Available PVD targets in CMi

Evaporation

  • EB : E-Beam evaporation.
  • RH : Resistance Heated Evaporation
    • RH1 : Materials supplied by CMi.
    • RH2 : Materials that must be ordered through the CMi user interface.
    • RH3 : Authorized materials, but not supplied by CMi.
    • RH4 : Materials that can be supplied by CMi in small quantities.
  • DEV : Under development 
Element AgLAB 600 H EB
[99.99%]		EVA 760 EB
[99.99%] 		VACO 250 RH4
[99.99%] 		VACOTEC LTE EB [99.99%]EVA451 at CMi EVA451 at IPHYS EB
[99.99%]		Ebeam 2000 at IPHYS EB
[99.99%]
Element AgAl 10…20%LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element AgClLAB 600 H EVA 760 VACO 250 RH3VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element AgCu 1…10%LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element AgCu 25…35%LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element AgCu 25…35%Al10…20%LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element Ag2OLAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element AgSn1…10%LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element AgIn 1…10%LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element AlLAB 600 H EB
[99.999%] 		EVA 760 EB
[99.999%] 		VACO 250 RH1
[99.999%] 		VACOTEC LTE EB [99.999%]EVA451 at CMi EVA451 at IPHYS EB
[99.99%]		Ebeam 2000 at IPHYS EB
[99.99%]
Element Al:Cu:Si 4%,1% (95:4:1)LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element Al2O3 LAB 600 H EB
[99.99%] 		EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element AlNLAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element AlSc 6.4 at%
(Sc 10.2 wt%) 		LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element AlSc 17.5 at%
(Sc 26.1 wt%) 		LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element AlSc 40.0 at%
(Sc 52.6 wt%) 		LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element AlScNLAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element Al:Si 0.5% LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element Al:Si 0.8% LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element Al:Si 1.0%LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element Al:Si 1.2% LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element Al:Si 1.5% LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element Al:Si 2.0%LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element Al:Si 4.0%LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element AuLAB 600 H EB
[99.99%] 		EVA 760 EB
[99.99%] 		VACO 250 ImpossibleVACOTEC ImpossibleLTE EB [99.99%]EVA451 at CMi EVA451 at IPHYS EB
[99.999%]		Ebeam 2000 at IPHYS EB
[99.999%]
Element AuGe12%LAB 600 H EVA 760 VACO 250 RH3VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element AZO
ZnO:Al2O3 98:2 (wt%) 		LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element BiLAB 600 H EVA 760 VACO 250 RH4
[99.999%] 		VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element CaLAB 600 H EVA 760 VACO 250 RH3VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element CoLAB 600 H EB [99.95%]EVA 760 EB
[99.95%] 		VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element CrLAB 600 H EB
[99.6%] 		EVA 760 EB
[99.6%] 		VACO 250 RH1
[99.6%]		VACOTEC LTE EBEVA451 at CMi RH1EVA451 at IPHYS EB
[99.994-99.998%]		Ebeam 2000 at IPHYS EB
[99.994-99.998%]
Element CuLAB 600 H EVA 760 EB
[99.99%] 		VACO 250 RH1
[99.99%] 		VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS EB
[99.999%]
Element CuC32N8Cl16
(Also called: Copper perchlorophthalocyanine OR CuPcCl16 OR Pigment Green 7 OR Phthalocyanine Green)		LAB 600 H EVA 760 VACO 250 RH3VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element FeLAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element FeGe 50:50 (at%)LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element Fe2O3LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element Fe:Co:B 60:20:20 (at%)LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element GaLAB 600 H EVA 760 VACO 250 RH4
[99.99%]		VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element GeLAB 600 H EB
[99.999%] 		EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS EB
[99.999%]
Element Ge2Sb2Te5LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element GeO2LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element Ge:Sn
80:20 (at%) 		LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element Ge:Sn
84:16 (at%) 		LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element Ge:Sn
90:10 (at%) 		LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element Ge:Sn
94:6 (at%) 		LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element GeTeLAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element HfLAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element HfCLAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element HfOxLAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element HfO2:Gd
96.5:3.5 (%at) 		LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element HZO LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element IGZO
InGaZnOx 		LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element InLAB 600 H EB
[99.999%] 		EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element IrLAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element IrOxLAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element ITO 90:10 wt%
In2O3 – SnO2 		LAB 600 H EB
[99.99%] 		EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS EB
