Zone 01
Zone 02
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_TEL_Unity_Me_-_Plasma_etcher_-_Fluorine_chemistry_H-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_Plade_Metal_-_Wet_bench_for_metal_etch_H_1-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_Alcatel_AMS200_DSE_-_Plasma_etcher_-_Fluorine_chemistry_H-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_UFT_Piranha_-_Wet_bench_for_Residues_Removal_H-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_SPTS_uEtch_HF_Vapor_H-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_SPTS_Rapier_DSE_-_Plasma_etcher_-_Fluorine_chemistry_H-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_SPTS_Rapier_DSE_-_Plasma_etcher_-_Fluorine_chemistry_H_Back-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_SPTS_APS_-_Dielectric_Plasma_Etcher_-_Fluorine_chemistry_H-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_Plade_Oxide_-_Wet_bench_for_oxide_etch_H-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_Oxford_-_PlasmaPro100_Cobra_-_Plasma_etcher_-_Chlorine_chemistry_H-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_UFT_Remover_-_Wet_bench_for_Resist_Stripping_H-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_TEL_Unity_Me_-_Plasma_etcher_-_Fluorine_chemistry_H_Back-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_STS_Multiplex_ICP_-_Plasma_etcher_-_Chlorine_chemistry_H-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_SPTS_Synapse_-_Dielectric_Plasma_Etcher_-_Fluorine_chemistry_H-1024x768.jpg)
Zone 03
Zone 04
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_Leybold-Optics_LAB600_H_-_Evaporator_Lift-off_H-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_Alliance-Concept_CT200_-_Sputtering_Cluster_Tool_H-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_Woollam_RC2_-_Spectroscopic_Ellipsometer_H_1-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_Pfeiffer-Vacuum_SPIDER600_-_Sputter_multi-chamber_H_2-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_Pfeiffer-Vacuum_SPIDER600_-_Sputter_multi-chamber_H_Back-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_Beneq_TFS200_-_ALD_1_H-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_Beneq_TFS200_-_ALD_2_H-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_KLA_-_P-17_Surface_Profiler_H_1-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_Filmetrics_R50_-_Sheet_Resistance_Measurement_H-1024x768.jpg)
Zone 05
Zone 06
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_EVG_810LT_-_LowTemp_plasma_activation_H-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_Suss_MA6_Gen3_Mask_Aligner_H_1-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_Suess_MABA6_-_Double_side_mask_aligner_and_bond_aligner_H_1-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_Sawatec_LSM200_Coater_for_Polyimide_H-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_EVG_510_-_Wafer_bonder_H-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_Hamatech_Mask_Processor_H_1-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_EVG150_-_Coater_and_developer_system_for_positive_resist_H_1-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_EVG_610_-_Double_side_mask_aligner_and_bond_aligner_H_1-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_EVG_301_-_Single_wafer_cleaner_H-1024x768.jpg)
Zone 07
Zone 08
Zone 09
Zone 10
Zone 11
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_Veeco_IBE_-_Ion_Beam_Etcher_H-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_POWATEC_P‐200__U‐200_H-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_SPTS_Xactix_X4_-_XeF2_Silicon_Etching_System_H-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_Tepla_300_-_Microwave_plasma_stripper_H-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_Despatch_Industries_LCD1-16N-3__-_Oven_350°C_H-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_Alliance-Concept_EVA760_-_Evaporator_H-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_Alliance-Concept_DP650_-_Sputter_single_chamber_multi-target_H-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_MPI_TS150_-_prober_station_H_1-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_Idonus_shadow_mask_aligner_H-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_Heraeus_T6060_-_Multipurpose_Oven_H-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_Heareus_Thermo_Scientific_Oven_1_H-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_FilMetrics_F20_UV_-_Reflectometer_Spectroscopic_H-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_Disco_Grinder_DAG810_H-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_Thermal_NanoImprinter_EHN-3250_H-1024x768.jpg)
![](https://www.epfl.ch/research/facilities/cmi/wp-content/uploads/2024/03/EPFL-CMi_Neytech_Qex_-_Oven_50°C-1200°C_H-1024x768.jpg)
Zone 12
Zone 13
Zone 14
Zone 15
Zone 16
Zone 17
Zone 18
Zone 19
From CMi opening to now
More than 1000 pictures of the cleanroom – from its opening to now – are available HERE.