III/V lab

Photolithography

• Convac 1001S, 2 x Spin coater 0-10000 rpm for 2 inches wafers
• Süss MicroTec MJB3 UV400, 2 x Mask aligner for 4 x 4 inches masks with 365 nm to 405 nm light source
• Mask aligner MA6, for 2.5 to 7 inches masks, 250 nm to 405 nm light source, max 2 inches Wafer, resolution of 0.5um
• Süss MicroTec LabSpin6BM, 2 x Spin coater 0-8000 rpm for 2 to 6 inches wafer

Dry Etching

• Sentech ICP-RIE SI 500 (500070), RIE Etcher with etcher with 1200 W RF generator for piece parts up to 4 inches wafers
• Sentech ICP-RIE SI 500 (500292), RIE Etcher with etcher with 1200 W RF generator for piece parts up to 4 inches wafers
• Sentech ICP-RIE SI 500 (500591) RIE Etcher with etcher with 1200 W RF generator for piece parts up to 4 inches wafers
• Oxford Plasmalab system 80 plus, RIE Etcher (CF4, Ar, O2, CHF3 and SF6) with 600 W RF generator for piece parts up to 8 inches wafers
• Plasmaline 415 Tegal, Barrel Stripper (O2) with 300 W RF generator for piece parts up to 6 inches wafers

Wet Etching

• HF, brome/methanol, HCL, HNO3, H4SO4, etc.

Thin Films Equipment

• Ebeam 2000, Electron beam evaporator
• Oxford Plasmalab System 100, SiO2, Si3N4, SiC and aSi PECVD
• UniTemp RSS-450-110, Mini reflow solder system
• Kenosistec sputtering + Intellemetrics optical control, Magnetron sputtering system
• RTP AS-ONE AnnealSys , Rapid Thermal Processing 
• Alliance-Concept EVA-451, Electron beam evaporator

Metrology Equipment

• Zeiss NVision 40 CrossBeam SEM/FIB, resolution of 1 nm at 15 kV and 2.2 nm at 1 kV for piece parts up to 2 cm wafers
• Olympus BX51, Optical microscope with 2x, 5x, 10x, 20x, 50x, 100x objectives and 5 Mpx camera
• Tencor Alphastep IQ, Profilometer for piece parts up to 4 inches wafers
• Optical Microscope Sensofar S-Neox, Confocal + Interference modes. Resolution in confocal mode: 150nm lateral, 1nm vertical. Resolution in interference mode: 200nm lateral, <0.1nm vertical

Backend

• Süss MicroTec HR 100, Scriber diamond two-sided for “toe scribing” and 60° cutting angle square shaft for piece parts up to 4 inches wafers
• JFP Model 100, max 3 inches wafer scriber