[99.99%]
Element ITZO
In,Zn,Sn 		LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element IWO
In,W 		LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element IZO
In,Zn 		LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element LNO
LaNiO3		LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element La2O3 LAB 600 H EB
[99.99%] 		EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element LiFLAB 600 H EVA 760 VACO 250 RH3VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element MgLAB 600 H EVA 760 VACO 250 RH3VACOTEC RH3LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element MgF2 LAB 600 H EB
[99.99%] 		EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element MgO LAB 600 H EB
[99.5%] 		EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element MoLAB 600 H EB
[99.95%] 		EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element MoOxLAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element MoO3LAB 600 H EVA 760 VACO 250 RH3VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element Mo:Si 75:25 (at%)LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element NbLAB 600 H EB
[99.9%] (Nb + Ta)
Ta = 530ppm 		EVA 760 VACO 250 VACOTEC LTE DEVEVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element NbOLAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element Nb:Ti
50:50 (at%) 		LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element Nb:Ti
85:15 (at%)		LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element Nb:Ti
65:35 (at%)		LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element NbTiNLAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element NiLAB 600 H EB
[99.95%] 		EVA 760 EB
[99.95%] 		VACO 250 VACOTEC LTE EB [99.95%]EVA451 at CMi EVA451 at IPHYS EB
[99.995%]		Ebeam 2000 at IPHYS EB
[99.995%]
Element NiCr 19% LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element Ni:Cu 50:50 (at%)LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element NiCuOxLAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element NiFe 19%LAB 600 H EB
[99.9%] 		EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element NiOLAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element NiO/Li 91/9 (%at) LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element NiO/Li 85/15 (%at) LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element NiO/Li 75/25 (%at) LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element PbLAB 600 H EVA 760 VACO 250 RH3VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element PbSnLAB 600 H EVA 760 VACO 250 RH3VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element PBZT
Pb(Zrx,Ti1-x)O3
(Ba 10.0 wt%) 		LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element PdLAB 600 H EB
[99.95%] 		EVA 760 VACO 250 VACOTEC LTE DEVEVA451 at CMi EVA451 at IPHYS EB
[99.95%]		Ebeam 2000 at IPHYS EB
[99.95%]
Element Polyethylene
C2H4 		LAB 600 H EVA 760 VACO 250 VACOTEC RH3LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element Polypropylene
C3H6 		LAB 600 H EVA 760 VACO 250 VACOTEC RH3LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element Polystyrene_ butadiene
(C8H8)n
(C4H6)m 		LAB 600 H EVA 760 VACO 250 VACOTEC RH3LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element PMMA
Poly(methyl methacrylate)
[CH2C(CH3
(CO2CH3)]n 		LAB 600 H EVA 760 VACO 250 VACOTEC RH3LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element PtLAB 600 H EB
[99.95%] 		EVA 760 EB
[99.95%] 		VACO 250 VACOTEC LTE DEVEVA451 at CMi EVA451 at IPHYS EB
[99.99%]		Ebeam 2000 at IPHYS EB
[99.99%]
Element RuLAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element RuO2LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element SbLAB 600 H EB [99.999%]EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element Sb2S3LAB 600 H not
allowed		EVA 760 not allowedVACO 250 not
allowed		VACOTEC not
allow.		LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element SeLAB 600 H EVA 760 VACO 250 RH4
[99.999%]		VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element SiLAB 600 H EB
[99.999%] 		EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element SiNLAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element SiOLAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element SiO2LAB 600 H EB (+Borofloat)
[99.99%] 		EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element Sn LAB 600 H EVA 760 VACO 250 RH4
[99.999%]		VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element TaLAB 600 H EB
[99.9%] 		EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element TaNLAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element TaOLAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element Ta2O5LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element TeO2LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element TiLAB 600 H EB
[99.9%] 		EVA 760 EB
[99.9%]		VACO 250 VACOTEC LTE EB [99.9%]EVA451 at CMi EVA451 at IPHYS EB
[99.995%]		Ebeam 2000 at IPHYS EB
[99.995%]
Element TiCLAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element TiOLAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element TiO2LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element TiO2:Cr
87:13 (%at) 		LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element TiO2:Cr
74:26 (%at) 		LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element Ti2O3 LAB 600 H EB
[99.5%] 		EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element Ti3O5 LAB 600 H EB
