Important informations

• Oven dedicated to polyimide full curing
• Maximum temperature: 300°C
• Carriers for 100mm and 150mm wafers
• Piece parts allowed
• Nitrogen circulation with adjustable temperature threshold
• Location: Zone 11

Starting informations

• Only N2 consumption (green light on) will be charged. Login time will be recorded when the temperature is higher than the adjusted threshold.
• Logout is possible only if N2 is off (green light off)

I. Introduction

There are 3 different possible working modes:

• Regulation mode (mode = 0): a temperature setting is defined with 2 tresholds (A1: high temp treshold and A2: low temp treshold).
• Timing mode: oven can be switched ON after a certain time in mode tf0 (maximum waiting time 99h59min), or oven can remain ON during a certain time in mode tf1.
• Program mode (mode = Pr1): a program is created with a maximum of 9 temperature steps.

The temperature setting can be higher than 300°C to avoid triggering the safety interlock.

Figure 1: tool panel display

II. Oven working modes

Oven switch ON

• Autotest “88 8888” during 5s
• Tp real temperature display on the right side
• To know the setting temperature (SP) push: 

Display:

• 0: oven is in temperature mode regulation
• 1: oven is in program mode
• 2: oven is in program with an external setting

3. Regulation mode

Every time you push this button , it displays the following informtions: temperature setpoint (SP), A1 and A2 alarm tresholds, and real temperature. If you keep pressing it, you can change the setting with digit up .

A1 and A2 tresholds are adjustable. When temperature is higher than A1 there is a white line close to A1, like showing here , same when temperature is lower than A2.

2. Timing mode

There are 2 different modes:

• tf0: regulation is off during the time
• tf1: regulation is active during the time.

3. Program mode

It is the most important mode we use for polyimide full curing or parylene crystallization (stabilization).

description	parameters
n	number of steps
r	number of repeats (= 0 makes the program run only once, = 1 makes the program run twice…)
P0	starting temp for step 1
T1	time to reach P1
P1	target temp at the end of step 1

Start the program:

• when programator is ON, the left display show the Tp program temperature
• when prog 0 is selected, you need the press simultaneously .

At the end of the program Tp symbole is shown and system is ready to start again.

III. Standard process in CMi

Parameter	Value	Description
Pr	1	program 1
N	4	number of steps
R	0	run the program only once
T0	20°C	starting temperature
T1	30min	1st step duration
P1	200°C	target temp of the 1st step
T2	60min	2nd step duration
P2	200°C	target temp of the 2nd step
T3	25min	3rd step duration
P3	300°C	target temp of the 3rd step
T4	60min	4th step duration
P4	300°C	target temp of the 4th step

Table 1: polyimide full curing process

IV. How to operate

1. Login on the Heraeus oven on the Zone 11 computer.
2. Turn the main switch ON .
3. Select the operating mode (0, 1 or 2).
4. Check and modify the program if necessary.
5. Load the wafers inside the oven and start the program.
6. N2 flow starts only when oven temperature is higher than the manual setting
7. At the end of the program, unload wafers, switch OFF the oven and logout on the Zone 11 computer.