Control Computer
Description of the working environments on the main ebeam tool control computer in zone 7 of the cleanroom.
Loading & Unloading
Procedure for safe loading and unloading of a sample holder to and from the ebeam tool.
Alignment Microscope
Checking the sample height and measuring the writing position prior to loading of the holder into the ebeam tool.
Holders
Available holders for substrates: 50mm, 75mm, 100mm, 150mm, 5inch mask, piece-parts