Cleanroom
| Zones | Description | Tel. |
| Zone 01 | Photolithography | 3 64 41 |
| Zone 02 | Etching | 3 64 42 |
| Zone 03 | Thin Films | 3 64 43 |
| Zone 04 | Thin Films | 3 64 44 |
| Zone 05 | Photolithography | 3 64 45 |
| Zone 06 | Photolithography | 3 64 46 |
| Zone 07 | EBeam | 3 64 47 |
| Zone 08 | FIB | 3 64 48 |
| Zone 09 | Dicing | 3 64 49 |
| Zone 10 | Parylene | 3 67 26 |
| Zone 11 | Thin Films, IBE | 3 10 11 |
| Zone 12 | PDMS | 3 10 12 |
| Zone 13 | Photolithography | 3 10 13 |
| Zone 14 | Wet Etching, CPD | 3 10 14 |
| Zone 15 | Metrology | 3 10 15 |
| Zone 16 – Desk in front of zone 12 | Krüss, Cutter Plotter | 3 10 22 |
| Zone 16 – Desk in front of zone 13 | NanoScribe | 3 10 23 |
| Zone 16 – Desk in front of zone 14 | MLA150 | 3 10 24 |
| Zone 17 | Wire Bonding | 3 79 73 |
| Zone 18 | PLD, Excimer | 3 34 10 |
| Zone 19 | CMP, KOH, Mixte | 3 28 46 |
| Zone 22 | Grinding | 3 72 54 |
| Facilities | 3 64 52 | |
| Emergency | 115 | |
| CMi Open Space | 3 68 35 |
Staff
Please refer to the CMi staff page.