Cleanroom
| Zones Zone 01 | Description Photolithography | Tel. 3 64 41 |
| Zones Zone 02 | Description Etching | Tel. 3 64 42 |
| Zones Zone 03 | Description Thin Films | Tel. 3 64 43 |
| Zones Zone 04 | Description Thin Films | Tel. 3 64 44 |
| Zones Zone 05 | Description Photolithography | Tel. 3 64 45 |
| Zones Zone 06 | Description Photolithography | Tel. 3 64 46 |
| Zones Zone 07 | Description EBeam | Tel. 3 64 47 |
| Zones Zone 08 | Description FIB | Tel. 3 64 48 |
| Zones Zone 09 | Description Dicing | Tel. 3 64 49 |
| Zones Zone 10 | Description Parylene | Tel. 3 67 26 |
| Zones Zone 11 | Description Thin Films, IBE | Tel. 3 10 11 |
| Zones Zone 12 | Description PDMS | Tel. 3 10 12 |
| Zones Zone 13 | Description Photolithography | Tel. 3 10 13 |
| Zones Zone 14 | Description Wet Etching, CPD | Tel. 3 10 14 |
| Zones Zone 15 | Description Metrology | Tel. 3 10 15 |
| Zones Zone 16 – Desk in front of zone 12 | Description Krüss, Cutter Plotter | Tel. 3 10 22 |
| Zones Zone 16 – Desk in front of zone 13 | Description NanoScribe | Tel. 3 10 23 |
| Zones Zone 16 – Desk in front of zone 14 | Description MLA150 | Tel. 3 10 24 |
| Zones Zone 17 | Description Wire Bonding | Tel. 3 79 73 |
| Zones Zone 18 | Description PLD, Excimer | Tel. 3 34 10 |
| Zones Zone 19 | Description CMP, KOH, Mixte | Tel. 3 28 46 |
| Zones Zone 22 | Description Grinding | Tel. 3 72 54 |
| Zones Facilities | Description | Tel. 3 64 52 |
| Zones Emergency | Description | Tel. 115 |
| Zones CMi Open Space | Description | Tel. 3 68 35 |
Staff
Please refer to the CMi staff page.