[99.5%] 		EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element TiNLAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element V2O3LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element V2O5LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element V2O5:Ge
96:4 (%at) 		LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element V2O5:Ge
94.5:5.5 (%at) 		LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element V2O5:Ge
94:6 (%at) 		LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element V2O5:Ge
93.5:6.5 (%at) 		LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element V2O5:Ge
92.5:7.5 (%at) 		LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element WLAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element WOxLAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element WSi2LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element W:Ti 10% (wt%)LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element YLAB 600 H EB
[99.9%] 		EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element Y2O3 LAB 600 H EB
[99.99%] 		EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element ZnLAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element ZrLAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element ZrNLAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element ZrOx LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element ZrO2 LAB 600 H EB
[99.3%] 		EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS
Element ZTO
Zn,Sn 		LAB 600 H EVA 760 VACO 250 VACOTEC LTE EVA451 at CMi EVA451 at IPHYS Ebeam 2000 at IPHYS

Sputtering / Laser ablation

  • SP : Sputtering
    • SP-DC : DC
    • SP-RF : RF
    • SP-PDC : Pulsed DC
    • SP-X : Unknown mode 
  • RSP : Reactive Sputtering
  • LA : Laser Ablation
    • LA1 : PLD Chamber n°1
    • LA2 : PLD Chamber n°2
Element AgSPIDER 600 DP 650 SP-DC
[99.99%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element AgAl 10…20%SPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element AgClSPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element AgCu 1…10%SPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element AgCu 25…35%SPIDER 600 DP 650 SP-DCPLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element AgCu 25…35% Al 10…20%SPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element AgSn 1…10%SPIDER 600 DP 650 SP-DCPLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element AgIn 1…10%SPIDER 600 DP 650 SP-DCPLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element Ag2OSPIDER 600 DP 650 RSP
Ag [99.99%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element AlSPIDER 600 SP-DC
or
SP-PDC
[99.9995%]		DP 650 SP-DC
[99.9995%]		PLD CT200 SP-X
[99.999%]		Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element Al:Cu:Si 4%,1%
(95:4:1) 		SPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element Al2O3 SPIDER 600 SP-RF
[99.99%] 		DP 650 PLD CT200 SP-X
[99.99%]		Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element AlNSPIDER 600 RSP
Al [99.9995%] 		DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) SP 		UNIVEX
at PV-LAB (2)
Element AlSc 6.4 at%
(Sc 10.2 wt%) 		SPIDER 600 SP-PDC
[99.9%]		DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element AlSc 17.5 at%
(Sc 26.1 wt%) 		SPIDER 600 SP-PDC
[99.99%] 		DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element AlSc 40.0 at%
(Sc 52.6 wt%) 		SPIDER 600 SP-PDC
[99.9%] 		DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element AlScNSPIDER 600 RSP
AlSc 6.4 at% [99.9%]
AlSc 17.5 at% [99.99%]
AlSc 40.0 at% [99.9%]		DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element Al:Si 0.5%SPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element Al:Si 0.8% SPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element Al:Si 1.0%SPIDER 600 SP-DC
[99.9995%] 		DP 650 SP-DC
[99.999%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element Al:Si 1.2% SPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element Al:Si 1.5% SPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element Al:Si 2.0%SPIDER 600 SP-DC
[99.9995%]
(Si 1.95 wt% photometry) 		DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element Al:Si 4.0%SPIDER 600 SP-DC
[99.9995%]
(Si 3.82 wt% photometry) 		DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element AuSPIDER 600 DP 650 SP-DC
[99.99%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element AuGe12%SPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element AZO
ZnO:Al2O3 98:2 (wt%) 		SPIDER 600 DP 650 SP-RF
[99.99%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) SP
(often installed) 		UNIVEX
at PV-LAB (2)
Element BiSPIDER 600 DP 650 SP-DC [99.99%]PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element CaSPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element CoSPIDER 600 DP 650 PLD CT200 SP-X
[99.95%]		Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element CrSPIDER 600 DP 650 SP-DC
[99.95%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element CuSPIDER 600 DP 650 SP-DC
[99.995%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element CuC32N8Cl16
(Also called: Copper perchlorophthalocyanine OR CuPcCl16 OR Pigment Green 7 OR Phthalocyanine Green)		SPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element FeSPIDER 600 DP 650 SP-RF
[99.99%]		PLD CT200 SP-X
[99.99%]		Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element FeGe 50:50 (at%)SPIDER 600 DP 650 SP-RF
