Sawatec LSM-250 for MISC polymers

To be read first:

  • SOP validation: Any material that is being spin-coated on the Sawatec coater must be approved by the CMi Staff! A standard operating procedure (SOP) is required and must be validated to use any new material on the system.
  • Cross-Contamination: Different materials with non-compatible chemistry are being coated on the Sawatec coater. Make sure to clean the chuck after each working session. A dedicated trash-bin is available to throw away contaminated material.

  • Please immediately inform the CMi staff in case of problems with the equipment.

RESERVATION RULES AND BOOKING FEES POLICY:

  1. No booking restrictions.
  2. 24/7 booking/use is possible with CMi+1 extended access.
  3. Reservation names must correspond to operators.

Contents:

  1. Introduction
  2. Equipement description
  3. Users manuals
  4. Links
  5. Pictures gallery

I. Introduction

The Sawatec coater line for MISC polymers is equipped with a bench-mounted LSM-250 spin-coating unit and two Präzitherm PZ 28-2 ET / PR 5 SR hotplate & controller units from Harry Gestigkeit GMBH. One hotplate is equipped with a cover and input for nitrogen gas for baking under N2 flow.

This coating line is dedicated to the coating of non-standard (i.e. other than novolak-based photoresists) thin films. This includes but is not restricted to:

  • Polymer molecules in aqueous solution for sacrificial layer applications: DEXTRAN, PAA, PSS, PVA, …
  • Spin-on dielectrics/glass, spin-on dopants (boron, phosphorous, etc…)
  • Conductive polymers: PEDOT:PSS, Nafion
  • Unsafe polymer/photoresists diluted with non-traditional, unsafe solvent: BCB Cyclotene, Omnicoat, ELPAC PA-5500 H, Solvene/PVDF, …

II. Equipment description

Sawatec manual coater:

  • Compact spin-coater with in-deck configuration
  • Handle wafers up to 8″ diameter
  • Minimum chip size: 10mm * 10mm
  • Rotation speeds up to 6’000 RPM
  • Spin programs with up to 24 steps.

Available chucks:

Two chucks are available. One for 4” wafer which can suit 6” wafer and one for smaller samples/chips down to 10x10mm.

Präzitherm hotplates:

  • Precision hotplates PTZ 28-2 ET combined with PR 5 SR controller
  • Maximum tempearture 350 °C, precision +/- 0.5 °C
  • Hotplate surface 280 mm x 200 mm
  • Programmable temperature ramps with up to 5 steps
  • Second hotplate equipped with cover and N2 line for nitrogen ambiant curing

III. User manuals

IV. Links

V. Pictures gallery