Hamatech HMR900

To be read first:

  • Chucks did not use vacuum clamping. Only mechanical edge stops hold plates during processing. Take care for correct substrate loading loading
  • Please immediately inform the CMi staff in case of problems with the equipment.

RESERVATION RULES AND BOOKING FEES POLICY:

  1. No booking restrictions.
  2. Reservation names must correspond to operators.

Contents:

  1. Introduction
  2. Equipement description
  3. Users manuals
  4. Main recipe listing
  5. Pictures gallery

I. Introduction

The Hamatech HMR900 is a tool dedicated for Cr-plate wet processing or cleanning. Three dedicated medias are installed for successive chemical treatment of standard Cr-blanks (developing exposed resist – Cr wet etching – resist striping) with intermediate DI water rinse and final drying.

The tool is designed to handle square plates up to 7” x 7” (Cr-blank for mask aligner or reticule for DUV stepper)

II. Equipment description

Technical characteristics:

Hamatech HMR900 mask processor:

  • Manual loading and unloading of the substrates
  • Multi-size chuck for square plate 4” x 4” ¦ 5” x 5” ¦ 6” x 6”
  • Chuck for 7” x 7” square plate
  • Mechanical side edge substrate fixation
  • Smooth acceleration and speed occuracy  +/-1rpm
  • Direct and reverse rotation   (CW, CCW)
  • 20 recipes with 50 steps each can be programmed

III. User manual

IV. Nozzle & Programs Examples

V. Pictures gallery