[99.9%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element Fe2O3SPIDER 600 DP 650 SP-RF
[99.5%] 		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element Fe:Co:B 60:20:20 (at%)SPIDER 600 DP 650 SP-RF
[99.9%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element GaSPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element GeSPIDER 600 SP-DC
[99.995%]		DP 650 SP-DC
[99.999%]		PLD CT200 SP-X
[99.999%]		Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element Ge2Sb2Te5SPIDER 600 DP 650 SP-RF
[99.999%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element GeO2SPIDER 600 SP-RF
[99.99%] 		DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element Ge:Sn
80:20 (at%) 		SPIDER 600 DP 650 SP-DC
[99.99%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element Ge:Sn
84:16 (at%) 		SPIDER 600 DP 650 SP-DC
[99.99%] 		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element Ge:Sn
90:10 (at%) 		SPIDER 600 DP 650 SP-DC
[99.99%] 		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element Ge:Sn
94:6 (at%) 		SPIDER 600 DP 650 SP-DC
[99.99%] 		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element GeTeSPIDER 600 DP 650 SP-RF
[99.999%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element HfSPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element HfCSPIDER 600 DP 650 SP-RF or SP-DC
[99.5%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element HfOx SPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element HfO2:Gd
96.5:3.5 (%at) 		SPIDER 600 DP 650 PLD LA1CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element HZOSPIDER 600 DP 650 PLD LA1CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element IGZO
InGaZnOx 		SPIDER 600 DP 650 SP-RF
[99.99%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) SP 		UNIVEX
at PV-LAB (2)
Element InSPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element IrSPIDER 600 DP 650 SP-DC
[99.9%] 		PLD CT200 SP-XKenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element IrOxSPIDER 600 DP 650 RSP
Ir [99.9%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element ITO 90:10 wt%
In2O3 – SnO2 		SPIDER 600 SP-RF
[99.99%] 		DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) SP
(often installed) 		UNIVEX
at PV-LAB (2)
Element ITZO
In,Zn,Sn 		SPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2) SP
Element IWO
In,W 		SPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) SP
(often installed)		UNIVEX
at PV-LAB (2)
Element IZO
In,Zn 		SPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) SP 		UNIVEX
at PV-LAB (2) SP
Element LNO
LaNiO3		SPIDER 600 DP 650 PLD LA2CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element La2O3 SPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element LiFSPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element MgSPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element MgF2 SPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) SP 		UNIVEX
at PV-LAB (2)
Element MgO SPIDER 600 SP-RF
[99.95%] 		DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element MoSPIDER 600 SP-DC
[99.99%] 		DP 650 SP-DC
[99.95%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element MoO3SPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element MoOxSPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) SP 		UNIVEX
at PV-LAB (2)
Element Mo:Si 75:25 (at%)SPIDER 600 DP 650 SP-DC
[99.9%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element NbSPIDER 600 SP-DC
[99.9%]
Ta = 334ppm 		DP 650 SP-DC
[99.95%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element NbOSPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) SP 		UNIVEX
at PV-LAB (2)
Element Nb:Ti
50:50 (at%) 		SPIDER 600 DP 650 SP-DC
[99.9%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element Nb:Ti
85:15 (at%)		SPIDER 600 DP 650 SP-DC
[99.9%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element Nb:Ti
65:35 (at%)		SPIDER 600 DP 650 SP-DC
[99.99%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element NbTiNSPIDER 600 DP 650 RSP
Nb:Ti 50:50 [99.9%]
Nb:Ti 85:15 [99.9%]
Nb:Ti 65:35 [99.99%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element NiSPIDER 600 DP 650 SP-RF
[99.95%]		PLD CT200 SP-X
[99.99%]		Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element NiCr 19% SPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element Ni:Cu 50:50 (at%)SPIDER 600 DP 650 SP-RF
[99.95%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element NiCuOxSPIDER 600 DP 650 RSP
Ni:Cu 50:50 at% [99.95%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element NiFe 19%SPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element NiOSPIDER 600 DP 650 RSP
Ni [99.95%]
SP-RF
[99.9%]
PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) SP 		UNIVEX
at PV-LAB (2)
Element NiO/Li 91/9 (%at)SPIDER 600 DP 650 PLD LA2CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element NiO/Li 85/15 (%at) SPIDER 600 DP 650 PLD LA2CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element NiO/Li 75/25 (%at) SPIDER 600 DP 650 PLD LA2CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element PbSPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element PbSnSPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element PBZT
Pb(Zrx,Ti1-x)O3
(Ba 10.0 wt%)		SPIDER 600 DP 650 PLD LA2 CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element PdSPIDER 600 DP 650 SP-DC
[99.95%] 		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element Polyethylene
