awards & Prizes
  • Collaborate With Our Researchers
  • EPFL Research Facilities
  • Access Our Technologies
  • Research Ethics
  • Research With Animals
  • Meet the Support Units For Research
  • Services to EPFL Laboratories
  • Open Science
  • Innovation Initiatives
  • Industry Collaboration
  • Startup Launchpad
  • Services & Resources
  • Library
  • Restaurants, Shops & Hotels
  • Security, Prevention & Health
  • Sports
  • Community & Support
  • Chaplaincy
  • Events
  • Arts & Culture
  • Associations
  • Visit EPFL
  • Mobility & Travel
  • School of Architecture, Civil & Environmental Engineering ENAC
  • School of Basic Sciences SB
  • School of Engineering STI
  • School of Computer & Communication Sciences IC
  • School of Life Sciences SV
  • College of Management of Technology CDM
  • College of Humanities CDH

Practical

Services & Resources Emergencies: +41 21 693 3000 Contact Map

Follow EPFL on social media

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
Accessibility Disclaimer Privacy policy

© 2023 EPFL, all rights reserved