C2H4 		SPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element Polypropylene
C3H6 		SPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element Polystyrene_ butadiene
(C8H8)n
(C4H6)m 		SPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element PMMA
Poly(methyl methacrylate)
[CH2C(CH3
(CO2CH3)]n 		SPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element PtSPIDER 600 SP-DC
[99.95%] 		DP 650 SP-DC
[99.99%]		PLD CT200 SP-DCKenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element RuSPIDER 600 SP-DC
[99.95%] 		DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element RuO2SPIDER 600 SP-RF
Ru [99.95%]		DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element SbSPIDER 600 DP 650 SP-DC
[99.999%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element Sb2S3SPIDER 600 DP 650 SP-RF
[99.999%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element ScSPIDER 600 DP 650 PLD CT200 SP-X
[99.99%]		Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element SeSPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element SiSPIDER 600 SP-DC
Boron doped
5-30 mΩ.cm
2.1019 – 1018 at/cm3
[99.9999%] 		DP 650 SP-DC
Boron doped
5-30 mΩ.cm
[99.9999%]		PLD CT200 SP-X
[99.999%]		Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element SiNSPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS SPOERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element SiOSPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) SP		UNIVEX
at PV-LAB (2)
Element SiO2SPIDER 600 SP-RF
[99.99%] 		DP 650 PLD CT200 SP-RF
[99.995%]		Kenositec at IPHYS SP
OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element Sn SPIDER 600 DP 650 SP-DC
[99.998%]		PLD CT200 SP-X
[99.999%]		Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element TaSPIDER 600 SP-DC
[99.98%] 		DP 650 SP-DC
[99.99%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element TaNSPIDER 600 DP 650 SP-RF
[99.95%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element TaOSPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) SP 		UNIVEX
at PV-LAB (2)
Element Ta2O5SPIDER 600 SP-RF
[99.99%] 		DP 650 PLD CT200 Kenositec at IPHYS SPOERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element TeO2SPIDER 600 DP 650 SP-RF
[99.99%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element TiSPIDER 600 SP-DC
[99.995%] 		DP 650 SP-DC
[99.995%]		PLD CT200 SP-X
[99.99%]		Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) SP 		UNIVEX
at PV-LAB (2)
Element TiCSPIDER 600 DP 650 SP-RF
[99.5%] 		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element TiOSPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) SP 		UNIVEX
at PV-LAB (2)
Element TiO2SPIDER 600 RSP
Ti [99.995%]
SP-RF
[99.5%] 		DP 650 SP-RF
[99.99%]		PLD CT200 SP-X
[99.99%]		Kenositec at IPHYS SPOERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element TiO2:Cr
87:13 (%at)		SPIDER 600 DP 650 PLD LA2
[99.9%]
(no process available!)		CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element TiO2:Cr
74:26
(%at)		SPIDER 600 DP 650 PLD LA2
[99.9%]
(no process available!)		CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element Ti2O3 SPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element Ti3O5 SPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element TiNSPIDER 600 RSP
Ti [99.995%] 		DP 650 SP-RF
[99.5%]		PLD LA1
[99.5%]
(no process available!) 		CT200 SP-X
[99.5%]		Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element V2O3SPIDER 600 DP 650 PLD LA1CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element V2O5SPIDER 600 SP-RF
[99.9%] 		DP 650 PLD LA1CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element V2O5:Ge 96:4 (%at)SPIDER 600 DP 650 PLD LA1
[99.9%] 		CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element V2O5:Ge 94.5:5.5 (%at) SPIDER 600 DP 650 PLD LA1
[99.9%] 		CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element V2O5:Ge 94:6 (%at) SPIDER 600 DP 650 PLD LA1
[99.9%] 		CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element V2O5:Ge 93.5:6.5 (%at) SPIDER 600 DP 650 PLD LA1
[99.9%] 		CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element V2O5:Ge 92.5:7.5 (%at) SPIDER 600 DP 650 PLD LA1
[99.9%] 		CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element WSPIDER 600 SP-DC
[99.95%]		DP 650 SP-DC
[99.95%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element WOxSPIDER 600 DP 650 RSP
W [99.95%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element WSi2SPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element W:Ti 10% (wt%)SPIDER 600 SP-DC
[99.99%] 		DP 650 SP-DC
[99.99%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element YSPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element Y2O3 SPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element ZnSPIDER 600 DP 650 SP-DC
[99.99%] 		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element ZrSPIDER 600 DP 650 SP-DC
[99.9%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element ZrNSPIDER 600 DP 650 RSP
Zr [99.9%]		PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element ZrOxSPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element ZrO2 SPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS SPOERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2)
Element ZTO
Zn,Sn 		SPIDER 600 DP 650 PLD CT200 Kenositec at IPHYS OERLIKON CLUSTERLINE
at CSEM (1) 		UNIVEX
at PV-LAB (2) SP

(1) : Contact bertrand.paviet-salomon@csem.ch

(2) : Contact franz-josef.haug@epfl.ch